AKINOBU TERAMOTO

Last Updated :2024/05/07

Affiliations, Positions
Research Institute for Nanodevice and Bio Systems, Professor
Web Site
http://www.rnbs.hiroshima-u.ac.jp/en/
E-mail
teramo10hiroshima-u.ac.jp
Self-introduction
In our laboratory, we study the semiconductor device structure, process technology, and evaluation technology. We are now studying the Normally-off GaN HEMT, selective deposition of thin film, and the reliability evaluation technology of new memory devices.

Basic Information

Major Professional Backgrounds

  • 2021/04/01, Hiroshima University, Research Institute for Nanodevice and Bio Systems, Director
  • 2019/06/01, Hiroshima University, Research Institute for Nanodevice and Bio Systems, Professor
  • 2019/06/01, Tohoku University, New Industry Creation Hatchery Center, Visiting Professor
  • 2014/07/01, 2019/05/31, TOHOKU UNIVERSITY, New Industry Creation Hatchery Center, Professor
  • 2007/04/01, 2014/06/30, TOHOKU UNIVERSITY, New Industry Creation Hatchery Center, Associate Professor
  • 2002/04/01, 2010/01/01, Tohoku University, New Industry Creation Hatchery Center, Associate Professor
  • 1992/04/01, 2002/02/28, MItsubishi Electric Corporation, LSI Laboratory, Engineer

Educational Backgrounds

  • Tohoku University, Graduate School of Engineering, Elcectronic Engineering, Japan, 2000/10/01, 2001/09/12
  • Tohoku University, Graduate School of Engineering, Electronic Enginnering, Japan, 1990/04/01, 1992/03/27
  • TOHOKU UNIVERSITY, Faculty of Engineering, Electronic Engineering, Japan, 1986/04/01, 1990/03/28

Academic Degrees

  • MS (Electronic Engineering), TOHOKU UNIVERSITY
  • Ph D (Engineering), TOHOKU UNIVERSITY

Educational Activity

  • [Bachelor Degree Program] School of Engineering : Cluster 2(Electrical, Electronic and Systems Engineering) : Program of Electronic Devices and Systems
  • [Master's Program] Graduate School of Advanced Science and Engineering : Division of Advanced Science and Engineering : Quantum Matter Program
  • [Doctoral Program] Graduate School of Advanced Science and Engineering : Division of Advanced Science and Engineering : Quantum Matter Program

In Charge of Primary Major Programs

  • Program of Electronic Devices and Systems

Research Fields

  • Engineering;Electrical and electronic engineering;Electron device / Electronic equipment
  • Engineering;Electrical and electronic engineering;Electronic materials / Electric materials

Research Keywords

  • Semiconductor, Reliability, Evaluation, device structure
  • semiconductor
  • process
  • insulator

Affiliated Academic Societies

Educational Activity

Course in Charge

  1. 2024, Undergraduate Education, Year, Graduation Thesis
  2. 2024, Graduate Education (Master's Program) , First Semester, Seminar on Electronics A
  3. 2024, Graduate Education (Master's Program) , Second Semester, Seminar on Electronics B
  4. 2024, Graduate Education (Master's Program) , Academic Year, Academic Presentation in Electronics
  5. 2024, Graduate Education (Master's Program) , 1Term, Exercises in Electronics A
  6. 2024, Graduate Education (Master's Program) , 2Term, Exercises in Electronics A
  7. 2024, Graduate Education (Master's Program) , 3Term, Exercises in Electronics B
  8. 2024, Graduate Education (Master's Program) , 4Term, Exercises in Electronics B
  9. 2024, Graduate Education (Master's Program) , 1Term, LSI Devices and Process Engineering
  10. 2024, Graduate Education (Master's Program) , 1Term, Introduction of the Electronics
  11. 2024, Graduate Education (Master's Program) , 4Term, Introduction Semiconductor Memory Technology
  12. 2024, Graduate Education (Master's Program) , Academic Year, Advanced Study in Quantum Matter
  13. 2024, Graduate Education (Doctoral Program) , Academic Year, Advanced Study in Quantum Matter

