Manabu Shimada

Last Updated :2023/06/01

Affiliations, Positions
Graduate School of Advanced Science and Engineering, Professor
E-mail
smdhiroshima-u.ac.jp
Self-introduction
Preparation of thin-films, particles, and their composites having useful structure and composition is being studied by synthesizing nano-sized clusters and particulate matter suspended in gases and depositing them in the gas phase. The effects of surface deposition of nanoobjects as contaminants are also being investigated.

Basic Information

Academic Degrees

  • Doctor of Engineering, Osaka Prefecture University
  • Master of Engineering, Kyoto University

Educational Activity

  • [Bachelor Degree Program] School of Engineering : Cluster 3(Applied Chemistry, Biotechnology and Chemical Engineering) : Program of Chemical Engineering
  • [Master's Program] Graduate School of Advanced Science and Engineering : Division of Advanced Science and Engineering : Chemical Engineering Program
  • [Doctoral Program] Graduate School of Advanced Science and Engineering : Division of Advanced Science and Engineering : Chemical Engineering Program

Research Fields

  • Engineering;Process / Chemical engineering;Properties in chemical engineering process / Transfer operation / Unit operation
  • Engineering;Process / Chemical engineering;Reaction engineering / Process system

Research Keywords

  • microscopic morphology control of material surface
  • functional thin film
  • health effect of nanoobjects - test materials preparation
  • aerosol
  • particle and powder deposition in gas phase
  • microcontamination
  • application of rf and microwave plasmas to material processing
  • nanoparticles

Educational Activity

Course in Charge

  1. 2023, Undergraduate Education, Second Semester, Basic Experiments in Chemistry
  2. 2023, Undergraduate Education, 1Term, Fluids Engineering
  3. 2023, Undergraduate Education, 3Term, Mathematics for Chemical Engineers
  4. 2023, Graduate Education (Master's Program) , 3Term, Special Exercises on Chemical Engineering B
  5. 2023, Graduate Education (Master's Program) , 4Term, Special Exercises on Chemical Engineering B
  6. 2023, Graduate Education (Master's Program) , Academic Year, Special Study on Chemical Engineering
  7. 2023, Graduate Education (Master's Program) , 2Term, Fluid Dynamics Analysis
  8. 2023, Graduate Education (Master's Program) , 3Term, Fluid Dynamics Analysis
  9. 2023, Graduate Education (Doctoral Program) , Academic Year, Special Study on Chemical Engineering

