JIAWEN YU

Last Updated :2026/04/03

Affiliations, Positions
Graduate School of Advanced Science and Engineering, Assistant Professor (Special Appointment)
E-mail
yujiawenhiroshima-u.ac.jp
Self-introduction
Temperature monitoring during semiconductor processing, machine learning

Basic Information

Educational Backgrounds

  • Hiroshima University, Graduate School of Advanced Science and Engineering, 2022/04, 2025/03
  • Hiroshima University, Graduate School of Advanced Science and Engineering, 2020/09, 2022/03

Academic Degrees

  • Hiroshima University
  • Hiroshima University

Research Fields

  • Engineering;Electrical and electronic engineering;Electron device / Electronic equipment
  • Informatics;Human informatics;Intelligent robotics

Research Keywords

  • Semiconductor processing; Temperature measurement, Interfacial thermal resistance, Machine Learning

Affiliated Academic Societies

  • The Japan Society of Applied Physcis

Research Activities

Academic Papers

  1. Ultra-low-temperature formation of high-quality SiO2 via interface-driven self-organization of polysilazane induced by atmospheric pressure plasma jet irradiation, AIP ADVANCES, 15(10), 20251001
    Link to Paper Search Results by DOI
  2. Optimization of Baking Temperature for Minimization of Interfacial Thermal Resistance in Polymer/SiC Bilayer Structure Using Optical-Interference Contactless Thermometry (OICT), 2025 International Conference on Electronics Packaging and iMAPS All Asia Conference (ICEP-IAAC), 231-232, 20250521
    Link to Paper Search Results by DOI
  3. Investigation on the Relationship between Etching Rate and Photoresist Surface Temperature during Reactive Atmospheric-pressure Thermal Plasma Jet Irradiation, 2024 International Symposium on Semiconductor Manufacturing (ISSM), 1-3, 20250214
    Link to Paper Search Results by DOI
  4. Ultra-fast etching of photoresist by reactive atmospheric-pressure thermal plasma jet with surface temperature measurement, Applied Physics Express, 18, 016503, 20250117
    Link to Paper Search Results by DOI
  5. Measurement of Temperature-Dependent Interfacial Thermal Resistance at polymer/SiC Interface Based on Optical-Interference Contactless Thermometry, Extended Abstracts of the 2024 International Conference on Solid State Devices and Materials, D-8-02, 20240904
    Link to Paper Search Results by DOI
  6. Extraction of interfacial thermal resistance across an organic/semiconductor interface using optical-interference contactless thermometry, Applied Physics Express, 17, 036502, 20240306
    Link to Paper Search Results by DOI
  7. Interfacial Thermal Resistance Measurement at Polymer/Semiconductor Interface Using Optical-Interference Contactless Thermometry (OICT), 2023 IEEE 4th China International Youth Conference On Electrical Engineering (CIYCEE), 1-5, 20240129
    Link to Paper Search Results by DOI
  8. Measurement of Heat Dissipation between SiC and Thermal Interface Material in Power Device Packaging Based on Optical-Interference Contactless Thermometry, Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials, N-2-03, 20230906
    Link to Paper Search Results by DOI
  9. Development of a real-time temperature measurement technique for SiC wafer during ultra-rapid thermal annealing based on optical-interference contactless thermometry (OICT), Japanese Journal of Applied Physics, 62, SC1075, 20230220
    Link to Paper Search Results by DOI
  10. Development of a Real-Time Temperature Measurement Technique for SiC Wafer During Ultra-Rapid Thermal Annealing Based on Optical-Interference Contactless Thermometry (OICT), Extended Abstracts of the 2022 International Conference on Solid State Devices and Materials, J-5-04, 20220928
    Link to Paper Search Results by DOI