Research Activities

Academic Papers

  1. High-Resolution Defect Detection for Flat Panel Display Using Proximity Capacitance Image Sensor, ITE Transactions on Media Technology and Applications, 11(4), 158-163, 20231002
  2. Evaluation of MR ratio and reliability of MTJ device having SiN sidewall by modifying reference layer thickness, JAPANESE JOURNAL OF APPLIED PHYSICS, 62(SC), 20230401
    Link to Paper Search Results by DOI
  3. Effect of charge-up of surfaces of sintered Y2O3 and yttrium oxyfluoride on their erosion rates due to ion bombardment, Journal of Vacuum Science & Technology B, 40(6), 062205_1-062205_7, 20221102
  4. Adsorption and surface reaction of isopropyl alcohol on SiO2 surfaces, Journal of Vacuum Science & Technology A, 40(5), 053201_1-053201_8, 20220711
  5. ★, Evaluation of Low-Frequency Noise in MOSFETs Used as a Key Component in Semiconductor Memory Devices, ELECTRONICS, 10(15), 1759_1-1759_24, 20210722
    Link to Paper Search Results by DOI
  6. A high-precision current measurement platform applied for statistical measurement of discharge current transient spectroscopy of traps in SiN dielectrics, JAPANESE JOURNAL OF APPLIED PHYSICS, 60(8), 086501_1-086501_10, 20210722
    Link to Paper Search Results by DOI
  7. Impact on the Conductance Method of the Asymmetry in the AC Response Induced by Interface Trap Levels, ECS Journal of Solid State Science and Technology, 10(4), 043004, 20210420
  8. Modification of copper and copper oxide surface states due to isopropyl alcohol treatment toward area-selective processes, Journal of Vacuum Science & Technology A, 39(1), 013403_1-10, 20201214
  9. Plasma resistance of sintered and ion-plated yttrium oxyfluorides with various Y, O, and F composition ratios for use in plasma process chamber, Journal of Vacuum Science & Technology A, 38(4), 043003_1-9, 20200611
  10. Influence of silicon wafer surface roughness on semiconductor device characteristics, Japanese Journal of Applied Physics, 59, SMMB06_1-6, 20200526
  11. Resistance Measurement Platform for Statistical Analysis of Emerging Memory Materials, IEEE Transactions on Semiconductor Manufacturing, 33(2), 232-239, 20200505
  12. Study on Influence of O2 Concentration in Wafer Cleaning Ambient for Smoothness of Silicon (110) Surface Appearing at Sidewall of Three-Dimensional Transistors, ECS Transactions, 97(3), 23-29, 20200501
  13. Control of ion-flux and ion-energy in direct inductively coupled plasma reactor for interfacial-mixing plasma-enhanced atomic layer deposition, Journal of Vacuum Science & Technology A, 38(3), 032408_1-032408_11, 20200406
  14. Low-Temperature Deposition of Silicon Nitride Films Using Ultraviolet-Irradiated Ammonia, ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 8(11), P715-P718, 20191112
    Link to Paper Search Results by DOI
  15. Impact of CoFeB surface roughness on reliability of MgO films in CoFeB/MgO/CoFeB magnetic tunnel junction, Japanese Journal of Applied Physics, 58, SIIB29_1-SIIB29_6, 20190717
  16. Statistical Analysis of Threshold Voltage Variation Using MOSFETs With Asymmetric Source and Drain, IEEE Electron Device Letters, 39(12), 1836-1839, 20181126
  17. Fabrication technology and characteristics of MOS device on atomically flat silicon surface, Readout, 51, 44-49, 20181015
  18. Impacts of Random Telegraph Noise with Various Time Constants and Number of States in Temporal Noise of CMOS Image Sensors, ITE Transactions on Media Technology and Applications, 6(3), 171-179, 20180701
  19. Statistical Analyses of Random Telegraph Noise in Pixel Source Follower with Various Gate Shapes in CMOS Image Sensor, ITE Transactions on Media Technology and Applications, 6(3), 163-170, 20180701
  20. Monte Carlo Simulation of Nanowires Array Biosensor With AC Electroosmosis, IEEE Transactions on Electron Devices, 65(5), 1932-1938, 20180402
  21. Hole-Trapping Process at Al2O3/GaN Interface Formed by Atomic Layer Deposition, IEEE Electron Device Letters, 38(9), 1309-1312, 20170823
  22. Stable yttrium oxyfluoride used in plasma process chamber, Journal of Vacuum Science & Technology A, 35(2), 021405_1-021405_6, 20170131
  23. Evaluating Work-Function and Composition of ErSix on Various Surface Orientation of Silicon, ECS Journal of Solid State Science and Technology,, 5(10), P608-P613, 20160921
  24. Detection of short range order in SiO2 thin-films by grazing-incidence wide and small-angle X-ray scattering, Journal of Applied Physics, 119, 154103_1-154103_5, 20160419
  25. Proposal of tunneling- and diffusion-current hybrid MOSFET: A device simulation study, Japanese Journal of Applied Physics, 55, 04ED12-1-04ED12-7, 20160314
  26. Impact of doping concentration on 1/ f noise performances of accumulation-mode Si(100) n-MOSFETs, Japanese Journal of Applied Physics, 55, 04ED08_1-04ED08_6, 20160308
  27. Introduction of Atomically Flattening of Si Surface to Large-Scale Integration Process Employing Shallow Trench Isolation, ECS Journal of Solid State Science and Technology, 5(2), P67-P72, 20151124
  28. Structural Analyses of Thin SiO2 Films Formed by Thermal Oxidation of Atomically Flat Si Surface by Using Synchrotron Radiation X-Ray Characterization, ECS Journal of Solid State Science and Technology, 4(8), N96-N98, 20150616
  29. Atomically flattening of Si surface of silicon on insulator and isolation-patterned wafers, Japanese Journal of Applied Physics, 54, 04DA04_1-04DA04_7, 20150223
  30. Mass densification and defect restoration in chemical vapor deposition silicon dioxide film using Ar plasma excited by microwave, Journal of Vacuum Science & Technology A, 32(5), 051502-1-051502-9, 20140709
  31. Extraction of time constants ratio over nine orders of magnitude for understanding random telegraph noise in metal–oxide–semiconductor field-effect transistors, Japanese Journal of Applied Physics, 53, 04EC19_1-04EC19_7, 20140305
  32. Carrier mobility characteristics of (100), (110), and (551) oriented atomically flattened Si surfaces for fin structure design of multi-gate metal–insulator–silicon field-effect transistors, Japanese Journal of Applied Physics, 53, 04EC04_1-04EC04_7, 20140207
  33. A Statistical Evaluation of Random Telegraph Noise of In-Pixel Source Follower Equivalent Surface and Buried Channel Transistors, IEEE Transactions on Electron Devices, 60(10), 3555-3561, 20130918
  34. A Test Circuit for Extremely Low Gate Leakage Current Measurement of 10 aA for 80 000 MOSFETs in 80 s, IEEE Transactions on Semiconductor Manufacturing, 26(3), 288-295, 20130731
  35. Low-Interface-Trap-Density and High-Breakdown-Electric-Field SiN Films on GaN Formed by Plasma Pretreatment Using Microwave-Excited Plasma-Enhanced Chemical Vapor Deposition, IEEE Transactions on Electron Devices, 60(6), 1916-1922, 20130503
  36. Angle-resolved photoelectron spectroscopy study on interfacial transition layer and oxidation-induced residual stress in Si(100) substrate near the interface, Microelectronic Engineering, 109, 197-199, 20130402
  37. Stress induced leakage current generated by hot-hole injection, Microelectronic Engineering, 109, 298-301, 20130328
  38. ★, High Quality SiO2/Al2O3 Gate Stack for GaN Metal-Oxide-Semiconductor Field-Effect Transistor, Japanese Journal of Applied Physics, 52, 04CF09_1-04CF09_6, 20130321
  39. Chemical Structure of Interfacial Transition Layer Formed on Si(100) and Its Dependence on Oxidation Temperature, Annealing in Forming Gas, and Difference in Oxidizing Species, Japanese Journal of Applied Physics, 52, 031302_1-031302_14, 20130222
  40. Integration Process Development for Improved Compatibility with Organic Non-Porous Ultralow- k Dielectric Fluorocarbon on Advanced Cu Interconnects, Japanese Journal of Applied Physics, 51, 05EC03_1-05EC03_6, 20120512
  41. A Simple Test Structure for Evaluating the Variability in Key Characteristics of a Large Number of MOSFETs, IEEE Transactions on Semiconductor Manufacturing, 25(2), 145-154, 20120504
  42. Cu Single Damascene Integration of an Organic Nonporous Ultralow- k Fluorocarbon Dielectric Deposited by Microwave-Excited Plasma-Enhanced CVD, IEEE Transactions on Electron Devices, 59(5), 1445-1453, 20120425
  43. Recovery Characteristics of Anomalous Stress-Induced Leakage Current of 5.6 nm Oxide Films, Japanese Journal of Applied Physics, 51, 04DC02_1-04DC02_6, 20120420
  44. Hole Mobility in Accumulation Mode Metal-Oxide-Semiconductor Field-Effect Transistors, Japanese Journal of Applied Physics, 51, 04DC07_1-04DC07_6, 20120420
  45. High Integrity SiO2 Gate Insulator Formed by Microwave-Excited Plasma Enhanced Chemical Vapor Deposition for AlGaN/GaN Hybrid Metal-Oxide-Semiconductor Heterojunction Field-Effect Transistor on Si Substrate, Japanese Journal of Applied Physics, 51, 04DF03_1-04DF03_4, 20120420
  46. On the Interface Flattening Effect and Gate Insulator Breakdown Characteristic of Radical Reaction Based Insulator Formation Technology, Japanese Journal of Applied Physics, 51, 02BA01_1-02BA01_6, 20120220
  47. Densification of chemical vapor deposition silicon dioxide film using oxygen radical oxidation, Journal of Applied Physics, 111(3), 034101_1-034101_7, 20120201
  48. A Test Circuit for Statistical Evaluation of p-n Junction Leakage Current and its Noise, IEEE Transactions on Semiconductor Manufacturing, 25(3), 303-309, 20120131
  49. Advanced Direct-Polishing Process Development of Non-Porous Ultralow-k Dielectric Fluorocarbon with Plasma Treatment on Cu Interconnects, Journal of The Electrochemical Society, 159(4), H407-H411, 20120125
  50. Highly Reliable Radical SiO2 Films on Atomically Flat Silicon Surface Formed by Low Temperature Pure Ar Annealing, Japanese Journal of Applied Physics, 50, 10PB05_1-10PB05_7, 20111020
  51. Large-Scale Test Circuits for High-Speed and Highly Accurate Evaluation of Variability and Noise in Metal-Oxide-Semiconductor Field-Effect Transistor Electrical Characteristics, Japanese Journal of Applied Physics, 50, 106701_1-106701_11, 20111020