Research Activities

Academic Papers

  1. Spray Synthesis of Pd Nanoparticle Incorporated HKUST-1, and Its Catalytic Activity For 4-Nitrophenol Reduction, Advanced Powder Technology, 33(8), 103701, 202208
    Link to Paper Search Results by DOI
  2. Preparation of TiO2-CNT-Ag Ternary Composite Film with Enhanced Photocatalytic Activity via Plasma-Enhanced Chemical Vapor Deposition, CATALYSTS, 12(5), 508, 20220430
    Link to Paper Search Results by DOI
  3. Synthesis of ZnO/Ag/SiO2 Nanocomposite Using Flame Pyrolysis Method and Its Photocatalytic Activity, Materials Science Forum, 1057, 119-128, 20220331
  4. Ag-Doped TiO2 Composite Films Prepared Using Aerosol-Assisted, Plasma-Enhanced Chemical Vapor Deposition, CATALYSTS, 12(4), 365, 20220323
    Link to Paper Search Results by DOI
  5. Effect of Heating Rate on the Photocatalytic Activity of Ag–TiO2 Nanocomposites by One-Step Process via Aerosol Routes, CATALYSTS, 12(1), 17, 20211224
  6. Fabrication of TiO2-copper oxide nanoparticulate thin films through the PECVD-PVD method, 2021 European Aerosol Conference (EAC 2021), AT P3-10, 20210830
  7. Photocatalytic activity and preparation of TiO2-CNT-Ag ternary thin films via aerosol-assisted and plasma-enhanced chemical vapour deposition, 2021 European Aerosol Conference (EAC 2021), AT P3-9, 20210830
  8. One-step Synthesis of Gold@Silica Yolk-Shell Nanoparticles with Catalytic Activity, Chemistry Letters, 50(8), 1475-1478, 20210801
    Link to Paper Search Results by DOI
  9. Improvement of Production Efficiency of Spray-synthesized HKUST-1, Advanced Powder Technology, 32(7), 2370-2378, 20210701
    Link to Paper Search Results by DOI
  10. Facile fabrication of HKUST-1 thin films and free-standing MWCNT/HKUST-1 film using a spray-assisted method, MICROPOROUS AND MESOPOROUS MATERIALS, 312(7), 110771, 202107
    Link to Paper Search Results by DOI
  11. Effect of Ag Loading Content on Morphology and Photocatalytic Activity of Ag‒TiO2 Nanoparticulate Films Prepared via Simultaneous Plasma-Enhanced Chemical and Physical Vapor Deposition, Materials Research Express, 7(11), 116406, 20201118
    Link to Paper Search Results by DOI
  12. Assessment of Cytokine-Induced Neutrophil Chemoattractants as Biomarkers for Prediction of Pulmonary Toxicity of Nanomaterials, Nanomaterilas, 10(8), 1563, 20200809
  13. Effects of Process Conditions on the Morphology of Coating Layer Fabricated on the Surface of Carbon Nanotubes via an In-flight Coating Method, Earozoru Kenkyu, 35(2), 129-134, 20200620
  14. Fabrication of ZnO-SiO2 Nanocomposite Materials Prepared by a Spray Pyrolysis for the Photocatalytic Activity under UV and Sunlight Irradiations, IOP Conf. Series: Materials Science and Engineering, 778, 012105, 20200605
  15. Effect of Ag Content in ZnO-Ag Nanocomposites Prepared by Spray Pyrolysis Method for Degradation of Textile Dye Waste, AIP Conference Proceedings, 2219, 030005, 20200505
  16. Bioinspired One-Step Synthesis of Pomegranate-like Silica@Gold Nanoparticles with Surface-Enhanced Raman Scattering Activity, LANGMUIR, 36(10), 2553-2562, 20200317
    Link to Paper Search Results by DOI
  17. Fabrication of Hollow TiO2 Nanotubes via a Simple Gas-Phase Process Using In-Flight Coating Followed by Heat Treatment, JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 53(1), 45-48, 20200120
    Link to Paper Search Results by DOI
  18. CVD Synthesis and Photocatalytic Performance Evaluation of Nanocomposite TiO2 Thin Film with Ag Nanoparticles and Carbon Nanotubes, 18th Asian Pacific Confederation of Chemical Engineering Congress (APCChE 2019), H224, 20190923
  19. One-pot Synthesis of Pomegranate-like Plasmonic Nanoparticles for Surface-Enhanced Raman Scattering, 18th Asian Pacific Confederation of Chemical Engineering Congress (APCChE 2019), C303, 20190923
  20. Facile Fabrication of HKUST-1 Nanocomposites Incorporating Fe3O4 and TiO2 Nanoparticles by a Spray-Assisted Synthetic Process, 18th Asian Pacific Confederation of Chemical Engineering Congress (APCChE 2019), D314, 20190923
  21. The Effect of Catalyst Weight on the Photocatalytic Performance of ZnO-Ag Nanocomposites Prepared by Flame Pyrolysis Method, IOP Conf. Series: Materials Science and Engineering, 673, 012014, 20190807
  22. Effects of Nanoparticle Properties on the Structure of Nanoparticle Agglomerates Generated by Spray-Drying of Suspension of Monodisperse Nanoparticles, 11th Asian Aerosol Conference, OS-7-LT5-1, 20190527
  23. Visible-Light Photoactivity of Photocatalytic Ag--TiO2 Nanocomposite Thin Film Prepared via Combined Gas-phase Deposition of Nanoparticles, 11th Asian Aerosol Conference, OS-7-LT5-5, 20190527
  24. Microwave Plasma-Enhanced Nanocoatings of Polymethylmethacrylate on Multiwalled Carbon Nanotubes, 11th Asian Aerosol Conference, P2-071, 20190527
  25. Development of Dye-Doped Silica Nanoparticles with Controllable Size as Aerosol Tracer Particles, 11th Asian Aerosol Conference, P2-072, 20190527
  26. Photocatalytic Activity of ZnO-Ag Nanocomposites Prepared by a One-Step Process Using Flame Pyrolysis, International Journal of Technology, 10(3), 571-581, 20190524
    Link to Paper Search Results by DOI
  27. Facile fabrication of HKUST-1 Nanocomposites Incorporating Fe3O4 and TiO2 Nanoparticles by a Spray-Assisted Synthetic Process and Their Dye Adsorption Performances, Microporous and Mesoporous Materials, 280, 227-235, 20190515
    Link to Paper Search Results by DOI
  28. Effects of Tungsten Oxide on Lungs Following Inhalation, 23rd Congress of the Asian Pacific Society of Respirology (APSR 2018), AP488, 20181129
  29. Usefulness of Myeloperoxidase as a Biomarker for the Ranking of Pulmonary Toxicity of Nanomaterials, Particle and Fibre Toxicology, 15, 41, 20181023
    Link to Paper Search Results by DOI