Invited Lecture, Oral Presentation, Poster Presentation

  1. Study on the Performance Improvement of Optical-Interference Contactless Thermometry Based on Machine Learning, Jiawen Yu, Hiroaki Hanafusa, and Seiichiro Higashi, 10th International Symposium on Control of Semiconductor Interface (ISCSI-X), 2025/11/10, Without Invitation, English, Tokyo, Japan
  2. Study on Real-Time Temperature Measurement Using Optical-Interference Contactless Thermometry (OICT) Based on Machine Learning, Jiawen Yu, Hiroaki Hanafusa, and Seiichiro Higashi, International Workshop on Nanodevice Technologies 2025 (IWNT2025), 2025/10/30, Without Invitation, English, Higashihiroshima, Japan
  3. Study on Real-Time Temperature Measurement Using Optical-Interference Contactless Thermometry (OICT) Based on Machine Learning, Jiawen Yu, H. Hanafusa, and S. Higashi, 2025/10/23, Without Invitation, Japanese
  4. Study on the Performance Improvement of Optical-Interference Contactless Thermometry Based on Machine Learning, Jiawen Yu, H. Hanafusa, and S. Higashi, The 86th JSAP Autumn Meeting 2025, 2025/09/07, Without Invitation, Japanese
  5. Study on the Application of Machine Learning to Optical-Interference Contactless Thermometry, Jiawen Yu, H. Hanafusa, and S. Higashi, 2025/07/26, Without Invitation, Japanese
  6. Baking Temperature Optimization for Reducing Interfacial Thermal Resistance in Polymer/SiC Bilayer Structure Using Optical-Interference Contactless Thermometry (OICT), Jiawen Yu, Hiroaki Hanafusa, and Seiichiro Higashi, 2025 International Conference on Electronics Packaging joined with iMAPS All Asia Conference (ICEP-IAAC 2025), 2025/04/15, Without Invitation, English, Nagano, Japan
  7. Real-time Visualization of 3D Temperature Distribution in SiC Wafers During Ultra-Rapid Thermal Annealing Using Optical-Interference Contactless Thermometry, Jiawen Yu, H. Hanafusa, and S. Higashi, The 72nd JSAP Spring Meeting 2025, 2025/03/14, With Invitation, Japanese, The Japan Society of Applied Physics, Noda Campus, Tokyo University of Science
  8. Measurement of Temperature-Dependent Interfacial Thermal Resistance at polymer/SiC Interface Based on Optical-Interference Contactless Thermometry, Jiawen Yu, Hiroaki Hanafusa, and Seiichiro Higashi, 2024 International Conference on Solid State Devices and Materials (SSDM 2024), 2024/09/01, Without Invitation, English, Yokohama, Japan
  9. Interfacial Thermal Resistance Measurement at Polymer/Semiconductor Interface Using Optical- Interference Contactless Thermometry (OICT), Jiawen Yu, Hiroaki Hanafusa, Seiichirou Higashi, The 2nd China International Youth Conference On Electrical Engineering (CIYCEE 2021), 2023/12/15, Without Invitation, English, Chengdu, China
  10. MEASUREMENT OF TRANSIENT HEAT TRANSFER ACROSS ORGANIC/SEMICONDUCTOR INTERFACE USING OPTICAL-INTERFERENCE CONTACTLESS THERMOMETRY (OICT), Jiawen Yu, R. GOTO, H. HANAFUSA and S. HIGASHI, 33rd International Symposium on Transport Phenomena (ISTP-33), 2023/09/24, Without Invitation, English, Kumamoto, Japan
  11. Measurement of Heat Dissipation between SiC and Thermal Interface Material in Power Device Packaging Based on Optical-Interference Contactless Thermometry, Jiawen Yu, Ryunosuke Goto, Hiroaki Hanafusa, and Seiichiro Higashi, 2023 International Conference on Solid State Devices and Materials (SSDM2023), 2023/09/05, Without Invitation, English, Nagoya, Japan
  12. Extraction of Organic/Semiconductor Interfacial Thermal Resisitance based on Optical Interference Contactless Thermometry (OICT), Jiawen Yu, Hiroaki Hanafusa, and Seiichiro Higashi, 2023 Asia-Pacific Workshop on Advanced Semiconductor Devices (AWAD2023), 2023/07/10, Without Invitation, English, Tokyo, Japan
  13. Development of a Real-Time Temperature Measurement Technique for SiC Wafer During Ultra-Rapid Thermal Annealing Based on Optical-Interference Contactless Thermometry (OICT), Jiawen Yu, Kotaro Matsuguchi , Takuma Sato , Hiroaki Hanafusa and Seiichiro Higashi, 2022 International Conference on Solid State Devices and Materials (SSDM2022), 2022/09/26, Without Invitation, English, Chiba, Japan
  14. Research on Real-Time Temperature Measurement For SiC Wafer During Ultra-Rapid Thermal Annealing Based On Optical-Interference Contactless Thermometry (OICT), Jiawen Yu, Keiya Fujimoto, Kotaro Matsuguchi, Takuma Sato, Hiroaki Hanafusa and Seiichiro Higashi, International Workshop on Nanodevice Technologies 2022 (IWNT2022), 2022/03/11, Without Invitation, English, Higashihiroshima, Japan