  52. Tribological Study of Brush Scrubbing in Post-Chemical Mechanical Planarization Cleaning in Non-porous Ultralow-k Dielectric/Cu Interconnects, Journal of The Electrochemical Society, 158(11), H1145-H1151, 20111005
  53. Evaluation for Anomalous Stress-Induced Leakage Current of Gate SiO2 Films Using Array Test Pattern, IEEE Transactions on Electron Devices, 58(10), 3307-3313, 20110921
  54. Formation speed of atomically flat surface on Si (100) in ultra-pure argon, Microelectronic Engineering, 88(10), 3133-3139, 20110629
  55. Visualization of Single Atomic Steps on An Ultra-Flat Si(100) Surface by Advanced Differential Interference Contrast Microscopy, Electrochemical and Solid-State Letters, 14(9), H351-H353, 20110609
  56. Electrical Characteristics of Novel Non-porous Low-k Dielectric Fluorocarbon on Cu Interconnects for 22 nm Generation and Beyond, Japanese Journal of Applied Physics, 50(5), 05EB02_1-05EB02_5, 20110520
  57. Tribological Effects of Brush Scrubbing in Post Chemical Mechanical Planarization Cleaning on Electrical Characteristics in Novel Non-porous Low-k Dielectric Fluorocarbon on Cu Interconnects, Japanese Journal of Applied Physics, 50(5), 05EC07_1-05EC07_6, 20110520
  58. Analysis of the Low-Frequency Noise Reduction in Si(100) Metal-Oxide-Semiconductor Field-Effect Transistors, Japanese Journal of Applied Physics, 50(4), 04DC01_1-04DC01_6, 20110420
  59. Impact of Channel Direction Dependent Low Field Hole Mobility on (100) Orientation Silicon Surface, Japanese Journal of Applied Physics, 50(4), 04DC03_1-04DC03_6, 20110420
  60. High-Rate Deposition of Amorphous Silicon Films by Microwave-Excited High-Density Plasma, Japanese Journal of Applied Physics, 50(3), 036502_1-036502_6, 20110322
  61. Mesoscopic-Scale and Small Strain Field beneath SiO2/Si Interface Revealed by a Multiple-Wave X-ray Diffraction Phenomenon-Depth of the Strain Field, e-Journal of Surface Science and Nanotechnology, 9, 47-50, 20110219
  62. Electrical Properties of Metal-Oxide-Containing SiO2 Films Formed by Organosiloxane Sol–Gel Precursor, Japanese Journal of Applied Physics, 49(11), 111503_1-111503_5, 20101122
  63. Depth Profile of Nitrogen Atoms in Silicon Oxynitride Films Formed by Low-Electron-Temperature Microwave Plasma Nitridation, Japanese Journal of Applied Physics, 49(9), 091301_1-091301_8, 20100921
  64. Relation Between the Mobility,1/f Noise, and Channel Direction in MOSFETs Fabricated on (100) and (110) Silicon-Oriented Wafers, IEEE Transactions on Electron Devices, 57(7), 1597-1607, 20100623
  65. End-Point Detection of Ta/TaN Chemical Mechanical Planarization via Forces Analysis, Japanese Journal of Applied Physics, 49(5), 05FC01_1-05FC01_4, 20100520
  66. ★, Statistical Evaluation of Process Damage Using an Arrayed Test Pattern in a Large Number of MOSFETs, IEEE Transactions on Electron Devices, 57(6), 1310-1318, 20100519
  67. Crystallographic orientation dependence of compositional transition and valence band offset at SiO2/Si interface formed using oxygen radicals, Applied Physics Letters, 96(17), 173103_1-173103_3, 20100427
  68. Light-Emitting Diode Based on ZnO by Plasma-Enhanced Metal-Organic Chemical Vapor Deposition Employing Microwave Excited Plasma, Japanese Journal of Applied Physics, 49(4), 04DG14_1-04DG14_4, 20100420
  69. Experimental Investigation of Effect of Channel Doping Concentration on Random Telegraph Signal Noise, Japanese Journal of Applied Physics, 49(4), 04DC07_1-04DC07_5, 20100420
  70. Analysis of Hundreds of Time Constant Ratios and Amplitudes of Random Telegraph Signal with Very Large Scale Array Test Pattern, Japanese Journal of Applied Physics, 49(4), 04DC06_1-04DC06_4, 20100420
  71. Low Contact Resistivity with Low Silicide/p+-Silicon Schottky Barrier for High-Performance p-Channel Metal-Oxide-Silicon Field Effect Transistors, Japanese Journal of Applied Physics, 49(4), 04DA03_1-04DA03_5, 20100420
  72. Very High Performance CMOS on Si(551) Using Radical Oxidation Technology and Accumulation-Mode SOI Device Structure, Journal of The Electrochemical Society, 157(3), H389-H393, 20100204
  73. Modelling of the hole mobility in p-channel MOS transistors fabricated on (110) oriented silicon wafers, Solid-State Electronics, 54(4), 420-426, 20091209
  74. Characterization of MgZnO films grown by plasma enhanced metal-organic chemical vapor deposition, Thin Solid Films, 518(11), 2953-2956, 20091028
  75. The electric properties of low-magnetic-loss magnetic composites containing Zn-Ni-Fe particles, Journal of Physics: Condensed Matter, 21(43), 436009_1-436009_5, 20091008
  76. Hole Mobility in Si(110) p-MOS Transistors, ECS Transactions, 16(40), 7-12, 20091000
  77. Low-Loss Composite Material Containing Fine Zn-Ni-Fe Flakes for High-Frequency Applications, IEEE Transactions on Magnetics, 45(10), 4337-4340, 20090918
  78. High-Frequency Propagation on Printed Circuit Board Using a Material With a Low Dielectric Constant, a Low Dielectric Loss, and a Flat Surface, EEE Transactions on Components and Packaging Technologies, 32(2), 415-423, 20090722
  79. In situ Observation of Grain Growth on Electroplated Cu Film by Electron Backscatter Diffraction, Japanese Journal of Applied Physics, 48(6), 066507_1-066507_8, 20090622
  80. Three-step Room Temperature Wet Cleaning Process for Silicon Substrate, Solid State Phenomena, 145-146, 381-384, 20090606
  81. Data Analysis Technique of Atomic Force Microscopy for Atomically Flat Silicon Surfaces, IEICE TRANSACTIONS on Electronics, E92-C(5), 664-670, 20090501
  82. Reduction of Scratch on Brush Scrubbing in Post CMP Cleaning by Analyzing Contact Kinetics on Ultra Low-k Dielectric, ECS Transactions, 19(7), 103-109, 20090500
  83. Impact of New Approach to Improve MOSFETs Performance with Ultrathin Gate Insulator, ECS Transactions, 19(4), 65-70, 20090500
  84. UV-Raman Spectroscopy Study on SiO2/Si Interface, ECS Transactions, 19(2), 55-66, 20090500
  85. Effects of Ion-Bombardment-Assist and High Temperature on Growth of Zinc Oxide Films by Microwave Excited High Density Plasma Enhanced Metal Organic Chemical Vapor Deposition, Japanese Journal of Applied Physics, 48(4), 04C135_1-04C135_6, 20090420
  86. Deposition of Microcrystalline Si1-xGex by RF Magnetron Sputtering on SiO2 Substrates, Japanese Journal of Applied Physics, 48(4), 04C124_1-04C124_6, 20090420
  87. Complementary Metal-Oxide-Silicon Field-Effect-Transistors Featuring Atomically Flat Gate Insulator Film/Silicon Interface, Japanese Journal of Applied Physics, 48(4), 04C048_1-04C048_6, 20090420
  88. A Study on Very High Performance Novel Balanced Fully Depleted Silicon-on-Insulator Complementary Metal-Oxide-Semiconductor Field-Effect Transistors on Si(110) Using Accumulation-Mode Device Structure for Radio-Frequency Analog Circuits, Japanese Journal of Applied Physics, 48(4), 04C047_1- 04C047_4, 20090420
  89. Impact of Tungsten Capping Layer on Yttrium Silicide for Low-Resistance n+-Source/Drain Contacts Japanese Journal of, Japanese Journal of Applied Physics, 48(4), 04C046_1-04C046_5, 20090420
  90. Anomalous Random Telegraph Signal Extractions from a Very Large Number of n-Metal Oxide Semiconductor Field-Effect Transistors Using Test Element Groups with 0.47 Hz-3.0 MHz Sampling Frequency, Japanese Journal of Applied Physics, 48(4), 04C044_1-04C044_5, 20090420
  91. Effect of Additives in Organic Acid Solutions for Post-CMP Cleaning on Polymer Low-k Fluorocarbon, Journal of The Electrochemical Society, 156(6), H409-H415, 20090401
  92. Inductively coupled plasma generator for an environmentally benign perfluorocarbon abatement system, Journal of Vacuum Science & Technology A, 27(3), 465-470, 20090330
  93. Experimental demonstration and analysis of high performance and low 1/f noise Tri-gate MOSFETs by optimizing device structure, Microelectronic Engineering, 86(7-9), 1786-1788, 20090316
  94. Stress-induced leakage current and random telegraph signal, Journal of Vacuum Science & Technology B, 27(1), 394-401, 20090209
  95. Different mechanism to explain the 1/ f noise in n- and p-SOI-MOS transistors fabricated on (110) and (100) silicon-oriented wafers, Journal of Vacuum Science & Technology B, 27(1), 394-401, 20090209
  96. Characterization for High-Performance CMOS Using In-Wafer Advanced Kelvin-Contact Device Structure, IEEE Semiconductor Manufacturing, 22(1), 291-298, 20090204
  97. ★, Atomically Flat Silicon Surface and Silicon/Insulator Interface Formation Technologies for (100) Surface Orientation Large-Diameter Wafers Introducing High Performance and Low-Noise Metal-Insulator-Silicon FETs, IEEE Transactions on Electron Devices, 56(2), 291-298, 20090128
  98. Effect of Various Cleaning Solutions and Brush Scrubber Kinematics on the Frictional Attributes of Post Copper CMP Cleaning Process, Solid State Phenomena, 145-146, 363-366, 20090106
  99. Damage-Free Post-CMP Cleaning Solution for Low-k Fluorocarbon on Advanced Interconnects, Solid State Phenomena, 145-146, 189-192, 20090106
  100. Angle-resolved photoelectron study on the structures of silicon nitride films and Si3N4 /Si interfaces formed using nitrogen-hydrogen radicals, Journal of Applied Physics, 104, 114112-1-114112-8, 20081211
  101. High-Efficiency PFC Abatement System Utilizing Plasma Decomposition and Ca(OH)2/Cao Immobilization, IEEE Transactions on Semiconductor Manufacturing, 21, 668-675, 20081105
  102. Three-Step Room-Temperature Cleaning of Bare Silicon Surface for Radical-Reaction-Based Semiconductor Manufacturing, Journal of The Electrochemical Society, 156, H10-H17, 20081030
  103. Accurate negative bias temperature instability lifetime prediction based on hole injection, Microelectronics Reliability, 48, 1649-1654, 20080822
  104. High Permeability and Low Loss Ni–Fe Composite Material for High-Frequency Applications, IEEE Transactions on Magnetics, 44, 2100-2106, 20080822
  105. Nitrogen Profile Study for SiON Gate Dielectrics of Advanced Dynamic Random Access Memory, Japanese Journal of Applied Physics, 47(7), 5380-5834, 20080711