  30. Generation and Processing of Fine Particles in Gas-phase Environment (Plenary), 1st International Symposium of Indonesian Chemical Engineering (ISIChem) 2018, IS-PS-003, 20181004
  31. Photocatalytic Activity of ZnO-Ag Nanocomposites Prepared by One-Step Process Using Flame Pyrolysis, 1st International Symposium of Indonesian Chemical Engineering (ISIChem) 2018, IS-MN-034, 20181004
  32. Synthesis of Nanoparticle-embedded Composite Films by Plasma-enhanced CVD Process Using Gaseous and Particulate Raw Materials, 10th International Aerosol Conference, 4MS.7, 20180902
  33. Polymer and Metal Oxides Coating of Multiwalled Carbon Nanotubes by Spray-Assisted Plasma-Enhanced Chemical Vapor Deposition, 10th International Aerosol Conference, 4MS.8, 20180902
  34. Effect of Loading Concentration on the Photocatalytic Activity of Ag-TiO2 Nanocomposite Films Fabricated by One-Step Gas-Phase Deposition, 10th International Aerosol Conference, 4MS.9, 20180902
  35. Facile Synthesis of Magnetic Metal-Organic Framework Nanocomposites by Spray-Assisted Synthesis, 10th International Aerosol Conference, 6MS.1, 20180902
  36. Facile Preparation of Metal-Organic Frameworks by Spray-Assisted Synthesis, International Workshop on Nanodevice Technologies 2018, Extended Abstracts, 34-35, 20180302
  37. Preparation and Evaluation of Photocatalytic Ag-TiO2 Nanoparticulate Films, International Workshop on Nanodevice Technologies 2018, Extended Abstracts, 36-37, 20180302
  38. Synthesis of Polymer Coated Multiwalled Carbon Nanotubes by Spray-Assisted Plasma-Enhanced Chemical Vapor Deposition, International Workshop on Nanodevice Technologies 2018, Extended Abstracts, 38-39, 20180302
  39. Effect of annealing temperature on the photocatalytic activity of Ag-TiO2 nanocomposite films by one-step gas-phase deposition, Materials Research Bulletin, 97, 497-505, 20180101
    Link to Paper Search Results by DOI
  40. Biopersistence of NiO and TiO2 Nanoparticles Following Intratracheal Instillation and Inhalation, International Journal of Molecular Sciences, 18(12), 2757, 20171219
    Link to Paper Search Results by DOI
  41. Estimation of Pulmonary Toxicity of Nanomaterials Following Subacute Inhalation, European Aerosol Conference 2017, T406N20f, 20170827
  42. Controlling the Structure of Metal Oxide Layers Grown on Carbon Nanotubes Surface by In-flight Coating, Asian Aerosol Conference AAC2017, PS0164, 20170703
  43. Enhanced Photocatalytic Activity of TiO2‒Ag Nanocomposite Films Prepared via One-step Gas-phase Deposition by Heat Treatment, Asian Aerosol Conference AAC2017, PS0165, 20170703
  44. Continuous Synthesis of Metal-organic Framework HKUST-1 by Spray-drying, Asian Aerosol Conference AAC2017, PS0139, 20170703
  45. Preparation of Nanoparticle-embedded Thin Films by Simultaneous Feeding of Gaseous and Solid Raw Materials in Plasma-Enhanced Chemical Vapor Deposition process, Thin Solid Films, 632, 55-65, 20170630
    Link to Paper Search Results by DOI
  46. Evaluation of the Parameters Utilized for the Aerosol-assisted Synthesis of HKUST-1, Microporous & Mesoporous Materials, 245, 126-132, 20170601
    Link to Paper Search Results by DOI
  47. Fabrication of TiO2-Ag Nanocomposite Thin Films via One-step Gas-phase Deposition, Ceramics International, 43(6), 5351-5355, 20170415
    Link to Paper Search Results by DOI
  48. Surface Coating of Carbon Nanotubes by Aerosol Process with Plasma Enhanced Chemical Vapor Deposition, [International Symposium] Reaction Engineering of CVD: iCVD and Emerging Processes, Applications, and Fundamental Understanding, SCEJ 82nd Annual Meeting, E219, 20170307
  49. Preparation of Metal Oxide Layer on Multi-walled Carbon Nanotubes by in-flight Coating, International Workshop on Nanodevice Technologies 2017, 56-57, 20170302
  50. Preparation of Photocatalytic TiO2‒Ag Nanocomposite Thin Films by One-step Gas-phase Deposition, International Workshop on Nanodevice Technologies 2017, 58-59, 20170302
  51. Continuous Synthesis of HKUST-1 by Spray-Drying Process—Investigation of Synthetic Conditions, 5th International Conference on Metal-Organic Frameworks & Open Framework Compounds (MOF 2016), AP1.06, 20160911
  52. Evaluation of Pulmonary Toxicity of Zinc Oxide Nanoparticles following Inhalation and Intratracheal Instillation, International Journal of Molecular Sciences, 17, 1241, 20160801
    Link to Paper Search Results by DOI
  53. Comparison of pulmonary inflammatory responses following intratracheal instillation and inhalation of nanoparticles, NANOTOXICOLOGY, 10(5), 607-618, 20160527
    Link to Paper Search Results by DOI
  54. Fabrication of a Metal Oxide Layer on a Multi-walled Carbon Nanotube Surface by In-flight Coating using Gas-phase Deposition, Ceramics International, 42(7), 9162-9269, 20160515
    Link to Paper Search Results by DOI
  55. Long-term retention of pristine multi-walled carbon nanotubes in rat lungs after intratracheal instillation, JOURNAL OF APPLIED TOXICOLOGY, 36(4), 501-509, 20160401
    Link to Paper Search Results by DOI
  56. Comparison of the Pulmonary Oxidative Stress Caused by Intratracheal Instillation and Inhalation of NiO Nanoparticles When Equivalent Amounts of NiO Are Retained in the Lung, Antioxidants, 5(1), 4, 20160301
    Link to Paper Search Results by DOI
  57. Comparison between whole-body inhalation and nose-only inhalation on the deposition and health effects of nanoparticles, Environmental Health and Preventive Medicine, 21(1), 42-48, 20160101
    Link to Paper Search Results by DOI
  58. Pulmonary toxicity of well-dispersed cerium oxide nanoparticles following intratracheal instillation and inhalation, JOURNAL OF NANOPARTICLE RESEARCH, 17(11), 442, 20151113
    Link to Paper Search Results by DOI
  59. Risk Assessment of the Carbon Nanotube Group, Risk Analysis, 35(10), 1940-1956, 20151001
    Link to Paper Search Results by DOI
