Manabu Shimada

Last Updated :2024/05/08

Affiliations, Positions
Graduate School of Advanced Science and Engineering, Professor
E-mail
smdhiroshima-u.ac.jp
Self-introduction
Preparation of thin-films, particles, and their composites having useful structure and composition is being studied by synthesizing nano-sized clusters and particulate matter suspended in gases and depositing them in the gas phase. The effects of surface deposition of nanoobjects as contaminants are also being investigated.

Basic Information

Academic Degrees

  • Doctor of Engineering, Osaka Prefecture University
  • Master of Engineering, Kyoto University

Educational Activity

  • [Bachelor Degree Program] School of Engineering : Cluster 3(Applied Chemistry, Biotechnology and Chemical Engineering) : Program of Chemical Engineering
  • [Master's Program] Graduate School of Advanced Science and Engineering : Division of Advanced Science and Engineering : Chemical Engineering Program
  • [Doctoral Program] Graduate School of Advanced Science and Engineering : Division of Advanced Science and Engineering : Chemical Engineering Program

Research Fields

  • Engineering;Process / Chemical engineering;Properties in chemical engineering process / Transfer operation / Unit operation
  • Engineering;Process / Chemical engineering;Reaction engineering / Process system

Research Keywords

  • microscopic morphology control of material surface
  • functional thin film
  • health effect of nanoobjects - test materials preparation
  • aerosol
  • particle and powder deposition in gas phase
  • microcontamination
  • application of rf and microwave plasmas to material processing
  • nanoparticles

Educational Activity

Course in Charge

  1. 2024, Undergraduate Education, Second Semester, Basic Experiments in Chemistry
  2. 2024, Undergraduate Education, 1Term, Fluids Engineering
  3. 2024, Undergraduate Education, 3Term, Mathematics for Chemical Engineers
  4. 2024, Undergraduate Education, Year, Graduation Thesis
  5. 2024, Graduate Education (Master's Program) , 3Term, Special Exercises on Chemical Engineering B
  6. 2024, Graduate Education (Master's Program) , 4Term, Special Exercises on Chemical Engineering B
  7. 2024, Graduate Education (Master's Program) , Academic Year, Special Study on Chemical Engineering
  8. 2024, Graduate Education (Master's Program) , 2Term, Fluid Dynamics Analysis
  9. 2024, Graduate Education (Doctoral Program) , Academic Year, Special Study on Chemical Engineering