  106. Formation and Property of Yttrium and Yttrium Silicide Films as Low Schottcky Barrier material for n-Type Silicon, Japanese Journal of Applied Physics, 47(4), 3138-3141, 20080425
  107. Characterization of Zinc Oxide Films Grown by a Newly Developed Plasma Enhanced Metal Organic Chemical Vapor Deposition Employing Microwave Excited High Density Plasma, Japanese Journal of Applied Physics, 47(4), 2994-2998, 20080425
  108. Performance Comparison of Ultrathin Fully Depleted Silicon-on-Insulator Inversion-, Intrinsic-, and Accumulation-Mode Metal－Oxide－Semiconductor Field-Effect Transistors, Japanese Journal of Applied Physics, 47(4), 2668-2671, 20080425
  109. Evaluation of New Amorphous Hydrocarbon Film for Copper Barrier Dielectric Film in Low-k Copper Metallization, Japanese Journal of Applied Physics, 47(4), 2531-2534, 20080425
  110. Low-Dielectric-Constant Nonporous Fluorocarbon Films for Interlayer Dielectric, Japanese Journal of Applied Physics, 47(4), 2531-2534, 20080425
  111. Tantalum Nitride Sputtering Deposition with Xe on Fluorocarbon for Cu Interconnects, Journal of The Electrochemical Society, 155(5), H323-H328, 20080319
  112. Evaluation of Si3N4/Si interface by UV Raman spectroscopy, Applied Surface Science, 254, 6229-6231, 20080318
  113. ★, Atomically Flat Silicon Surface and Silicon/Insulator Interface Formation Technologies for (100) Surface Orientation Large-Diameter Wafers Introducing High Performance and Low-Noise Metal–Insulator–Silicon FETs, IEEE Transactions on Electron Devices, 56(2), 291-298, 20080128
  114. Damage-free microwave-excited plasma etching without carrier deactivation of heavily doped Si under thin silicide layer, Journal of Vacuum Science & Technology A, 26(1), 8-16, 20071214
  115. High performance and highly reliable novel CMOS devices using accumulation mode multi-gate and fully depleted SOI MOSFETs, Microelectronic Engineering, 84, 2105-2108, 20070600
  116. ★, Very High Carrier Mobility for High Performance CMOS on Si(110) surface, IEEE Transactions on Electron Devices, 54(6), 1438-1445, 20070529
  117. Revolutional Process of Silicon Technologies Exhibiting Very High Speed Performance Over 50 GHz Clock Rate, IEEE Transactions on Electron Devices, 54(6), 1471-1477, 20070529
  118. NBTI Mechanism Based on Hole-Injection for Accurate Lifetime Prediction, ECS Transactions, 6(3), 229-243, 20070500
  119. Impact of Improved Mobilities and Suppressed 1/f Noise in Fully Depleted SOI MOSFETs Fabricated on Si(110) Surface, ECS Transactions, 6(4), 101-106, 20070500
  120. Hot Carrier Instability Mechanism in Accumulation-Mode Normally-off SOI nMOSFETs and Their Reliability Advantage, ECS Transactions, 6(4), 113-118, 20070500
  121. Development of Microwave-Excited Plasma-Enhanced Metal-rganic Chemical Vapor Deposition System for Forming Ferroelectric Sr2(Ta1-x,Nbx)2O7 Thin Film on Amorphous SiO2, Japanese Journal of Applied Physics, 46(4B), 2200-2204, 20070424
  122. Very Low Bit Error Rate in Flash Memory Using Tunnel Dielectrics Formed by Kr/O2/NO Plasma Oxynitridation, Japanese Journal of Applied Physics, 46(4B), 2148-2152, 20070424
  123. New Statistical Evaluation Method for the Variation of Metal-Oxide-Semiconductor Field-Effect Transistors, Japanese Journal of Applied Physics, 46(4B), 2054-2057, 20070424
  124. Electric Characteristics of Si3N4 Films Formed by Directly Radical Nitridation on Si(110) and Si(100) Surfaces, Japanese Journal of Applied Physics, 46(4B), 1895-1898, 20070424
  125. Low Leakage Current and Low Resistivity p+n Diode on Si(110) Fabricated by Ga+ and B+ Dual Ion Implantation for Low Temperature Source-Drain Activation, Japanese Journal of Applied Physics, 46(4B), 1848-1852, 20070424
  126. Accuracy and Applicability of Low Frequency C-V Measurement Methods for Characterization of Ultra-thin Gate Dielectrics with Large Current, IEEE Transactions on Electron Devices, 54(5), 20070423
  127. Subnitride and valence band offset at Si3N4/Si interface formed using nitrogen-hydrogen radicals, Applied Physics Letters, 90(12), 123114-1-123114-3, 20070319
  128. High quality gate insulator film formation on SiC using by microwave-excited high-density plasma, Microelectronics Reliability, 47(4-5), 786-789, 20070227
  129. X-ray photoelectron spectroscopy study of dielectric constant for Si compounds, Applied Physics Letters, 89(154103), 1-3, 20061011
  130. Fablication of Pt/Sr2(Ta1-x,Nbx)2O7/IrO2/SiO2/Si Device Window and Metal-Ferroelectric-Metal-Insulator-Si Field-Effect Transistor, Japanese Journal of Applied Physics, 45(9B), 7336-7340, 20060922
  131. Fabrication of Pt/Sr2(Ta1-x,Nbx)2O7/IrO2/SiO2/Si device with large memory window and metal-ferroelectric-metal-insulator-Si field-effect transistor, Japanese Journal of Applied Physics, 45(9B), 7336-7340, 20060922
  132. Circuit level prediction of device performance degradation due to negative bias temperature stress, Microelectronics Reliability, 47(6), 930-936, 20060912
  133. Low voltage 3 V operation of ferroelectric multi-layer stack MFIS structure device formed by plasma physical vapor deposition and oxygen radical treatment, Integrated Ferroelectrics, 81(1), 47-55, 20060817
  134. Examination of degradation mechanism due to negative bias temperature stress a perspective of hole energy for accurate lifetime prediction, Microelectronics Reliability, 47(4), 409-418, 20060804
  135. Control of Nitrogen Depth Profile near Silicon Oxynitride/ Si(100) Interface Formed by Radical Nitridation, Japanese Journal of Applied Physics, 45(8A), 20060804
  136. Relationship between Sr2(Ta1-x,Nbx)2O7 Crystal Phase and RF-Sputtering Plasma Condition for Metal-Ferroelectric-Insulator-Si Structure Device Formation, Japanese Journal of Applied Physics, 45(4B), 3207-3212, 20060425
  137. Impact of Improved High-Performance Si(110)-Oriented Metal-Oxide-Semiconductor Field-Effect Transistors Using Accumulation-Mode Fully Depleted Silicon-on-Insulator Devices, Japanese Journal of Applied Physics, 45(4B), 3110-3116, 20060425
  138. 1/f noise suppression of pMOSFETs fabricated on Si(100) and Si(110) using an alkali-free cleaning process, IEEE Transactions on Electron Devices, 53(4), 851-856, 20060410
  139. Lattice Distortion at SiO2/Si(001) Interface Studied with High-Resolution Rutherford Backscattering Spectroscopy/Channeling, Japanese Journal of Applied Physics, 45(4A), 2467-2469, 20060407
  140. Statistical evaluation of very low gate leakage current for bit error evaluation in Flash Memory, Transactions of the Materials Research Society of Japan, 31(1), 141-144, 20060300
  141. Capacitance-voltage measurement method for ultrathin gate dielectrics using LC resonance circuit, IEEE Transactions on Semiconductor Manufacturing, 19(1), 43-49, 20060206
  142. Subject and View of Semiconductor Technologies for sub-100nm Node, The Journal of Institute of Electronics, Information, and Communication Engineering, 89(2), 109-116, 20060201
  143. New era of silicon technologies due to radical reaction based semiconductor manufacturing, Journal of Physics D: Applied Physics, 39(1), R1-R17, 20051215
  144. Hydrogen termination of Si(110) surfaces upon wet cleaning revealed by highly resolved scanning tunneling microscopy, Journal of Applied Physics, 98(10), 103525 1-8, 20051129
  145. Geometry and bias dependence of low-frequency random telegraph signal and 1/f noise levels in mosfets, Fluctuation and Noise Letters, 5(4), L539-L548, 20051024
  146. Control of nitrogen depth profile and chemical bonding state in silicon oxynitride films formed by radical nitridation, Japanese Journal of Applied Physics, 44(10), 7395-7399, 20051011
  147. High resolution X-ray photoelectron spectroscopy study on Si3N4/Si interface structures and its correlation with hysteresis in C-V curves, ECS Transactions, 1(1), 267-276, 20051000
  148. New NBTI Lifetime Prediction Method for Ultra Thin SiO2 Films, ECS Transactions, 1(1), 147-160, 20051000
  149. Adsorption behavior of various fluorocarbon gases on silicon wafer surface, Japanese Journal of Applied Physics, 44(4B), 2245-2251, 20050421
  150. XPS Study of H-Terminated Silicon Surface under Inert Gas and UHV Annealing, Journal of the Electrochemical Society, 152(2), G163-G167, 20050114
  151. A low-dielectric-constant Sr2(Ta1-x,Nbx)(2)O7 thin film controlling the crystal orientation on an IrO2 substrate for one-transistor-type ferroelectric memory device, Japanese Journal of Applied Physics, 43(4B), 2194-2198, 20040427
  152. High-speed damage-free contact hole etching using dual shower head microwave-excited high-density-plasma equipment, Japanese Journal of Applied Physics, 43(4B), 1784-1787, 20040427
  153. MFIS structure device with a low dielectric constant ferroelectric Sr2(Ta1-x,Nbx)2O7 formed by plasma physical vapor deposition and oxygen radical treatment, Integrated Ferroelectrics, 65(1), 29-38, 20040101
  154. Reliability of silicon nitride gate dielectrics grown at 400 degrees C formed by microwave-excited high-density plasma, Applied Surface Science, 216(1-4), 246-251, 20030630
  155. Oxygen radical treatment applied to ferroelectric thin films, Applied Surface Science, 216(1-4), 239-245, 20030630
  156. Ferroelectric Sr2(Ta1-x, Nbx)(2)O7 with a low dielectric constant by plasma physical vapor deposition and oxygen radical treatment, Japanese Journal of Applied Physics, 42(4B), 2050-2054, 20030401
  157. High-quality silicon oxide film formed by diffusion region plasma enhanced chemical vapor deposition and oxygen radical treatment using microwave-excited high-density plasma, Japanese Journal of Applied Physics, 42(4B), 1911-1915, 20030401
  158. A technology for reducing flicker noise for ULSI applications, Japanese Journal of Applied Physics, 42(4B), 2106-2109, 20030401
  159. Saturation phenomenon of stress-induced gate leakage current, Japanese Journal of Applied Physics, 41(4B), 2335-2338, 20020400
  160. Excess Currents Induced by Hot Hole Injection and FN Stress in Thin SiO2 Films, IEEE Transactions on Electron Devices, 48(5), 868-873, 20010500