  60. Pulmonary Toxicity of Cerium Oxide Nanoparticle Following Intratracheal Instillation and Inhalation of Nanoparticles, ERS International Congress 2015, PA4118, 20150926
  61. Deposition and Pulmonary Effect of Nanoparticle in Whole Body Inhalation Study and in Nose Only Inhalation Study, ERS International Congress 2015, PA4116, 20150926
  62. Gene Expression Profile of Pulmonary Inflammation in Rat Lung Induced by Nickel Oxide Nanoparticles Following Intratracheal Instillation, ERS International Congress 2015, PA1225, 20150926
  63. In-flight coating of multi-walled carbon nanotubes, Materials Letters, 155, 114-117, 20150915
    Link to Paper Search Results by DOI
  64. Fabrication and Annealing of Porous TiO2 Films Consisting of Nanoparticles Deposited in Gas-phase (Keynote), 9th Asian Aerosol Conference, B201K, 20150624
  65. Preparation of SiOx Layer on Carbon Nanotubes by In-flight Coating, 9th Asian Aerosol Conference, B104, 20150624
  66. Effects of Annealing on the Morphology and Porosity of Porous TiO2 Films Fabricated by Deposition of Aerosol Nanoparticles, JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 48(4), 292-299, 20150420
    Link to Paper Search Results by DOI
  67. In-flight Coating of Carbon Nanotubes with Metal-oxide films by PECVD, International Workshop on Nanodevice Technologies 2015, P-22 (p. 62)-P-22 (p. 62), 20150303
  68. Comparison of Pulmonary Inflammatory Responses between Intratracheal Instillation and Inhalation of Nanoparticles, ERS International Congress 2014, P1490, 20140906
  69. Biopersistence of Nanoparticle in Inhalation and Intratracheal Instillation Study for Hazard Assessment, ERS International Congress 2014, P1491, 20140906
  70. Preparation of Aerosol Particles for Inhalation Tests by Spray-drying Combined with Droplet Breakup, 2014 International Aerosol Conference (IAC 2014), SS07-2, 20140831
  71. In-flight TiO2 Coating of Carbon Nanotubes by PECVD, 2014 International Aerosol Conference (IAC 2014), OP11-4, 20140829
  72. Aerosol Generation by a Spray-Drying Technique Under Coulomb Explosion and Rapid Evaporation for the Preparation of Aerosol Particles for Inhalation Tests, AEROSOL SCIENCE AND TECHNOLOGY, 48(7), 698-705, 20140701
    Link to Paper Search Results by DOI
  73. Evaluation of the factors that influence the fabrication of porous thin films by deposition of aerosol nanoparticles, CHEMICAL ENGINEERING JOURNAL, 232, 221-227, 201310
    Link to Paper Search Results by DOI
  74. Inhalation Toxicity Assessment of Carbon-Based Nanoparticles, ACCOUNTS OF CHEMICAL RESEARCH, 46(3), 770-781, 20130319
    Link to Paper Search Results by DOI
  75. Comparison of dose-response relations between 4-week inhalation and intratracheal instillation of NiO nanoparticles using polimorphonuclear neutrophils in bronchoalveolar lavage fluid as a biomarker of pulmonary inflammation, INHALATION TOXICOLOGY, 25(1), 29-36, 201301
    Link to Paper Search Results by DOI
  76. Pulmonary toxicity of well-dispersed single-wall carbon nanotubes after inhalation, NANOTOXICOLOGY, 6(7), 766-775, 201211
    Link to Paper Search Results by DOI
  77. Pulmonary toxicity of well-dispersed multi-wall carbon nanotubes following inhalation and intratracheal instillation, NANOTOXICOLOGY, 6(6), 587-599, 201209
    Link to Paper Search Results by DOI
  78. Investigation of Gene Expression of MMP-2 and TIMP-2 mRNA in Rat Lung in Inhaled Nickel Oxide and Titanium Dioxide Nanoparticles, INDUSTRIAL HEALTH, 49(3), 344-352, 201112
    Link to Paper Search Results by DOI
  79. Monitoring of C-60 aerosol concentrations during 4-week inhalation study using a carbon aerosol analyzer with adjusted analytical protocol, JOURNAL OF NANOPARTICLE RESEARCH, 13(5), 2063-2071, 201112
    Link to Paper Search Results by DOI
  80. Biopersistence of inhaled MWCNT in rat lungs in a 4-week well-characterized exposure, INHALATION TOXICOLOGY, 23(13), 784-791, 201111
    Link to Paper Search Results by DOI
  81. Pathological features of rat lung following inhalation and intratracheal instillation of C-60 fullerene, INHALATION TOXICOLOGY, 23(7), 407-416, 201106
    Link to Paper Search Results by DOI
  82. Clearance Kinetics of Fullerene C-60 Nanoparticles from Rat Lungs after Intratracheal C-60 Instillation and Inhalation C-60 Exposure, TOXICOLOGICAL SCIENCES, 118(2), 564-573, 201012
    Link to Paper Search Results by DOI
  83. Synthesis of Gallium Nitride Nanoparticles by Microwave Plasma-Enhanced CVD, CHEMICAL VAPOR DEPOSITION, 16(4-6), 151-156, 201006
    Link to Paper Search Results by DOI
  84. Inflammogenic effect of well-characterized fullerenes in inhalation and intratracheal instillation studies, PARTICLE AND FIBRE TOXICOLOGY, 7, 20100314
    Link to Paper Search Results by DOI
  85. Observations of bound Tween80 surfactant molecules on single-walled carbon nanotubes in an aqueous solution, CARBON, 47(15), 3434-3440, 200912
    Link to Paper Search Results by DOI
  86. Development and Evaluation of an Aerosol Generation and Supplying System for Inhalation Experiments of Manufactured Nanoparticles, ENVIRONMENTAL SCIENCE & TECHNOLOGY, 43(14), 5529-5534, 20090715
    Link to Paper Search Results by DOI
  87. Noninvasive In Vivo Electron Paramagnetic Resonance Study to Estimate Pulmonary Reducing Ability in Mice Exposed to NiO or C60 Nanoparticles, JOURNAL OF MAGNETIC RESONANCE IMAGING, 29(6), 1432-1437, 200906
    Link to Paper Search Results by DOI
  88. Gene expression profiles in rat lung after inhalation exposure to C-60 fullerene particles, TOXICOLOGY, 258(1), 47-55, 20090405
    Link to Paper Search Results by DOI
  89. Development of a Compact Laser Light Scattering Monitoring Device for Dust Particles Generated during PECVD Process, Journal of Aerosol Research= Japan, 23(1), 20080301