Research Activities

Academic Papers

  1. Synthesis of Monodispersed Hollow Mesoporous Organosilica and Silica Nanoparticles with Controllable Shell Thickness Using Soft and Hard Templates, LANGMUIR, 39(13), 4571-4582, 20230404
  2. Photocatalytic Activity of ZnO/Ag Nanoparticles Fabricated by a Spray Pyrolysis Method with Different O-2:N-2 Carrier Gas Ratios and Ag Contents, CATALYSTS, 12(11), 1374, 20221105
  3. Fabrication of ZnO/TiO2 Using Aerosol Method for Photocatalytic Applications, 4th International Seminar on Fundamental and Application of Chemical Engineering (ISFAChE) 2022, 20221026
  4. Synthesis of ZnO Nanoparticle Using Cosmos Caudatus Leaf Extract as Photocatalytic Application: Effect of Extract Volume, 4th International Seminar on Fundamental and Application of Chemical Engineering (ISFAChE) 2022, 20221026
  5. Pulmonary toxicity of tungsten trioxide nanoparticles in an inhalation study and an intratracheal instillation study, JOURNAL OF OCCUPATIONAL HEALTH, 64(1), e12367, 202210
  6. Functionalization of Nanoparticulate Thin-film Fabrication for Enhanced Properties Via a One-step Gas Phase Method, Earozoru Kenkyu, 37(3), 166-171, 20220920
  7. Spray Synthesis of Pd/HKUST-1 Nanocomposite and Its Catalytic Activity, 11th International Aerosol Conference (IAC 2022), AT-1-6, 20220904
  8. One-step Gas-phase Fabrication of Visible-light-activated TiO2 Nanoparticulate Thin Films, 11th International Aerosol Conference (IAC 2022), AT-eP1-007, 20220904
  9. Spray Synthesis of Pd Nanoparticle Incorporated HKUST-1, and Its Catalytic Activity For 4-Nitrophenol Reduction, Advanced Powder Technology, 33(8), 103701, 202208
  10. Improvement of Production Efficiency of HKUST-1 MOF by a Spray-assisted Synthetic Process, The 12th Asian Aerosol Conference (AAC) 2022, P2-101, 20220612
  11. Spray-assisted Fabrication of HKUST-1 MOF Thin Film and MWCNT/HKUST-1 Nanocomposite Film, The 12th Asian Aerosol Conference (AAC) 2022, OS35-3, 20220612
  12. Visible-light Photocatalytic Performance of CuxO Loaded Anatase- or Rutile-TiO2 Fabricated by Gas Phase Method, The 12th Asian Aerosol Conference (AAC) 2022, OS35-1, 20220612
  13. Ag-doped TiO2 Composite Films Prepared Using Aerosol-assisted, Plasma-enhanced Chemical Vapor Deposition, The 12th Asian Aerosol Conference (AAC) 2022, OS35-2, 20220612
  14. Preparation of TiO2-CNT-Ag Ternary Composite Film with Enhanced Photocatalytic Activity via Plasma-Enhanced Chemical Vapor Deposition, CATALYSTS, 12(5), 508, 202205
  15. Synthesis of ZnO/Ag/SiO2 Nanocomposite Using Flame Pyrolysis Method and Its Photocatalytic Activity, Materials Science Forum, 1057, 119-128, 20220331
  16. Ag-Doped TiO2 Composite Films Prepared Using Aerosol-Assisted, Plasma-Enhanced Chemical Vapor Deposition, CATALYSTS, 12(4), 365, 20220323
  17. Effect of Heating Rate on the Photocatalytic Activity of Ag–TiO2 Nanocomposites by One-Step Process via Aerosol Routes, CATALYSTS, 12(1), 17, 20211224
  18. Effect of SiO2 Content on Photocatalytic Activities of ZnO/Ag/SiO2 Nanocomposites Prepared by Spray Pyrolysis, 3rd International Conference and Exhibition on Powder Technology Indonesia (3rd ICePTi), 20211005
  19. Fabrication of ZnO/Ag Nanoparticles by Spray Pyrolysis Method with Different O2:N2 Carrier Gas Ratio and Its Photocatalytic Activity, 3rd International Conference and Exhibition on Powder Technology Indonesia (3rd ICePTi), 20211005
  20. Fabrication of TiO2-copper oxide nanoparticulate thin films through the PECVD-PVD method, 2021 European Aerosol Conference (EAC 2021), AT P3-10, 20210830
  21. Photocatalytic activity and preparation of TiO2-CNT-Ag ternary thin films via aerosol-assisted and plasma-enhanced chemical vapour deposition, 2021 European Aerosol Conference (EAC 2021), AT P3-9, 20210830
  22. One-step Synthesis of Gold@Silica Yolk-Shell Nanoparticles with Catalytic Activity, Chemistry Letters, 50(8), 1475-1478, 20210801
  23. Improvement of Production Efficiency of Spray-synthesized HKUST-1, Advanced Powder Technology, 32(7), 2370-2378, 20210701
  24. Facile fabrication of HKUST-1 thin films and free-standing MWCNT/HKUST-1 film using a spray-assisted method, MICROPOROUS AND MESOPOROUS MATERIALS, 312(7), 110771, 202107
  25. Effect of Ag Loading Content on Morphology and Photocatalytic Activity of Ag‒TiO2 Nanoparticulate Films Prepared via Simultaneous Plasma-Enhanced Chemical and Physical Vapor Deposition, Materials Research Express, 7(11), 116406, 20201118
  26. Effect of Silica Concentration on the ZnO-SiO2 Nanocomposites Characteristics Synthesized by Spray Pyrolysis Method, AIP Conference Proceedings, 2384, 040007, 20211230
  27. Effect of Silica Concentration on the ZnO-SiO2 Nanocomposites Characteristics Synthesized by Spray Pyrolysis Method, The 4th International Conference On Materials and Metallurgical Engineering and Technology (ICOMMET) 2020, 00016, 20200919
  28. Assessment of Cytokine-Induced Neutrophil Chemoattractants as Biomarkers for Prediction of Pulmonary Toxicity of Nanomaterials, Nanomaterilas, 10(8), 1563, 20200809
  29. Effects of Process Conditions on the Morphology of Coating Layer Fabricated on the Surface of Carbon Nanotubes via an In-flight Coating Method, Earozoru Kenkyu, 35(2), 129-134, 20200620
  30. Fabrication of ZnO-SiO2 Nanocomposite Materials Prepared by a Spray Pyrolysis for the Photocatalytic Activity under UV and Sunlight Irradiations, IOP Conf. Series: Materials Science and Engineering, 778, 012105, 20200605
  31. Effect of Ag Content in ZnO-Ag Nanocomposites Prepared by Spray Pyrolysis Method for Degradation of Textile Dye Waste, AIP Conference Proceedings, 2219, 030005, 20200505