  161. ★, Time-dependent dielectric breakdown of SiO2 films in a wide electric field range, Microelectronics Reliability, 41, 47-52, 20001222
  162. Simulation of dopant redistribution during gate oxidation including transient-enhanced diffusion caused by implantation damage, Japanese Journal of Applied Physics, 39(5A), 2565-2576, 20000500
  163. Precise Control of Nitrogen Profiles and Nitrogen Bond States for Highly Reliable N2O-Grown Oxynitride, Journal of the Electrochemical Society, 147(5), 1888-1892, 20000500
  164. Angle resolved X-ray photoelectron spectroscopic study of ultrathin oxynitrides, Materials Science in Semiconductor Processing, 2(3), 225-231, 19991000
  165. Effects of N distribution on charge trapping and TDDB characteristics of N2O annealed wet oxide, IEEE Transactions on Electron Devices, 46(6), 1121-1126, 19990600
  166. Origin of positive charge generated in thin SiO2 films during high-field electrical stress, IEEE Transactions on Electron Devices, 46(5), 947-953, 19990500
  167. Characterization of extrinsic oxide breakdown on thin dielectric oxide, Ieice Transactions on Electronics, E82C(4), 589-592, 19990400
  168. Improved reliability of NO treated NH3-nitrided oxide with regard to O2 annealing, SOLID-STATE ELECTRONICS, 42(6), 921-924, 19980600
  169. High performance 0.2 um dual gate complementary MOS technologies by suppression of transient-enhanced-diffusion using rapid thermal annealing, Japanese Journal of Applied Physics, 37(3B), 1054-1058, 19980300
  170. Highly Reliable SiO2 Films Formed by UV-O2 Oxidation, JJAP, 37(3B), 1122-1124, 19980300
  171. Oxide thickness dependence of nitridation effects on TDDB characteristics, Microelectronics Reliability, 37(10-11), 1521-1524, 19971100
  172. Dielectric Brekdown caused by hole-induced-defect in thin SiO2 films, Applied Surface Science, 117/118, 245-248, 19970602
  173. Electron traps and excess current induced by hot-hole injection into thin SiO2 films, Journal of the Electrochemical Society, 143(10), 3377-3383, 19961000
  174. Clarification of nitridation effect on oxide formation methods, Japanese Journal of Applied Physics, 35(2B), 1454-1459, 19960200
  175. Model for the Substrate Hole Current Based on Thermionic Hole Emission from the Anode during Fowlar-Nordheim Electron-Tunneling in N-Channel Metal-Oxide-Semiconductor Field-Effect Transistors, Journal of Applied Physics, 77(7), 3277-3282, 19950401
  176. Charge-Transport in Ultrathin Silicon Nitrides, Journal of the Electrochemical Society, 142(3), 990-996, 19950300
  177. Preoxide-Controlled Oxidation for Very Thin Oxide-Films, The Japan Society of Applied Physics, 32(1B), 294-297, 19930100
  178. Very Thin Oxide Film on a Silicon Surface by Ultraclean Oxidation, Applied Physics Letters, 60(17), 2126-2128, 19920220
  179. Effect of Silicon Wafer In Situ Cleaning on the Chemical Structure of Ultrathin Silicon Oxide Film, Japanese Journal of Applied Physics, 30(12B), 3584-3586, 19911116
  180. Effects of Si Wafer Surface Micro Roughness on Electrical Properties of Very Thin Gate Oxide Films, ULSI Science and Technology, PV91(11), 400-408, 199111
  181. Native Oxide-Growth on Silicon Surface in Ultrapure Water and Hydrogen Peroxide, Japanese Journal of Applied Physics, 29(12), L2392-L2394, 19901020
  182. SiNx Deposition at Low Temperature Using UV-Irradiated NH3, ECS Transactions, 89(4), 31-36, 201904
  183. Effect of drain current on appearance probability and amplitude of random telegraph noise in low-noise CMOS image sensors, Japanese Journal of Applied Physics, 57, 04FF08_1-04FF08_6, 201804
  184. Experimental investigation of localized stress-induced leakage current distribution in gate dielectrics using array test circuit, Japanese Journal of Applied Physics, 57, 04FE11_1-04FE11_5, 201804
  185. Formation technology of flat surface with epitaxial growth on ion-implanted (100)-oriented Si surface of thin silicon-on-insulator, Japanese Journal of Applied Physics, 56, 105503_1 -105503_8, 201710
  186. Performances of accumulation-mode n- and p-MOSFETs on Si(110) wafers, Japanese Journal of Applied Physics, 56, 04CD15_1-04CD15_7, 201704
  187. Oxidizing Species Dependence of the Interface Reaction during Atomic-Layer-Deposition Process and Post-Deposition-Anneal, ECS Transactions, 75(5), 207-214, 201608
  188. Effects of Oxygen Microbubbles on Photoresist Layers under Hot Water Conditions, Journal of Photopolymer Science and Technology, 29(4), 643-646, 201606
  189. Low Leakage Current Al2O3 Metal-Insulator-Metal Capacitors Formed By Atomic Layer Deposition at Optimized Process Temperature and O2 Post Deposition Annealing, ECS Transactions, 72(4), 91-100, 201605
  190. Introduction of a High Selectivity Etching Process with Advanced SiNx Etch Gas in the Fabrication of FinFET Structures, ECS Transactions, 72(4), 23-30, 201605
  191. Effect of Oxygen Impurity on Nitrogen Radicals in Post-Discharge Flows, ECS Transactions, 69(39), 1-9, 201512
  192. Effect of Process Temperature of Al2O3 Atomic Layer Deposition Using Accurate Process Gasses Supply System, ECS Transactions, 66(4), 305-314, 201503
  193. Low Temperature Atomically Flattening of Si Surface of Shallow Trench Isolation Pattern, ECS Transactions, 66(7), 11-21, 201503
  194. Ultra-Low Temperature Flattening Technique of Silicon Surface Using Xe/H2 Plasma, ECS Transactions, 66(5), 277-283, 201503
  195. Effect of Hydrogen on Silicon Nitrides Formation by Microwave Excited Plasma Enhanced Chemical Vapor Deposition, ECS Transactions, 66(4), 151-159, 201503
  196. Crystallinity Improvement of Ferroelectric BiFeO3 Thin Film by Oxygen Radical Treatment, ECS Transactions, 66(5), 261-267, 201503
  197. Surface Metal Cleaning of GaN Surface Based on Redox Potential of Cleaning Solution, ECS Transactions, 66(7), 11-21, 201503
  198. Flattening Technique of (551) Silicon Surface Using Xe/H2 Plasma, ECS Transactions, 61(2), 401-407, 201403
  199. Effect of Composition Ratio on Erbium Silicide Work Function on Different Morphology of Si(100) Surface Changed by Alkaline Etching, ECS Transactions, 61(3), 47-53, 201403
  200. High Selectivity in Dry Etching of Silicon Nitride over Si Using a Novel Hydrofluorocarbon Etch Gas in a Microwave Excited Plasma for FinFET, ECS Transactions, 61(3), 29-37, 201403
  201. High Performance Normally-off GaN MOSFETs on Si Substrates, ECS Transactions, 58(4), 155-166, 201308
  202. Schottky Barrier Height between Erbium Silicide and Various Morphology of Si(100) Surface Changed by Alkaline Etching, ECS Transactions, 58(7), 349-354, 201308
  203. Effect of Composition Rate on Erbium Silicide Work Function on Different Silicon Surface Orientation, ECS Transactions, 53(1), 343-350, 201305
  204. Low Work Function between Erbium Silicide and n-type Silicon Controlled by Cap Film Stress, ECS Transactions, 45(3), 371-378, 201204
  205. Electrical Properties of Silicon Nitride Using High Density and Low Plasma Damage PECVD Formed at 400 oC, ECS Transactions, 45(3), 421-428, 201204
  206. Influence of Forming Gas Annealing on SiO2/Si(100) Interface Structures Formed Utilizing Oxygen Molecules Different from that Utilizing Oxygen Radicals, ECS Transactions, 45(3), 453-460, 201204
  207. 1/f CHANNEL NOISE AT HIGH DRAIN CURRENT IN MOS TRANSISTORS, Fluctuation and Noise Letters, 10(4), 431-445, 201112
  208. High Power Normally-Off GaN MOSFET, ECS Transactions, 41(8), 87-100, 201110
  209. Gate SiO2 Film Integrity on Ultra-Pure Argon Anneal (100) Silicon Surface, ECS Transactions, 41(7), 147-156, 201110
  210. Different Properties of Erbium Silicides on Si(100) and Si(551) Orientation Surfaces, ECS Transactions, 41(7), 365-373, 201110
  211. Clear Difference between the Chemical Structure of SiO2/Si Interfaces Formed Using Oxygen Radicals versus Oxygen Molecules, ECS Transactions, 35(4), 115-122, 201105
  212. Pr3Si6N11/Si3N4 Stacked High-k Gate Dielectrics with High Quality Ultrathin Si3N4 Interfacial Layers, ECS Transactions, 35(2), 275-284, 201105
  213. Advanced Direct-Polish Process on Organic Non-Porous Ultra Low-k Fluorocarbon Dielectric on Cu Interconnects, ECS Transactions, 34(1), 653-658, 201103
  214. Evaluation of Narrow Gap Filling Ability in Shallow Trench Isolation by Organosiloxane Sol-Gel Precursor, ECS Transactions, 33(3), 135-143, 201010
  215. Impact of Work Function Optimized S/D Silicide Contact for High Current Drivability CMOS, ECS Transactions, 28(1), 315-324, 201004
  216. Atomically Flattening Technology at 850˚C for Si(100) Surface, ECS Transactions, 28(1), 299-309, 201004
  217. Quantitative Analysis of the Strain Field beneath the Si3N4/Si(001) Interface Formed by the Xe/NH3 Plasma Nitridation using a Multiple-Wave X-ray Diffraction Phenomenon, Transactions of the Materials Research Society of Japan, 34(4), 597-600, 200912
  218. Very High Performance CMOS on Si(551) Surface using Radical Oxidation Silicon Flattening Technology and Accumulation-mode SOI Device Structure, ECS Transactions, 25(7), 115-129, 200910
  219. Different Types of Degradation and Recovery Mechanisms on NBT Stress for Thin SiO2 Films by On-the-Fly Measurement, ECS Transactions, 19(2), 339-350, 200905
  220. Effect of Polisher Kinematics in Reducing Average and Variance of Shear Force and Increasing Removal Rate in Copper CMP, ECS Transactions, 18(1), 465-471, 200903
  221. Microcrystalline Si1-xGex Deposited by Magnetron Sputtering, ECS Transactions, 16(9), 183-192, 200810
  222. X-ray Photoelectron Spectroscopic Study of Nitrogen Depth Profile in Radical Nitrided Silicon Oxynitride Film, Journal of the Vacuum Society of Japan, 50(11), 672-677, 200711
  223. Formation of High Quality Silicon Nitride Films Using Microwave Excitation Plasma, Journal of the Vacuum Society of Japan, 50(11), 672-677, 200711
  224. Performance Boost Using a New Device Structure Design for SOI MOSFETs Beyond 25nm Node, ECS Transactions, 11(6), 349-354, 200710
  225. Dependence of Electron Channel Mobility on Si-SiO2 Interface Microroughness, IEEE Electron Device Letters, 12(12), 652-654, 199112