  90. Influence of synthesis conditions on the characteristics of nanoparticles produced in a nonequilibrium plasma field, JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 41(2), 62-68, 200802
    Link to Paper Search Results by DOI
  91. Measurement of Evaporation Property of Cigarette Main-Stream Smoke Using Denuder Tube Method, J.Aerosol Research Jpn., 22(4), 322-326, 20071220
  92. Vapor condensation on nanoparticles in the mixer of a particle size magnifier, INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER, 50(11-12), 2333-2338, 200706
    Link to Paper Search Results by DOI
  93. Biopersistence of inhaled nickel oxide nanoparticles in rat lung, INHALATION TOXICOLOGY, 19, 55-58, 2007
    Link to Paper Search Results by DOI
  94. Performance evaluation of long differential mobility analyzer (LDMA) in measurements of nanoparticles, JOURNAL OF AEROSOL SCIENCE, 37(5), 598-615, 200612
    Link to Paper Search Results by DOI
  95. Suppression of particle generation in a plasma process using a sine-wave modulated rf plasma, JOURNAL OF NANOPARTICLE RESEARCH, 8(3-4), 395-403, 200608
    Link to Paper Search Results by DOI
  96. Filtration efficiency of a fibrous filter for nanoparticles, JOURNAL OF NANOPARTICLE RESEARCH, 8(2), 215-221, 200604
    Link to Paper Search Results by DOI
  97. Collection Behavior of Single Nanoparticles by Air Filter, 43(6), 462-470, 20060301
  98. Plasma synthesis of light emitting gallium nitride nanoparticles using a novel microwave-resonant cavity, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 45(1A), 328-332, 200601
    Link to Paper Search Results by DOI
  99. Incorporation of dust particles into a growing film during silicon dioxide deposition from a TEOS/O-2 plasma, AEROSOL SCIENCE AND TECHNOLOGY, 39(5), 408-414, 200512
    Link to Paper Search Results by DOI
  100. Particle reduction and control in plasma etching equipment, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 18(4), 477-486, 200511
    Link to Paper Search Results by DOI
  101. The influence of the synthetic conditions of chemical vapor synthesis on the size of gallium nitride nanoparticles, JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 38(7), 516-519, 200507
    Link to Paper Search Results by DOI
  102. Effects of mobility changes and distribution of bipolar ions on aerosol nanoparticle diffusion charging, JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 38(7), 486-496, 200507
    Link to Paper Search Results by DOI
  103. Observation of heat-induced particle resuspension and transport in a plasma chemical vapor deposition chamber, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 44(7A), 4871-4877, 200507
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  104. Coagulation of bipolarly charged ultrafine aerosol particles, JOURNAL OF AEROSOL SCIENCE, 36(7), 830-845, 200507
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  105. Bipolar diffusion charging for aerosol nanoparticle measurement using a soft X-ray charger, JOURNAL OF AEROSOL SCIENCE, 36(7), 813-829, 200507
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  106. Modeling of and experiments on dust particle levitation in the sheath of a radio frequency plasma reactor, JOURNAL OF APPLIED PHYSICS, 97(4), 20050215
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  107. A new observation on the phase transformation of TiO2 nanoparticles produced by a CVD method, AEROSOL SCIENCE AND TECHNOLOGY, 39(2), 104-112, 200502
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  108. Development of an LDMA-FCE system for the measurement of submicron aerosol particles, JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 38(1), 34-44, 200501
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  109. Removal of particles during plasma processes using a collector based on the properties of particles suspended in the plasma, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 23(3), 388-393, 2005
    Link to Paper Search Results by DOI
  110. Quartz crystal microbalance for silicon surface organic contamination, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 152(4), G241-G245, 2005
    Link to Paper Search Results by DOI
  111. Adsorption and desorption of dibutyl phthalate on Si surface measured in controlled atmosphere using quartz crystal microbalance method, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 43(5A), 2661-2666, 200412
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  112. Direct measurement of nucleation and growth modes in titania nanoparticles generation by a CVD method, JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 37(11), 1379-1389, 200411
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  113. Observation of adsorption phenomena of dibutyl phthalate molecules on Si surface using quartz crystal microbalance method, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 43(8A), 5496-5500, 200408
    Link to Paper Search Results by DOI
  114. Simultaneous observation of molecular contamination behavior in semiconductor clean room using quartz crystal microbalance, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 43(7A), 4135-4140, 200407
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  115. One-step preparation of BaTiO3 nanoparticles by liquid source chemical vapor deposition, JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 37(3), 454-460, 200403
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  116. Particle formation and trapping behavior in a TEOS/O-2 plasma and their effects on contamination of a Si wafer, AEROSOL SCIENCE AND TECHNOLOGY, 38(2), 120-127, 200402
    Link to Paper Search Results by DOI
  117. The synthesis of monodisperse ultrapure gallium nitride nanoparticles by MOCVD, CHEMICAL VAPOR DEPOSITION, 10(1), 11-+, 200401