  32. Bioinspired One-Step Synthesis of Pomegranate-like Silica@Gold Nanoparticles with Surface-Enhanced Raman Scattering Activity, LANGMUIR, 36(10), 2553-2562, 20200317
  33. Fabrication of Hollow TiO2 Nanotubes via a Simple Gas-Phase Process Using In-Flight Coating Followed by Heat Treatment, JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 53(1), 45-48, 20200120
  34. CVD Synthesis and Photocatalytic Performance Evaluation of Nanocomposite TiO2 Thin Film with Ag Nanoparticles and Carbon Nanotubes, 18th Asian Pacific Confederation of Chemical Engineering Congress (APCChE 2019), H224, 20190923
  35. One-pot Synthesis of Pomegranate-like Plasmonic Nanoparticles for Surface-Enhanced Raman Scattering, 18th Asian Pacific Confederation of Chemical Engineering Congress (APCChE 2019), C303, 20190923
  36. Facile Fabrication of HKUST-1 Nanocomposites Incorporating Fe3O4 and TiO2 Nanoparticles by a Spray-Assisted Synthetic Process, 18th Asian Pacific Confederation of Chemical Engineering Congress (APCChE 2019), D314, 20190923
  37. The Effect of Catalyst Weight on the Photocatalytic Performance of ZnO-Ag Nanocomposites Prepared by Flame Pyrolysis Method, IOP Conf. Series: Materials Science and Engineering, 673, 012014, 20190807
  38. Effects of Nanoparticle Properties on the Structure of Nanoparticle Agglomerates Generated by Spray-Drying of Suspension of Monodisperse Nanoparticles, 11th Asian Aerosol Conference, OS-7-LT5-1, 20190527
  39. Visible-Light Photoactivity of Photocatalytic Ag--TiO2 Nanocomposite Thin Film Prepared via Combined Gas-phase Deposition of Nanoparticles, 11th Asian Aerosol Conference, OS-7-LT5-5, 20190527
  40. Microwave Plasma-Enhanced Nanocoatings of Polymethylmethacrylate on Multiwalled Carbon Nanotubes, 11th Asian Aerosol Conference, P2-071, 20190527
  41. Development of Dye-Doped Silica Nanoparticles with Controllable Size as Aerosol Tracer Particles, 11th Asian Aerosol Conference, P2-072, 20190527
  42. Photocatalytic Activity of ZnO-Ag Nanocomposites Prepared by a One-Step Process Using Flame Pyrolysis, International Journal of Technology, 10(3), 571-581, 20190524
  43. Facile fabrication of HKUST-1 Nanocomposites Incorporating Fe3O4 and TiO2 Nanoparticles by a Spray-Assisted Synthetic Process and Their Dye Adsorption Performances, Microporous and Mesoporous Materials, 280, 227-235, 20190515
  44. Effects of Tungsten Oxide on Lungs Following Inhalation, 23rd Congress of the Asian Pacific Society of Respirology (APSR 2018), AP488, 20181129
  45. Usefulness of Myeloperoxidase as a Biomarker for the Ranking of Pulmonary Toxicity of Nanomaterials, Particle and Fibre Toxicology, 15, 41, 20181023
  46. Generation and Processing of Fine Particles in Gas-phase Environment (Plenary), 1st International Symposium of Indonesian Chemical Engineering (ISIChem) 2018, IS-PS-003, 20181004
  47. Photocatalytic Activity of ZnO-Ag Nanocomposites Prepared by One-Step Process Using Flame Pyrolysis, 1st International Symposium of Indonesian Chemical Engineering (ISIChem) 2018, IS-MN-034, 20181004
  48. Synthesis of Nanoparticle-embedded Composite Films by Plasma-enhanced CVD Process Using Gaseous and Particulate Raw Materials, 10th International Aerosol Conference, 4MS.7, 20180902
  49. Polymer and Metal Oxides Coating of Multiwalled Carbon Nanotubes by Spray-Assisted Plasma-Enhanced Chemical Vapor Deposition, 10th International Aerosol Conference, 4MS.8, 20180902
  50. Effect of Loading Concentration on the Photocatalytic Activity of Ag-TiO2 Nanocomposite Films Fabricated by One-Step Gas-Phase Deposition, 10th International Aerosol Conference, 4MS.9, 20180902
  51. Facile Synthesis of Magnetic Metal-Organic Framework Nanocomposites by Spray-Assisted Synthesis, 10th International Aerosol Conference, 6MS.1, 20180902
  52. Facile Preparation of Metal-Organic Frameworks by Spray-Assisted Synthesis, International Workshop on Nanodevice Technologies 2018, Extended Abstracts, 34-35, 20180302
  53. Preparation and Evaluation of Photocatalytic Ag-TiO2 Nanoparticulate Films, International Workshop on Nanodevice Technologies 2018, Extended Abstracts, 36-37, 20180302
  54. Synthesis of Polymer Coated Multiwalled Carbon Nanotubes by Spray-Assisted Plasma-Enhanced Chemical Vapor Deposition, International Workshop on Nanodevice Technologies 2018, Extended Abstracts, 38-39, 20180302
  55. Effect of annealing temperature on the photocatalytic activity of Ag-TiO2 nanocomposite films by one-step gas-phase deposition, Materials Research Bulletin, 97, 497-505, 20180101
  56. Biopersistence of NiO and TiO2 Nanoparticles Following Intratracheal Instillation and Inhalation, International Journal of Molecular Sciences, 18(12), 2757, 20171219
  57. Estimation of Pulmonary Toxicity of Nanomaterials Following Subacute Inhalation, European Aerosol Conference 2017, T406N20f, 20170827
  58. Controlling the Structure of Metal Oxide Layers Grown on Carbon Nanotubes Surface by In-flight Coating, Asian Aerosol Conference AAC2017, PS0164, 20170703
  59. Enhanced Photocatalytic Activity of TiO2‒Ag Nanocomposite Films Prepared via One-step Gas-phase Deposition by Heat Treatment, Asian Aerosol Conference AAC2017, PS0165, 20170703
  60. Continuous Synthesis of Metal-organic Framework HKUST-1 by Spray-drying, Asian Aerosol Conference AAC2017, PS0139, 20170703
  61. Preparation of Nanoparticle-embedded Thin Films by Simultaneous Feeding of Gaseous and Solid Raw Materials in Plasma-Enhanced Chemical Vapor Deposition process, Thin Solid Films, 632, 55-65, 20170630
  62. Evaluation of the Parameters Utilized for the Aerosol-assisted Synthesis of HKUST-1, Microporous & Mesoporous Materials, 245, 126-132, 20170601