Publications such as books

  1. 2017/07/07, Different Types of Field-Effect Transistors - Theory and Applications, Carrier Mobility in Field-Effect Transistors, InTech, 2017, July, Scholarly Book, Joint work, en, P. Gaubert and A. Teramoto, Chapter 1
  2. 2016/10/05, Advances in Noise Analysis, Mitigation and Control, New Processes and Technologies to Reduce the Low‐Frequency Noise of Digital and Analog Circuits, InTech, 2016, October, Scholarly Book, en, P. Gaubert and A. Teramoto, Chapter 1
  3. 2007/07, Advanced Gate Stacks for High-Mobility Semiconductors, New Processes and Technologies to Reduce the Low‐Frequency Noise of Digital and Analog Circuits, New Processes and Technologies to Reduce the Low‐Frequency Noise of Digital and Analog Circuits, Springer, 2007, July, Scholarly Book, Joint work, en, A. Teramoto and T. Ohmi, 10-3-540-71490-1, 21-24頁
  4. 2006, Scientific Wet Process Technology for Innovative LSI/FPD Manufacturing, Taylor & Francis, 2006, Scholarly Book, Joint work, en, H. Morita, A. Teramoto, H. Morinaga, S. Ojima, K. Mitsumori, T. Yabune, M. Miyashita, H. Kikuyama, J. takano, 61-250