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  118. Observation and evaluation of flaked particle behavior in magnetically enhanced reactive ion etching equipment using a dipole ring magnet, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 22(4), 1688-1693, 2004
    Link to Paper Search Results by DOI
  119. Classification of monodisperse aerosol particles using an adjustable soft X-ray charger, POWDER TECHNOLOGY, 135, 336-344, 20031002
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  120. Effect of reaction temperature on CVD-made TiO2 primary particle diameter, CHEMICAL ENGINEERING SCIENCE, 58(15), 3327-3335, 200308
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  121. Measurement of trapping behavior of dust particles during plasma process by suck-out method, KAGAKU KOGAKU RONBUNSHU, 29(4), 513-520, 200307
    Link to Paper Search Results by DOI
  122. Characterization of particle contamination in process steps during plasma-enhanced chemical vapor deposition operation, JOURNAL OF AEROSOL SCIENCE, 34(7), 923-936, 200307
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  123. Time-dependent airborne organic contamination on silicon wafer surface stored in a plastic box, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 42(4A), 1575-1580, 200304
    Link to Paper Search Results by DOI
  124. Unipolar charging of nanosized aerosol particles using soft X-ray photoionization, AEROSOL SCIENCE AND TECHNOLOGY, 37(4), 330-341, 200304
    Link to Paper Search Results by DOI
  125. Airborne organic contamination behavior on silicon wafer surface, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 150(2), G148-G154, 200302
    Link to Paper Search Results by DOI
  126. Characterization of fine particle trapping in a plasma-enhanced chemical vapor deposition reactor, JOURNAL OF APPLIED PHYSICS, 92(9), 5525-5531, 20021101
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  127. Performance of a mixing-type CNC for nanoparticles at low-pressure conditions, JOURNAL OF AEROSOL SCIENCE, 33(10), 1389-1404, 200210
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  128. Change in particle size distribution of aerosol undergoing condensational growth: alternative analytical solution for the low Knudsen number regime, JOURNAL OF AEROSOL SCIENCE, 33(9), 1297-1307, 200209
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  129. Bipolar charging of aerosol nanoparticles by a soft X-ray photoionizer, JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 35(8), 786-793, 200208
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  130. Evaluation of the change in the morphology of gold nanoparticles during sintering, JOURNAL OF AEROSOL SCIENCE, 33(7), 1061-1074, 200207
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  131. Visualization and numerical simulation of fine particle transport in a low-pressure parallel plate chemical vapor deposition reactor, CHEMICAL ENGINEERING SCIENCE, 57(3), 497-506, 200202
    Link to Paper Search Results by DOI
  132. Size distribution change of titania nano-particle agglomerates generated by gas phase reaction, agglomeration, and sintering, AEROSOL SCIENCE AND TECHNOLOGY, 35(5), 929-947, 200111
    Link to Paper Search Results by DOI
  133. Fabrication and characterization of SiO2 particles generated by spray method for standards aerosol, JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 34(10), 1285-1292, 200110
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  134. Calibration of polarization-sensitive and dual-angle laser light scattering methods using standard latex particles, JOURNAL OF COLLOID AND INTERFACE SCIENCE, 241(1), 71-80, 20010901
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  135. Adsorption and desorption rate of multicomponent organic species on silicon wafer surface, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 148(7), G365-G369, 200107
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  136. Alternative analytical solution to condensational growth of polydisperse aerosols in the continuum regime, JOURNAL OF AEROSOL SCIENCE, 32(2), 187-197, 200102
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  137. Model of boron incorporation into silicon epitaxial film in a B2H6-SiHCl3-H-2 system, JOURNAL OF CRYSTAL GROWTH, 222(1-2), 183-193, 200101
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  138. Thermal conditions in rapid thermal processing system using circular infrared lamp, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 147(12), 4660-4664, 200012
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  139. Effects of pressure and gas feed rate on growth rate profile of GaN thin film in vertical MOCVD reactor, KAGAKU KOGAKU RONBUNSHU, 26(6), 804-810, 200011
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  140. Numerical calculations of heat profile using circular infrared lamp heating furnace, KAGAKU KOGAKU RONBUNSHU, 26(6), 785-791, 200011
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  141. Particle generation and thin film surface morphology in the tetraethylorthosilicate/oxygen plasma enhanced chemical vapor deposition process, JOURNAL OF APPLIED PHYSICS, 88(5), 3047-3052, 20000901
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  142. Rate theory of multicomponent adsorption of organic species on silicon wafer surface, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 147(6), 2319-2323, 200006
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  143. Experiment and Numerical Simulation on Growth Rate Distribution of GaN Thin Film in Vertical MOCVD Reactor, 27(1), 19, 20000401
  144. Chemical Process of Silicon Epitaxial Growth in a SiHCl_3_-H_2_ System, Journal of Crystal Growth, 207(1/2), 77-86, 19991101
  145. Unveiling the Magic of H_2_S on the CVD-Al_2_O_3_ Coating, Journal de Physique IV, 9(P8, Pt.2), 877-883, 19990901
  146. Model for Boron Incorporation in Silicon Epitaxial Growth, 26(2), 86, 19990401