  63. Fabrication of TiO2-Ag Nanocomposite Thin Films via One-step Gas-phase Deposition, Ceramics International, 43(6), 5351-5355, 20170415
  64. Surface Coating of Carbon Nanotubes by Aerosol Process with Plasma Enhanced Chemical Vapor Deposition, [International Symposium] Reaction Engineering of CVD: iCVD and Emerging Processes, Applications, and Fundamental Understanding, SCEJ 82nd Annual Meeting, E219, 20170307
  65. Preparation of Metal Oxide Layer on Multi-walled Carbon Nanotubes by in-flight Coating, International Workshop on Nanodevice Technologies 2017, 56-57, 20170302
  66. Preparation of Photocatalytic TiO2‒Ag Nanocomposite Thin Films by One-step Gas-phase Deposition, International Workshop on Nanodevice Technologies 2017, 58-59, 20170302
  67. Continuous Synthesis of HKUST-1 by Spray-Drying Process—Investigation of Synthetic Conditions, 5th International Conference on Metal-Organic Frameworks & Open Framework Compounds (MOF 2016), AP1.06, 20160911
  68. Evaluation of Pulmonary Toxicity of Zinc Oxide Nanoparticles following Inhalation and Intratracheal Instillation, International Journal of Molecular Sciences, 17, 1241, 20160801
  69. Comparison of pulmonary inflammatory responses following intratracheal instillation and inhalation of nanoparticles, NANOTOXICOLOGY, 10(5), 607-618, 20160527
  70. Fabrication of a Metal Oxide Layer on a Multi-walled Carbon Nanotube Surface by In-flight Coating using Gas-phase Deposition, Ceramics International, 42(7), 9162-9269, 20160515
  71. Long-term retention of pristine multi-walled carbon nanotubes in rat lungs after intratracheal instillation, JOURNAL OF APPLIED TOXICOLOGY, 36(4), 501-509, 20160401
  72. Comparison of the Pulmonary Oxidative Stress Caused by Intratracheal Instillation and Inhalation of NiO Nanoparticles When Equivalent Amounts of NiO Are Retained in the Lung, Antioxidants, 5(1), 4, 20160301
  73. Comparison between whole-body inhalation and nose-only inhalation on the deposition and health effects of nanoparticles, Environmental Health and Preventive Medicine, 21(1), 42-48, 20160101
  74. Pulmonary toxicity of well-dispersed cerium oxide nanoparticles following intratracheal instillation and inhalation, JOURNAL OF NANOPARTICLE RESEARCH, 17(11), 442, 20151113
  75. Risk Assessment of the Carbon Nanotube Group, Risk Analysis, 35(10), 1940-1956, 20151001
  76. Pulmonary Toxicity of Cerium Oxide Nanoparticle Following Intratracheal Instillation and Inhalation of Nanoparticles, ERS International Congress 2015, PA4118, 20150926
  77. Deposition and Pulmonary Effect of Nanoparticle in Whole Body Inhalation Study and in Nose Only Inhalation Study, ERS International Congress 2015, PA4116, 20150926
  78. Gene Expression Profile of Pulmonary Inflammation in Rat Lung Induced by Nickel Oxide Nanoparticles Following Intratracheal Instillation, ERS International Congress 2015, PA1225, 20150926
  79. In-flight coating of multi-walled carbon nanotubes, Materials Letters, 155, 114-117, 20150915
  80. Fabrication and Annealing of Porous TiO2 Films Consisting of Nanoparticles Deposited in Gas-phase (Keynote), 9th Asian Aerosol Conference, B201K, 20150624
  81. Preparation of SiOx Layer on Carbon Nanotubes by In-flight Coating, 9th Asian Aerosol Conference, B104, 20150624
  82. Effects of Annealing on the Morphology and Porosity of Porous TiO2 Films Fabricated by Deposition of Aerosol Nanoparticles, JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 48(4), 292-299, 20150420
  83. In-flight Coating of Carbon Nanotubes with Metal-oxide films by PECVD, International Workshop on Nanodevice Technologies 2015, P-22 (p. 62)-P-22 (p. 62), 20150303
  84. Comparison of Pulmonary Inflammatory Responses between Intratracheal Instillation and Inhalation of Nanoparticles, ERS International Congress 2014, P1490, 20140906
  85. Biopersistence of Nanoparticle in Inhalation and Intratracheal Instillation Study for Hazard Assessment, ERS International Congress 2014, P1491, 20140906
  86. Preparation of Aerosol Particles for Inhalation Tests by Spray-drying Combined with Droplet Breakup, 2014 International Aerosol Conference (IAC 2014), SS07-2, 20140831
  87. In-flight TiO2 Coating of Carbon Nanotubes by PECVD, 2014 International Aerosol Conference (IAC 2014), OP11-4, 20140829
  88. Aerosol Generation by a Spray-Drying Technique Under Coulomb Explosion and Rapid Evaporation for the Preparation of Aerosol Particles for Inhalation Tests, AEROSOL SCIENCE AND TECHNOLOGY, 48(7), 698-705, 20140701
  89. Evaluation of the factors that influence the fabrication of porous thin films by deposition of aerosol nanoparticles, CHEMICAL ENGINEERING JOURNAL, 232, 221-227, 201310
  90. Inhalation Toxicity Assessment of Carbon-Based Nanoparticles, ACCOUNTS OF CHEMICAL RESEARCH, 46(3), 770-781, 20130319
  91. Comparison of dose-response relations between 4-week inhalation and intratracheal instillation of NiO nanoparticles using polimorphonuclear neutrophils in bronchoalveolar lavage fluid as a biomarker of pulmonary inflammation, INHALATION TOXICOLOGY, 25(1), 29-36, 201301
  92. Pulmonary toxicity of well-dispersed single-wall carbon nanotubes after inhalation, NANOTOXICOLOGY, 6(7), 766-775, 201211
  93. Pulmonary toxicity of well-dispersed multi-wall carbon nanotubes following inhalation and intratracheal instillation, NANOTOXICOLOGY, 6(6), 587-599, 201209
  94. Investigation of Gene Expression of MMP-2 and TIMP-2 mRNA in Rat Lung in Inhaled Nickel Oxide and Titanium Dioxide Nanoparticles, INDUSTRIAL HEALTH, 49(3), 344-352, 201112
  95. Monitoring of C-60 aerosol concentrations during 4-week inhalation study using a carbon aerosol analyzer with adjusted analytical protocol, JOURNAL OF NANOPARTICLE RESEARCH, 13(5), 2063-2071, 201112