Invited Lecture, Oral Presentation, Poster Presentation

  1. Sulfurization-free synthesis of MoS2 films using sol-gel chemical conversion technique towards biosensor applications, Md Iftekharul Alam, Rikiya Sumichika, Akinobu Teramoto, The 8th International Symposium on Biomedical Engineering, 2023/11/21, With Invitation, English, Research Center for Biomedical Engineering, Higashi-Hiroshima
    Related URL
  2. Organic Molecule-Induced Photosensor Enhancement in MoS2 Field Effect Transitor, Alam Md Iftekharul, Tsuyoshi Takaoka, Atsushi Ando, Tadahiro Komeda, Akinobu Teramoto, 2023 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ELECTRON DEVICES, 2023/10/23, Without Invitation, English, The Japan Society of Applied Physics Thin Film and Surface Physics Division, Kanazawa
    Related URL
  3. Floating Gate enable to control the threshold voltage in GaN HEMT, Hayato Kosaka, Kuniharu Kobashi, Riichiro Shirota, Shinichiro Takatani, Tomoyuki Suwa, Yoshiteru Amemiya, Akinobu Teramoto, The 8th International Symposium on Biomedical Engineering, 2023/11/21, Without Invitation, English, Research Center for Biomedical Engineering, Higashi-Hiroshima
    Related URL
  4. Switching Characteristics of Magnetic Tunnel Junction with Intermediate State, Yuya Miyazaki, Chihiro Watanabe, Junichi Tsuchimoto, Hiroyuki Hosoya, Yoshiteru Amemiya, Akinobu Teramoto, The 8th International Symposium on Biomedical Engineering, 2023/11/21, Without Invitation, English, Research Center for Biomedical Engineering, Higashi-Hiroshima
    Related URL
  5. Thermal Assisted Atomic Layer Deposition Ruthenium by Ru Precursor and O2 as a reactant, Gagi Tauhidur Rahman, Kazuma Uesugi, Yoshiteru Amemiya, Akinobu Teramoto, The 8th International Symposium on Biomedical Engineering, 2023/11/21, Without Invitation, English, Research Center for Biomedical Engineering, Higashi-Hiroshima
    Related URL
  6. Study of MoS2 thein film synthesized by Sol-gel chemical conversion method, Rikiya Sumichika, Md Iftekharul Alam, Akinobu Teramoto, The 8th International Symposium on Biomedical Engineering, 2023/11/21, Without Invitation, English, Research Center for Biomedical Engineering, Higashi-Hiroshima
    Related URL
  7. Isolation Method of Magnetic Tunnel Junction Using SiN-Sidewall and Characteristics, Chihiro Watanabe, Junichi Tsuchimoto, Hiroyuki Hosoya, Kazuo Yamanaka, Yuya Miyazaki, Yoshiteru Amemiya, Akinobu Teramoto, The 8th International Symposium on Biomedical Engineering, 2023/11/21, Without Invitation, English, Research Center for Biomedical Engineering, Higashi-Hiroshima
    Related URL
  8. Applications of Proximity Capacitance Image Sensor, Toshiro Yasuda and Akinobu Teramoto, The 8th International Symposium on Biomedical Engineering, 2023/11/21, Without Invitation, English, Research Center for Biomedical Engineering, Higashi-Hiroshima
    Related URL
  9. Switching Characteristics of MgO Based MTJ with Intermediate State, Y. Miyazaki, C. Watanabe, J. Tsuchimoto, H. Hosoya, Y. Amemiya, A. Teramoto, International Conference on Solid State Devices and Materials, 2023/09/05, Without Invitation, English, The Japan Society of Applied Physics, Nagoya
  10. Statistical Measurement of Electrical Characteristics of Functional Thin Films Using Impedance Measurement Platform Technology, Koga Saito, Tatsuhiko Suzuki, Hidemi Mitsuda, Takezo Mawaki, Tomoyuki Suwa, Akinobu Teramoto, Shigetoshi Sugawa, Rihito Kuroda, The 84th JSAP Autumn Meeting, 2023/09/23, Without Invitation, Japanese, The Japan Society of Applied Physics, Kumamoto
  11. Thermal Assisted Atomic Layer Deposition of Ruthenium by Ru Precursor and O2 as a reactant, Gagi Tauhidur Rahman, Kazuma Uesugi, Yoshiteru Amemiya, and Akinobu Teramoto, AVS 23rd International Conference on Atomic Layer Deposition, 2023/07/23, Without Invitation, English, AVS, Bellevue, Washington
    Related URL
  12. Development of Piezo Controlled Vapor Delivery System for Ru ALD Application, Hiroshi Nishizato, Krunal Girase, Takumi Moriyama, Kazuma Uesugi, Gagi Tauhidur Rahman, Patrick Lowery P.E., Paul Totten, Troy Freeman, Yoshiteru Amemiya, Akinobu Teramoto, AVS 23rd International Conference on Atomic Layer Deposition, 2023/07/23, Without Invitation, English, AVS, Bellevue, Washington
    Related URL
  13. Statistical chracteristics of RTN and 1/f noise in MOSFETs, AKINOBU TERAMOTO, 2022 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD), 2022/07/08, With Invitation, English, The Institute of Electronics and Information Engineers (IEIE), Korea BK21 Four Education and Research Program for Future ICT Pioneers, Seoul National University, Korea The Institute of Electronics, Information and Communication Engineers (IEICE-ES), Japan, Online
    Related URL
  14. GaN High Electron Mobility Transistor with Floating Gate for Accurate Threshold Voltage Control, H. Kosaka, H. Iwata, Y. Watariguchi, R. Shirota, Y. Amemiya, S. Takatani, T. Suwa , and A. Teramoto, 243rd ECS Meeting, 2023/05/31, Without Invitation, English, The Electrochemical Society, Boston
    Related URL
  15. Endurance characteristics of MgO based 120 nm size MTJ for various write/erase switching pulse width, C. Watanabe, J. Tsuchimoto, H. Hosoya, Y. Amemiya, Y. Miyazaki, A. Teramoto, IEDM SpecialMRAMpostersession, 2022/12/06, Without Invitation, English, IEEE, San Francisco
  16. Effect of SiN Sidewall and Reference-Layer-Thickness Dependence of MR Ratio for High Performance STT-MRAM, Y. Amemiya, J. Tsuchimoto H. Hosoya, H. Nakanishi, C. Watanabe, and A. Teramoto, International Conference on Solid State Devices and Materials, 2022/10/26, Without Invitation, English, The Japan Society of Applied Physics, Makuhari
  17. Reduction of Contact Resistance in GaN/Metal, Yudai Watariguchi Yoshiteru Amemiya, Hiroki Iwata, Tomoyuki Suwa, and Akinobu Teramoto, International Workshop on Nanodevice Technologies, 2022/03/11, Without Invitation, English, RNBS, Hiroshima University, Higashi-Hiroshima
    Related URL
  18. Research on Self-Aligned Lithography for Miniaturization of Integrated Circuits, Kyosuke Yoshioka, Yoshiteru Amemiya, Kazuma Uesugi, and Akinobu Teramoto, International Workshop on Nanodevice Technologies, 2022/03/11, Without Invitation, English, RNBS, Hiroshima University, Higashi-Hiroshima
    Related URL
  19. Statistical Evaluation of 1/f Noise in MOSFETs, Tatsuki Ueta and Akinobu Teramoto, International Workshop on Nanodevice Technologies, 2022/03/18, Without Invitation, English, Research Institute for Nanodevice and Bio Systems (RNBS), Hiroshima University, Higashi-Hiroshima
    Related URL
  20. ALD Research to Realize Area Selective Proces, Kazuma Uesugi, Yoshiteru Amemiya, and Akinobu Teramoto, International Workshop on Nanodevice Technologies, 2022/03/11, Without Invitation, English, Research Institute for Nanodevice and Bio Systems (RNBS), Hiroshima University, Higashi-Hiroshima
    Related URL
  21. New Isolation Method for MTJ Fabrication Using SiN-Sidewall, Hiroki Nakanishi, Junichi Tsuchimoto, Hiroyuki Hosoya, Yoshiteru Amemiya, Chihiro Watanabe, and Akinobu Teramoto, International Workshop on Nanodevice Technologies, 2022/03/11, Without Invitation, English, RNBS, Hiroshima University, Higashi-Hiroshima
    Related URL
  22. Floating Gate GaN HEMT for Normally-Off Operation, Hiroki Iwata, Yudai Watariguchi, Hayato Kosaka, Tomoyuki Suwa, Yoshiteru Amemiya and Akinobu Teramoto, International Workshop on Nanodevice Technologies, 2022/03/11, Without Invitation, English, RNBS, Hiroshima University, Higashi-Hiroshima
    Related URL
  23. New Isolation Method for MTJ Fabrication Using SiN-Sidewall, H. Nakanishi, J. Tsuchimoto, H. Hosoya, Y. Amemiya, C. Watanabe, and A. Teramoto, Special MRAM poster session IEDM, 2021/12/15, Without Invitation, English, IEEE Magnetics Society, San Francisco
    Related URL
  24. High Resolution Array Tester for Flat Panel Display Using Proximity Capacitance Image Sensor, T. Yasuda, K. Kobayashi, Y. Yamamoto, H. Hamori, A. Teramoto, R. Kuroda, and S. Sugawa, The 28th International Display Workshops, 2021/12/03, Without Invitation, English, The Institute of Image Information and Television Engineers The Society for Information Display, Virtual Conference
    Related URL
  25. Study on Influence of O2 Concentration in Wafer Cleaning Ambient for Smoothness of Silicon (110) Surface Appearing at Sidewall of Three-Dimensional Transistors, T. Suwa, A. Teramoto, Y. Shirai, T. Matsuo, N. Mizutani, and S. Sugawa, ECS Meeting, 2020/05/01, Without Invitation, English, The Electrochemical Society
    Related URL
  26. Effect of Drain-to-Source Voltage on Random Telegraph Noise Based on Statistical Analysis of MOSFETs with Various Gate Shapes, R. Akimoto, R. Kuroda, A. Teramoto, T. Mawaki, S. Ichino, T. Suwa, and S. Sugawa, 2020 IEEE International Reliability Physics Symposium, 2020/04/28, Without Invitation, English, IEEE, Virtual
    Related URL
  27. High Reliability CoFeB/MgO/CoFeB Magnetic Tunnel Junction Fabrication Using Low-damage Ion Beam Etching, H. Park, A. Teramoto, J.-i. Tsuchimoto, K. Hashimoto, T. Suwa, M. Hayashi, R. Kuroda, and S. Sugawa, International Conference on Solid State Devices and Materials, 2019/09/06, Without Invitation, English, The Japan Society of Applied Physics, Nagoya
  28. An Accuracy Improved Resistance Measurement Platform For Evaluation of Emerging Memory Materials, T. Maeda, Y. Omura, R. Kuroda, A. Teramoto, T. Suwa, and S. Sugawa, International Conference on Solid State Devices and Materials, 2019/09/04, Without Invitation, English, The Japan Society of Applied Physics, Nagoya
  29. SiNx Deposition at Low Temperature Using UV-Irradiated NH3, Y. Shiba, A. Teramoto, T. Suwa, K. Ishii, A. Shimizu, K. Umezawa, R. Kuroda, and S. Sugawa, 235th ECS Meeting, 2019/05/26, Without Invitation, English, The Electrochemical Society, Dallas
    Attached File's URL
  30. Resistance Measurement Platform for Statistical Analysis of Next Generation Memory Materials, T. Maeda, Y. Omura, A. Teramoto, R. Kuroda, T. Suwa, and S. Sugawa, IEEE International Conference on Microelectronic Test Structures, 2019/03/18, Without Invitation, English, IEEE, Kitakyushu
  31. Impact of Y-O-F Composition in Yttrium Oxyfluoride on Corrosion Resistance to Plasma Irradiation, A. Teramoto, Y. Shiba, T. Goto, Y. Kishi, and S. Sugawa, 5th Annual World Congress of Smart Materials, 2019/03/06, With Invitation, English, BIT, Rome
    Attached File's URL
  32. An Electrical Impedance Biosensor Array for Tracking Moving Cells, N. Ogata, A. Shina, T. Komiya, Y. Iizuka, K. Matsuse, F. Imaizumi, T. Suwa, and A. Teramoto, IEEE SENSORS, 2018/10/28, Without Invitation, English, IEEE, New Delhi
    Attached File's URL
  33. Corrosion Resistance to F and Cl plasma of Yttrium Oxyfluoride (YOF) formed by Sintering, A. Teramoto, Y. Shiba, T. Goto, Y. Kishi, and S. Sugawa, AVS 65th International Symposium, 2018/10/21, Without Invitation, English, American Vacuum Society, Long Beach
    Attached File's URL
  34. Effects of Process Gases and Gate TiN Electrode during the Post Deposition Anneal to ALD-Al2O3 Dielectric Film, M. Saito, A. Teramoto, T. Suwa, K. Nagumo, Y. Shiba, R. Kuroda, and S. Sugawa, VS 65th International Symposium, 2018/10/21, Without Invitation, English, AVS, Long Beach
    Attached File's URL
  35. Impact of CoFeB Surface Roughness on Reliability of MgO Films in CoFeB/MgO/CoFeB Magnetic Tunnel Junction, H. W. Park, A. Teramoto, J. Tsuchimoto, M. Hayashi, K. Hashimoto, and S. Sugawa, 4th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures & 26th International Colloquium on Scanning Probe Microscopy, 2018/10/21, Without Invitation, English, The Japan Society of Applied Physics, Sendai
    Attached File's URL
  36. Statistical Analysis of Electric Characteristics Variability Using MOSFETs with Asymmetric Source and Drain, Shinya Ichino, Akinobu Teramoto, Rihito Kuroda, Takezo Mawaki, Tomoyuki Suwa, Shigetoshi Sugawa, IEICE Technical Committee on Silicon Device and Materials, 2018/10/17, Without Invitation, Japanese, Sendai