  147. Removal of Airborne Particles by a Device Using UV/Photoelectron Method under Reduced Pressure Conditions, Journal of Aerosol Science, 30(3), 341-353, 19990301
  148. A Direct Approach for Evaluating the Thermal Condition of a Silicon Substrate under Infrared Rays and Specular Reflectors, Journal of the Electrochemical Society, 146(2), 713-718, 19990201
  149. Aerosol Particle Removal at Reduced Pressure by an Electrical Precipitator Using UV/Photoelectron Method, Journal of Aerosol Science, 29(S1), S1237-S1238, 19980901
  150. Effects of Preparation Conditions on the Characteristics of Titanium Dioxide Particles Produced by a CVD Method, J. Aerosol Sci, 29(S1), S907-S908, 19980901
  151. Performance Evaluation of Cluster-DMA with Integrated Electrometer and Its Application to Ion Mobility Measurements, J. Aerosol Res., Japan, 13(2), 83-93, 199806
  152. Chemical Species in Silicon Epitaxial Growth by SiHCl_3_-H_2_ system, 25(3), 31, 19980401
  153. Nonlinear Increase in Silicon Epitaxial Growth Rate in a SiHCl_3_-H_2_ System under Atmospheric Pressure, Journal of Crystal Growth, 182(3/4), 352-362, 19971201
  154. Removal of Submicron Aerosol Particles by a Tubular Particle-Removal Device using UV/Photoelectron Method, Journal of Aerosol Science, 28(4), 649-661, 19970601
  155. Sintering of Polydisperse Nanometer-Sized Agglomerates, Aerosol Science and Technology, 27(3), 422-438, 19970401
  156. Model on Transport Phenomena and Epitaxial Growth of Silicon Thin Film in SiHCl_3_-H_2_ System under Atmospheric Pressure, Journal of Crystal Growth, 169(1), 61-72, 19961101
  157. Numerical Simulation and Experiment on the Transport of Fine Particles in a Ventilated Room, Aerosol Science and Technology, 25(3), 242-255, 19961001
  158. Numerical Simulation and Experiment of an Unsteady Thermal Polymerization Process of Styrene in a Laminar Tubular Reactor, Thermal Science and Engineering, 4(4), 11-20, 19960701
  159. Modeling of Epitaxial Silicon Thin-Film Growth on a Rotating Substrate in a Horizontal Single-Wafer Reactor, Journal of the Electrochemical Society, 142(12), 4272-4278, 19951201
  160. Experiment and Numerical Simulation on the Behavior of Particulate and Gaseous Matters in Chamber Flow, Journal of Aerosol Research= Japan, 10(3), 204-213, 19950901
  161. Evaluation of Sintering of Nanometer-sized Titania Using Aerosol Method, Aerosol Science and Technology, 23(2), 183-200, 19950401
  162. Size Change of Very Fine Silver Agglomerates by Sintering in a Heated Flow, Journal of Chemical Engineering of Japan, 27(6), 796-802, 19941201
  163. Numerical Evaluation of Silicon-Thin Film Growth by SiHCl_3_-H_2_ Gas Mixture in a Horizontal CVD Reactor, Japanese Journal of Applied Physics, 33, Pt. 1(4A), 1977-1985, 19940401
  164. Wall Deposition of Ultrafine Aerosol Particles by Thermophoresis in Nonisothermal Laminar Pipe Flow of Different Carrier Gas, Japanese Journal of Applied Physics, 33, Pt. 1(2), 1174-1181, 19940201
  165. Precursors in Atmospheric-Pressure Chemical Vapor Deposition of Silica Films from Tetraethylorthosilicate/Ozone System, Jpn. J. Appl. Phys. Lett., 33, Pt. 2(3B), L447-L450, 1994
  166. Size-Dependence of Properties of Superconducting Bi-Ca-Sr-Cu-O Fine Particles Prepared by Spray-Pyrolysis Method, J. Materials Sci.: Materials in Electronics, 5(4), 210-214, 1994
  167. Thermophoretic and Evaporational Losses of Ultrafine Particles in a Heated Pipe Flow, AIChE Journal, 39(11), 1859-1869, 19931101
  168. Deposition of Submicron Aerosol Particles in Turbulent and Transitional Flow, AIChE Journal, 39(1), 17-26, 19930101
  169. Particle Generation and Film Formation in an Atmospheric-Pressure CVD Reactor Using the Tetraethylorthosilicate (TEOS)/He, TEOS/O2/He, and TEOS/O3/He Systems, Jpn. J. Appl. Phys. Lett., 32, Pt. 2(5B), L748-L751, 1993
  170. Preparation of Ultrafine Superconductive Bi-Ca-Sr-Cu-O Particles by Metal-organic Chemical Vapor Deposition, J. Aerosol Sci., 24(3), 357-366, 1993
  171. The Effect of Electrically Charged Dielectric Walls on the Diffusive Deposition of Submicron Aerosol Particles, Journal of Aerosol Science, 23(7), 711-721, 19921201
  172. Diffusive Deposition of Submicrometer Aerosol Particles onto Dielectric Walls with a Nonuniform Surface Charge Distribution, Journal of Colloid and Interface Science, 154(1), 255-263, 19921101
  173. Gas-Phase Nucleation in an Atmospheric Pressure CVD Process for SiO2 Films Using Tetraethylorthosilicate (TEOS), Jpn. J. Appl. Phys. Lett., 31, Pt. 2(10A), L1439-L1442, 1992
  174. Experimental Study of Aerosol Deposition in Stirred Flow Fields Ranging from Laminar to Turbulent Flows, Journal of Chemical Engineering of Japan, 24(2), 203-209, 19910401
  175. Development of a Method for Testing Very High Efficiency Membrane Filters for Ultrafine Aerosol Particles, J. Chem. Eng. Japan, 23(5), 568-574, 1990
  176. Influence of Particle Inertia on Aerosol Deposition in a Stirred Turbulent Flow Field, Journal of Aerosol Science, 20(4), 419-429, 19890601
  177. Enhancement of Brownian and Turbulent Diffusive Deposition of Charged Aerosol Particles in the Presence of an Electric Field, Journal of Colloid and Interface Science, 128(1), 157-168, 19890301
  178. Performance of a Nebulizer for Standard Aerosol Particle Generation, J. Aerosol Res. Japan, 4(4), 294-302, 198901
  179. A Model Calculation of Particle Deposition onto a Rough Wall by Brownian and Turbulent Diffusion, Journal of Colloid and Interface Science, 125(1), 198-211, 19880401
  180. A Precise Method to Determine the Diameter of Airborne Polystyrene Latex Particles, J. Aerosol Res. Japan, J. Aerosol Sci. (Translated), 2 (19 in JAS)(3 (4 in JAS)), 200 (501 in JAS)-206 (509 in JAS), 19870401
  181. Turbulent and Brownian Diffusive Deposition of Aerosol Particles onto a Rough Wall, Journal of Chemical Engineering of Japan, 20(1), 57-64, 19870401