  96. Biopersistence of inhaled MWCNT in rat lungs in a 4-week well-characterized exposure, INHALATION TOXICOLOGY, 23(13), 784-791, 201111
  97. Pathological features of rat lung following inhalation and intratracheal instillation of C-60 fullerene, INHALATION TOXICOLOGY, 23(7), 407-416, 201106
  98. Clearance Kinetics of Fullerene C-60 Nanoparticles from Rat Lungs after Intratracheal C-60 Instillation and Inhalation C-60 Exposure, TOXICOLOGICAL SCIENCES, 118(2), 564-573, 201012
  99. Synthesis of Gallium Nitride Nanoparticles by Microwave Plasma-Enhanced CVD, CHEMICAL VAPOR DEPOSITION, 16(4-6), 151-156, 201006
  100. Inflammogenic effect of well-characterized fullerenes in inhalation and intratracheal instillation studies, PARTICLE AND FIBRE TOXICOLOGY, 7, 20100314
  101. Observations of bound Tween80 surfactant molecules on single-walled carbon nanotubes in an aqueous solution, CARBON, 47(15), 3434-3440, 200912
  102. Development and Evaluation of an Aerosol Generation and Supplying System for Inhalation Experiments of Manufactured Nanoparticles, ENVIRONMENTAL SCIENCE & TECHNOLOGY, 43(14), 5529-5534, 20090715
  103. Noninvasive In Vivo Electron Paramagnetic Resonance Study to Estimate Pulmonary Reducing Ability in Mice Exposed to NiO or C60 Nanoparticles, JOURNAL OF MAGNETIC RESONANCE IMAGING, 29(6), 1432-1437, 200906
  104. Gene expression profiles in rat lung after inhalation exposure to C-60 fullerene particles, TOXICOLOGY, 258(1), 47-55, 20090405
  105. Development of a Compact Laser Light Scattering Monitoring Device for Dust Particles Generated during PECVD Process, Journal of Aerosol Research= Japan, 23(1), 20080301
  106. Influence of synthesis conditions on the characteristics of nanoparticles produced in a nonequilibrium plasma field, JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 41(2), 62-68, 200802
  107. Measurement of Evaporation Property of Cigarette Main-Stream Smoke Using Denuder Tube Method, J.Aerosol Research Jpn., 22(4), 322-326, 20071220
  108. Vapor condensation on nanoparticles in the mixer of a particle size magnifier, INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER, 50(11-12), 2333-2338, 200706
  109. Biopersistence of inhaled nickel oxide nanoparticles in rat lung, INHALATION TOXICOLOGY, 19, 55-58, 2007
  110. Performance evaluation of long differential mobility analyzer (LDMA) in measurements of nanoparticles, JOURNAL OF AEROSOL SCIENCE, 37(5), 598-615, 200612
  111. Suppression of particle generation in a plasma process using a sine-wave modulated rf plasma, JOURNAL OF NANOPARTICLE RESEARCH, 8(3-4), 395-403, 200608
  112. Filtration efficiency of a fibrous filter for nanoparticles, JOURNAL OF NANOPARTICLE RESEARCH, 8(2), 215-221, 200604
  113. Collection Behavior of Single Nanoparticles by Air Filter, 43(6), 462-470, 20060301
  114. Plasma synthesis of light emitting gallium nitride nanoparticles using a novel microwave-resonant cavity, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 45(1A), 328-332, 200601
  115. Incorporation of dust particles into a growing film during silicon dioxide deposition from a TEOS/O-2 plasma, AEROSOL SCIENCE AND TECHNOLOGY, 39(5), 408-414, 200512
  116. Particle reduction and control in plasma etching equipment, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 18(4), 477-486, 200511
  117. The influence of the synthetic conditions of chemical vapor synthesis on the size of gallium nitride nanoparticles, JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 38(7), 516-519, 200507
  118. Effects of mobility changes and distribution of bipolar ions on aerosol nanoparticle diffusion charging, JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 38(7), 486-496, 200507
  119. Observation of heat-induced particle resuspension and transport in a plasma chemical vapor deposition chamber, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 44(7A), 4871-4877, 200507
  120. Coagulation of bipolarly charged ultrafine aerosol particles, JOURNAL OF AEROSOL SCIENCE, 36(7), 830-845, 200507
  121. Bipolar diffusion charging for aerosol nanoparticle measurement using a soft X-ray charger, JOURNAL OF AEROSOL SCIENCE, 36(7), 813-829, 200507
  122. Modeling of and experiments on dust particle levitation in the sheath of a radio frequency plasma reactor, JOURNAL OF APPLIED PHYSICS, 97(4), 20050215
  123. A new observation on the phase transformation of TiO2 nanoparticles produced by a CVD method, AEROSOL SCIENCE AND TECHNOLOGY, 39(2), 104-112, 200502
  124. Development of an LDMA-FCE system for the measurement of submicron aerosol particles, JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 38(1), 34-44, 200501
  125. Removal of particles during plasma processes using a collector based on the properties of particles suspended in the plasma, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 23(3), 388-393, 2005
  126. Quartz crystal microbalance for silicon surface organic contamination, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 152(4), G241-G245, 2005
  127. Adsorption and desorption of dibutyl phthalate on Si surface measured in controlled atmosphere using quartz crystal microbalance method, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 43(5A), 2661-2666, 200412
  128. Direct measurement of nucleation and growth modes in titania nanoparticles generation by a CVD method, JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 37(11), 1379-1389, 200411
  129. Observation of adsorption phenomena of dibutyl phthalate molecules on Si surface using quartz crystal microbalance method, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 43(8A), 5496-5500, 200408