Publications such as books

  1. 2019/10/30, Powder Technology Handbook, Fourth Edition (K. Higashitani, H. Makino, and S. Matsusaka ed.), Particle Deposition and Reentrainment, CRC Press, 2019, 10, Dictionary/Encyclopedia, Joint work, English, Shimada, M., S. Matsusaka, and H. Masuda, 9780367862800, 647, 121-127
  2. 2019/09/03, Current Topics in Environmental Health and Preventive Medicine, In Vivo Inhalation Toxicity Screening Methods for Manufactured Nanomaterials, Springer, 2019, 09, Scholarly Book, Joint work, English, Yoshiura, Y., Y. Fujisawa, T. Tomonaga, H. Izumi, T. Oyabu, T. Myojo, M. Kubo, M. Shimada, and Y. Morimoto, 978-981-13-8432-5, 223, 95-105
  3. 2006/01, Powder Technology Handbook, Third Edition , II.7.1 Particle Deposition and Reentrainment, Taylor and Francis, 2006, 01, Scholarly Book, Joint work, Shimada, M. and S. Matsusaka, 889

Social Activities

History as Committee Members

  1. President, 2020/08, 2022/08, Japan Association of Aerosol Science and Technology
  2. Vice President, 2018/08, 2020/08, Japan Association of Aerosol Science and Technology