  130. Simultaneous observation of molecular contamination behavior in semiconductor clean room using quartz crystal microbalance, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 43(7A), 4135-4140, 200407
  131. One-step preparation of BaTiO3 nanoparticles by liquid source chemical vapor deposition, JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 37(3), 454-460, 200403
  132. Particle formation and trapping behavior in a TEOS/O-2 plasma and their effects on contamination of a Si wafer, AEROSOL SCIENCE AND TECHNOLOGY, 38(2), 120-127, 200402
  133. The synthesis of monodisperse ultrapure gallium nitride nanoparticles by MOCVD, CHEMICAL VAPOR DEPOSITION, 10(1), 11-+, 200401
  134. Observation and evaluation of flaked particle behavior in magnetically enhanced reactive ion etching equipment using a dipole ring magnet, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 22(4), 1688-1693, 2004
  135. Classification of monodisperse aerosol particles using an adjustable soft X-ray charger, POWDER TECHNOLOGY, 135, 336-344, 20031002
  136. Effect of reaction temperature on CVD-made TiO2 primary particle diameter, CHEMICAL ENGINEERING SCIENCE, 58(15), 3327-3335, 200308
  137. Measurement of trapping behavior of dust particles during plasma process by suck-out method, KAGAKU KOGAKU RONBUNSHU, 29(4), 513-520, 200307
  138. Characterization of particle contamination in process steps during plasma-enhanced chemical vapor deposition operation, JOURNAL OF AEROSOL SCIENCE, 34(7), 923-936, 200307
  139. Time-dependent airborne organic contamination on silicon wafer surface stored in a plastic box, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 42(4A), 1575-1580, 200304
  140. Unipolar charging of nanosized aerosol particles using soft X-ray photoionization, AEROSOL SCIENCE AND TECHNOLOGY, 37(4), 330-341, 200304
  141. Airborne organic contamination behavior on silicon wafer surface, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 150(2), G148-G154, 200302
  142. Characterization of fine particle trapping in a plasma-enhanced chemical vapor deposition reactor, JOURNAL OF APPLIED PHYSICS, 92(9), 5525-5531, 20021101
  143. Performance of a mixing-type CNC for nanoparticles at low-pressure conditions, JOURNAL OF AEROSOL SCIENCE, 33(10), 1389-1404, 200210
  144. Change in particle size distribution of aerosol undergoing condensational growth: alternative analytical solution for the low Knudsen number regime, JOURNAL OF AEROSOL SCIENCE, 33(9), 1297-1307, 200209
  145. Bipolar charging of aerosol nanoparticles by a soft X-ray photoionizer, JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 35(8), 786-793, 200208
  146. Evaluation of the change in the morphology of gold nanoparticles during sintering, JOURNAL OF AEROSOL SCIENCE, 33(7), 1061-1074, 200207
  147. Visualization and numerical simulation of fine particle transport in a low-pressure parallel plate chemical vapor deposition reactor, CHEMICAL ENGINEERING SCIENCE, 57(3), 497-506, 200202
  148. Size distribution change of titania nano-particle agglomerates generated by gas phase reaction, agglomeration, and sintering, AEROSOL SCIENCE AND TECHNOLOGY, 35(5), 929-947, 200111
  149. Fabrication and characterization of SiO2 particles generated by spray method for standards aerosol, JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 34(10), 1285-1292, 200110
  150. Calibration of polarization-sensitive and dual-angle laser light scattering methods using standard latex particles, JOURNAL OF COLLOID AND INTERFACE SCIENCE, 241(1), 71-80, 20010901
  151. Adsorption and desorption rate of multicomponent organic species on silicon wafer surface, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 148(7), G365-G369, 200107
  152. Alternative analytical solution to condensational growth of polydisperse aerosols in the continuum regime, JOURNAL OF AEROSOL SCIENCE, 32(2), 187-197, 200102
  153. Model of boron incorporation into silicon epitaxial film in a B2H6-SiHCl3-H-2 system, JOURNAL OF CRYSTAL GROWTH, 222(1-2), 183-193, 200101
  154. Thermal conditions in rapid thermal processing system using circular infrared lamp, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 147(12), 4660-4664, 200012
  155. Effects of pressure and gas feed rate on growth rate profile of GaN thin film in vertical MOCVD reactor, KAGAKU KOGAKU RONBUNSHU, 26(6), 804-810, 200011
  156. Numerical calculations of heat profile using circular infrared lamp heating furnace, KAGAKU KOGAKU RONBUNSHU, 26(6), 785-791, 200011
  157. Particle generation and thin film surface morphology in the tetraethylorthosilicate/oxygen plasma enhanced chemical vapor deposition process, JOURNAL OF APPLIED PHYSICS, 88(5), 3047-3052, 20000901
  158. Rate theory of multicomponent adsorption of organic species on silicon wafer surface, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 147(6), 2319-2323, 200006
  159. Experiment and Numerical Simulation on Growth Rate Distribution of GaN Thin Film in Vertical MOCVD Reactor, 27(1), 19, 20000401
  160. Chemical Process of Silicon Epitaxial Growth in a SiHCl_3_-H_2_ System, Journal of Crystal Growth, 207(1/2), 77-86, 19991101
  161. Unveiling the Magic of H_2_S on the CVD-Al_2_O_3_ Coating, Journal de Physique IV, 9(P8, Pt.2), 877-883, 19990901
  162. Model for Boron Incorporation in Silicon Epitaxial Growth, 26(2), 86, 19990401
  163. Removal of Airborne Particles by a Device Using UV/Photoelectron Method under Reduced Pressure Conditions, Journal of Aerosol Science, 30(3), 341-353, 19990301
  164. A Direct Approach for Evaluating the Thermal Condition of a Silicon Substrate under Infrared Rays and Specular Reflectors, Journal of the Electrochemical Society, 146(2), 713-718, 19990201
  165. Aerosol Particle Removal at Reduced Pressure by an Electrical Precipitator Using UV/Photoelectron Method, Journal of Aerosol Science, 29(S1), S1237-S1238, 19980901
  166. Effects of Preparation Conditions on the Characteristics of Titanium Dioxide Particles Produced by a CVD Method, J. Aerosol Sci, 29(S1), S907-S908, 19980901
  167. Performance Evaluation of Cluster-DMA with Integrated Electrometer and Its Application to Ion Mobility Measurements, J. Aerosol Res., Japan, 13(2), 83-93, 199806
  168. Chemical Species in Silicon Epitaxial Growth by SiHCl_3_-H_2_ system, 25(3), 31, 19980401
  169. Nonlinear Increase in Silicon Epitaxial Growth Rate in a SiHCl_3_-H_2_ System under Atmospheric Pressure, Journal of Crystal Growth, 182(3/4), 352-362, 19971201
  170. Removal of Submicron Aerosol Particles by a Tubular Particle-Removal Device using UV/Photoelectron Method, Journal of Aerosol Science, 28(4), 649-661, 19970601
  171. Sintering of Polydisperse Nanometer-Sized Agglomerates, Aerosol Science and Technology, 27(3), 422-438, 19970401
  172. Model on Transport Phenomena and Epitaxial Growth of Silicon Thin Film in SiHCl_3_-H_2_ System under Atmospheric Pressure, Journal of Crystal Growth, 169(1), 61-72, 19961101
  173. Numerical Simulation and Experiment on the Transport of Fine Particles in a Ventilated Room, Aerosol Science and Technology, 25(3), 242-255, 19961001
  174. Numerical Simulation and Experiment of an Unsteady Thermal Polymerization Process of Styrene in a Laminar Tubular Reactor, Thermal Science and Engineering, 4(4), 11-20, 19960701
  175. Modeling of Epitaxial Silicon Thin-Film Growth on a Rotating Substrate in a Horizontal Single-Wafer Reactor, Journal of the Electrochemical Society, 142(12), 4272-4278, 19951201
  176. Experiment and Numerical Simulation on the Behavior of Particulate and Gaseous Matters in Chamber Flow, Journal of Aerosol Research= Japan, 10(3), 204-213, 19950901
  177. Evaluation of Sintering of Nanometer-sized Titania Using Aerosol Method, Aerosol Science and Technology, 23(2), 183-200, 19950401
  178. Size Change of Very Fine Silver Agglomerates by Sintering in a Heated Flow, Journal of Chemical Engineering of Japan, 27(6), 796-802, 19941201
  179. Numerical Evaluation of Silicon-Thin Film Growth by SiHCl_3_-H_2_ Gas Mixture in a Horizontal CVD Reactor, Japanese Journal of Applied Physics, 33, Pt. 1(4A), 1977-1985, 19940401
  180. Wall Deposition of Ultrafine Aerosol Particles by Thermophoresis in Nonisothermal Laminar Pipe Flow of Different Carrier Gas, Japanese Journal of Applied Physics, 33, Pt. 1(2), 1174-1181, 19940201
  181. Precursors in Atmospheric-Pressure Chemical Vapor Deposition of Silica Films from Tetraethylorthosilicate/Ozone System, Jpn. J. Appl. Phys. Lett., 33, Pt. 2(3B), L447-L450, 1994
  182. Size-Dependence of Properties of Superconducting Bi-Ca-Sr-Cu-O Fine Particles Prepared by Spray-Pyrolysis Method, J. Materials Sci.: Materials in Electronics, 5(4), 210-214, 1994
  183. Thermophoretic and Evaporational Losses of Ultrafine Particles in a Heated Pipe Flow, AIChE Journal, 39(11), 1859-1869, 19931101
  184. Deposition of Submicron Aerosol Particles in Turbulent and Transitional Flow, AIChE Journal, 39(1), 17-26, 19930101
  185. Particle Generation and Film Formation in an Atmospheric-Pressure CVD Reactor Using the Tetraethylorthosilicate (TEOS)/He, TEOS/O2/He, and TEOS/O3/He Systems, Jpn. J. Appl. Phys. Lett., 32, Pt. 2(5B), L748-L751, 1993
  186. Preparation of Ultrafine Superconductive Bi-Ca-Sr-Cu-O Particles by Metal-organic Chemical Vapor Deposition, J. Aerosol Sci., 24(3), 357-366, 1993
  187. The Effect of Electrically Charged Dielectric Walls on the Diffusive Deposition of Submicron Aerosol Particles, Journal of Aerosol Science, 23(7), 711-721, 19921201
  188. Diffusive Deposition of Submicrometer Aerosol Particles onto Dielectric Walls with a Nonuniform Surface Charge Distribution, Journal of Colloid and Interface Science, 154(1), 255-263, 19921101
  189. Gas-Phase Nucleation in an Atmospheric Pressure CVD Process for SiO2 Films Using Tetraethylorthosilicate (TEOS), Jpn. J. Appl. Phys. Lett., 31, Pt. 2(10A), L1439-L1442, 1992
  190. Experimental Study of Aerosol Deposition in Stirred Flow Fields Ranging from Laminar to Turbulent Flows, Journal of Chemical Engineering of Japan, 24(2), 203-209, 19910401
  191. Development of a Method for Testing Very High Efficiency Membrane Filters for Ultrafine Aerosol Particles, J. Chem. Eng. Japan, 23(5), 568-574, 1990
  192. Influence of Particle Inertia on Aerosol Deposition in a Stirred Turbulent Flow Field, Journal of Aerosol Science, 20(4), 419-429, 19890601
  193. Enhancement of Brownian and Turbulent Diffusive Deposition of Charged Aerosol Particles in the Presence of an Electric Field, Journal of Colloid and Interface Science, 128(1), 157-168, 19890301
  194. Performance of a Nebulizer for Standard Aerosol Particle Generation, J. Aerosol Res. Japan, 4(4), 294-302, 198901
  195. A Model Calculation of Particle Deposition onto a Rough Wall by Brownian and Turbulent Diffusion, Journal of Colloid and Interface Science, 125(1), 198-211, 19880401
  196. A Precise Method to Determine the Diameter of Airborne Polystyrene Latex Particles, J. Aerosol Res. Japan, J. Aerosol Sci. (Translated), 2 (19 in JAS)(3 (4 in JAS)), 200 (501 in JAS)-206 (509 in JAS), 19870401
  197. Turbulent and Brownian Diffusive Deposition of Aerosol Particles onto a Rough Wall, Journal of Chemical Engineering of Japan, 20(1), 57-64, 19870401

Publications such as books

  1. 2019/10/30, Powder Technology Handbook, Fourth Edition (K. Higashitani, H. Makino, and S. Matsusaka ed.), Particle Deposition and Reentrainment, CRC Press, 2019, 10, Dictionary/Encyclopedia, Joint work, English, Shimada, M., S. Matsusaka, and H. Masuda, 9780367862800, 647, 121-127
  2. 2019/09/03, Current Topics in Environmental Health and Preventive Medicine, In Vivo Inhalation Toxicity Screening Methods for Manufactured Nanomaterials, Springer, 2019, 09, Scholarly Book, Joint work, English, Yoshiura, Y., Y. Fujisawa, T. Tomonaga, H. Izumi, T. Oyabu, T. Myojo, M. Kubo, M. Shimada, and Y. Morimoto, 978-981-13-8432-5, 223, 95-105
  3. 2006/01, Powder Technology Handbook, Third Edition , II.7.1 Particle Deposition and Reentrainment, Taylor and Francis, 2006, 01, Scholarly Book, Joint work, Shimada, M. and S. Matsusaka, 889

Patented

  1. Patent, JP第7260311, 2023/04/10
  2. Patent, JP第7104093, 2022/07/11

Social Activities

History as Committee Members

  1. President, 2020/08, 2022/08, Japan Association of Aerosol Science and Technology
  2. Vice President, 2018/08, 2020/08, Japan Association of Aerosol Science and Technology