    Attached File's URL
  37. Impacts of Boron Concentration and Annealing Temperature on Electrical Characteristics of CoFeB/MgO/CoFeB Magnetic Tunnel Junction, H. Park, A. Teramoto, J.-i. Tsuchimoto, M. Hayashi, K. Hashimoto, R. Kuroda, and S. Sugawa, International Conference on Solid State Devices and Materials, 2018/09/09, Without Invitation, English, The Japan Society of Applied Physics, Tokyo
    Attached File's URL
  38. Improved Conductance Method for Interface Trap Density of ZrO2-Si interface, H. J. Lin, A. Teramoto, H. Watanabe, R. Kurota, K. Umezawa, K. Furukawa, and S. Sugawa, International Conference on Solid State Devices and Materials, 2018/09/09, Without Invitation, English, The Japan Society of Applied Physics, Tokyo
    Attached File's URL
  39. Impact of atomically flat SiO2/Si interface on improvement of MOS device performance, A. Teramoto, T. Suwa, R. Kuroda, and S. Sugawa, European Advanced Materials Congress, 2018/08/21, With Invitation, English, European Advanced Materials Congress, Stockholm
    Attached File's URL
  40. Reliability of MgO in Magnetic Tunnel Junctions Formed by MgO Sputtering and Mg Oxidation, A. Teramoto, K. Hashimoto, T. Suwa, J.-i. Tsuchimoto, M. Hayashi, H. Park, and S. Sugawa, IEEE International Reliability Physics Symposium, 2018/03/11, Without Invitation, English, IEEE, Burlingame
    Attached File's URL
  41. Corrosion Resistance of Yttrium Trifluoride (YF3) and Yttrium Oxyfluoride (YOF) used in Plasma Process Chamber, Y. Shiba, A. Teramoto, T. Goto, and Y. Kishi, AVS 64th International Symposium, 2017/10/29, Without Invitation, English, AVS, Tampa
    Attached File's URL
  42. Difference of the Hysteresis in Capacitance-voltage Characteristics of ALD-Al2O3 MIS Capacitors on Si and GaN Substrate, M. Saito, T. Suwa, A. Teramoto, T. Narita, and T. Kachi, AVS 64th International Symposium, 2017/10/29, Without Invitation, English, AVS, Tampa
    Attached File's URL
  43. Analysis of Random Telegraph Noise Behaviors toward Changes of Source Follower Transistor Operation Conditions using High Accuracy Array Test Circuit, Shinya Ichino, Takezo Mawaki, Akinobu Teramoto, Rihito Kuroda, Shunichi Wakashima, Shigetoshi Sugawa , IEICE Technical Committee on Silicon Device and Materials, 2017/10/26, Without Invitation, Japanese, Institute of Electronics, Information, and Communication Engineering, Sendai
    Attached File's URL
  44. Experimental Investigation of Localized Stress Induced Leakage Current Distribution and its Decrease by Atomically Flattening Process, Hyeonwoo Park, Rihito Kuroda, Tetsuya Goto, Tomoyuki Suwa, Akinobu Teramoto，Daiki Kimoto, Shigetoshi Sugawa, IEICE Technical Committee on Silicon Device and Materials, 2017/10/25, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  45. Statistical analysis of random telegraph noise in pixel source follower -- Impacts of transistor shape, time constants and number of states --, Rihito Kuroda, Akinobu Teramoto, Shinya Ichino, Takezo Mawaki, Shunichi Wakashima, Shigetoshi Sugawa, The Institute of Image Information and Television Engineers, 2017/09/25, Without Invitation, Japanese, The Institute of Image Information and Television Engineers, Tokyo
    Attached File's URL
  46. Monte-Carlo Simulation of Biomolecules' Fluid-Dynamics in Electrolyte Facing Nanowires Biosensor, C.-A. Lee, A. Teramoto, and H. Watanabe, 17th IEEE International Conference on Nanotechnology, 2017/07/25, Without Invitation, English, IEEE, Pittsburgh
    Attached File's URL
  47. Atomically flat interface for noise reduction in SOIMOSFETs, P. Gaubert, A. Kircher, H. Park, R. Kuroda, S. Sugawa, T. Goto, T. Suwa, and A. Teramoto, 24th International Conference on Noise and Fluctuations, 2017/06/20, Without Invitation, English, IEEE, Vilnius
    Attached File's URL
  48. Improvement in Electrical Characteristics of ALD Al2O3 Film by Microwave Excited Ar/O2 Plasma Treatment, M. Saito, T. Suwa, A. Teramoto, Y. Koda, R. Kuroda, Y. Shiba, S. Sugawa, J. Tsuchimoto, and M. Hayashi., 231st ECS Meeting, 2017/04/15, Without Invitation, English, The Electrochemical Society, New Orleans
    Attached File's URL
  49. Impact of SiO2/Si interface micro-roughness on SILC distribution and dielectric breakdown: A comparative study with atomically flattened devices, H. Park, T. Goto, R. Kuroda, A. Teramoto, T. Suwa, D. Kimoto, and S. Sugawa, IEEE International Reliability Physics Symposium, 2017/04/02, Without Invitation, English, IEEE, Monterey
    Attached File's URL
  50. High Quality Film and Interface Formation using Appropriate Reaction Species, Akinobu Teramoto, AVS 63rd International Symposium, 2016/11/09, With Invitation, Japanese, AVS, Nashville
    Attached File's URL
  51. Behavior of Random Telegraph Noise toward Bias Voltage Changing, Takezo Mawaki, Akinobu Teramoto, Rihito Kuroda, Shinya Ichino, Tetsuya Goto, Tomoyuki Suwa, Shigetoshi Sugawa, IEICE Technical Committee on Silicon Device and Materials, 2016/10/27, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  52. Formation technology of Flat Surface after Selective Epitaxial Growth on Ion-Implanted (100) Oriented Thin SOI Wafers, Kiichi Furukawa, Akinobu Teramoto, Rihito Kuroda, Tomoyuki Suwa, Keiichi Hashimoto, Shigetoshi Sugawa, Daisuke Suzuki, Yoichiro Chiba, Katsutoshi Ishii, Akira Shimizu, Kazuhide Hasebe, IEICE Technical Committee on Silicon Device and Materials, 2016/10/26, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  53. Effects of the oxidizing species on the interface of Al2O3 film by atomic layer deposition, Masaya Saito, Tomoyuki Suwa, Akinobu Teramoto, Rihito Kuroda, Yasumasa Koda, Hisaya Sugita, Hidekazu Ishii, Yoshinobu Shiba, Yasuyuki Shirai, Shigetoshi Sugawa, Marie Hayashi, Junichi Tsuchimoto, IEICE Technical Committee on Silicon Device and Materials, 2016/10/26, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  54. Low Frequency Noise of Accumulation-Mode n- and p-MOSFETs fabricated on (110) Crystallographic Silicon-Oriented Wafers, P. Gaubert, A. Teramoto, and S. Sugawa, International Conference on Solid State Devices and Materials, 2016/09/26, Without Invitation, English, The Japan Society of Applied Physics, Tsukuba
    Attached File's URL
  55. Formation Technology of Flat Surface after Selective-Epitaxial-Growth on Ion-implanted (100) Oriented Thin SOI Wafers, K. Furukawa, A. Teramoto, R. Kuroda, T. Suwa, K. Hashimoto, S. Sugawa, D. Suzuki, Y. Chiba, K. Ishii, A. Shimizu, and K. Hasebe, International Conference on Solid State Devices and Materials, 2016/09/26, Without Invitation, English, The Japan Soceity of Applied Physics, Tsukuba
    Attached File's URL
  56. Oxidizing Species Dependence of the Interface Reaction during Atomic-Layer-Deposition Process and Post-Deposition-Anneal, T. Suwa, A. Teramoto, Y. Koda, M. Saito, H. Sugita, M. Hayashi, J. Tsuchimoto, H. Ishii, Y. Shiba, Y. Shirai, and S. Sugawa, PRiME Meeting, 2016/09/01, Without Invitation, English, The Electrochemical Society The Electrochemical Society of Japan The Korean Electrochemical Society, Honolulu
    Attached File's URL
  57. Introduction of a High Selectivity Etching Process with Advanced SiNx Etch Gas in the Fabrication of FinFET Structures, T. Kojiri, T. Suwa, K. Hashimoto, A. Teramoto, R. Kuroda, and S. Sugawa, 229th ECS Meeting, 2016/05/31, Without Invitation, English, The Electrochemical Society, San Diego
    Attached File's URL
  58. Low Leakage Current Al2O3 Metal-Insulator-Metal Capacitors Formed By Atomic Layer Deposition at Optimized Process Temperature and O2 Post Deposition Annealing, Y. Koda, H. Sugita, T. Suwa, R. Kuroda, T. Goto, A. Teramoto, and S. Sugawa, 229th ECS Meeting, 2016/05/31, Without Invitation, English, The Electrochemical Society, San Diego
    Attached File's URL
  59. Random Telegraph Noise Measurement and Analysis based on Arrayed Test Circuit toward High S/N CMOS Image Sensors, R. Kuroda, A. Teramoto, and S. Sugawa, IEEE International Conference on Microelectronic Test Structures, 2016/05/28, With Invitation, English, IEEE, Yokohama
    Attached File's URL
  60. Study of process temperature of Al2O3 atomic layer deposition using high accuracy process gasses supply controller, Hisaya Sugita, Yasumasa Koda, Tomoyuki Suwa, Rihito Kuroda, Tetsuya Goto, Hidekazu Ishii, Satoru Yamashita, Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi , IEICE Technical Committee on Silicon Device and Materials, 2015/10/30, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  61. A Device Simulation Study on Tunneling and Diffusion Current Hybrid MOSFET, Kiichi Furukawa, Akinobu Teramoto, Rihito Kuroda, Tomoyuki Suwa, Keiichi Hashimoto, Takashi Kojiri, Shigetoshi Sugawa , IEICE Technical Committee on Silicon Device and Materials, 2015/10/30, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  62. Electrical Properties of MOSFETs Introducing Atomically Flat Gate Insulator/Silicon Interface , Tetsuya Goto, Rihito Kuroda, Tomoyuki Suwa, Akinobu Teramoto, Toshiki Obara, Daiki Kimoto, Shigetoshi Sugawa, Yutaka Kamata, Yuki Kumagai, Katsuhiko Shibusawa, IEICE Technical Committee on Silicon Device and Materials, 2015/10/29, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  63. Ultra-Low Temperature Flattening Technique of Silicon Surface Using Xe/H2 Plasma, Tomoyuki Suwa, Akinobu Teramoto, Tetsuya Goto, Masaki Hirayama, Shigetoshi Sugawa, Tadahiro Ohmi, IEICE Technical Committee on Silicon Device and Materials, 2015/10/29, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  64. Ferroelectric BiFeO3 Formation with Oxigen Radical Treatment, uminobu Imaizumi, Tetsuya Goto, Akinobu Teramoto, Shigetoshi Sugawa, IEICE Technical Committee on Silicon Device and Materials, 2015/10/29, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  65. Effect of Oxygen Impurity on Nitrogen Radicals in Post-Discharge Flows, Y. Shiba, A. Teramoto, T. Suwa, K. Watanabe, S. Nishimura, Y. Shirai, and S. Sugawa, 228th ECS Meeting, 2015/10/11, Without Invitation, English, The Electrochemical Society, Phoenix
    Attached File's URL
  66. 1/f Noise Performances and Noise Sources of Accumulation Mode Si(100) n-MOSFETs, P. Gaubert, A. Teramoto, and S. Sugawa, International Conference on Solid State Devices and Materials, 2015/09/29, Without Invitation, English, The Japan Society of Applied Physics, Sapporo
    Attached File's URL
  67. Proposal of Tunneling and Diffusion Current Hybrid MOSFET, K. Furukawa, R. Kuroda, T. Suwa, K. Hashimoto, A. Teramoto, and S. Sugawa, International Conference on Solid State Devices and Materials, 2015/09/29, Without Invitation, English, The Japan Society of Applied Physics, Sapporo
    Attached File's URL
  68. Drastic suppression of the 1/f noise in MOSFETs: Fundamental fluctuations of mobility rather than induced mobility fluctuations, P. Gaubert, A. Teramoto, S. Sugawa, International Conference on Noise and Fluctuations, 2015/06/02, With Invitation, English, IEEE, Xian
    Attached File's URL
  69. Effect of Hydrogen on Silicon Nitrides Formation by Microwave Excited Plasma Enhanced Chemical Vapor Deposition, A. Teramoto, Y. Nakao, T. Suwa, K. Hashimoto, T. Motoya, M. Hirayama, S. Sugawa, and T. Ohmi, 227th ECS Meeting, 2015/05/24, Without Invitation, English, The Electrochemical Society, Chicago
    Attached File's URL
  70. Ultra-Low Temperature Flattening Technique of Silicon Surface Using Xe/H2 Plasma, T. Suwa, A. Teramoto, T. Goto, M. Hirayama, S. Sugawa, and T. Ohmi, 227th ECS Meeting, 2015/05/24, Without Invitation, English, The Electrochemical Society, Chicago
    Attached File's URL
  71. Effect of Process Temperature of Al2O3 Atomic Layer Deposition Using Accurate Process Gasses Supply System, H. Sugita, Y. Koda, T. Suwa, R. Kuroda, T. Goto, H. Ishii, S. Yamashita, A. Teramoto, S. Sugawa, and T. Ohmi, 227th ECS Meeting, 2015/05/24, Without Invitation, English, The Electrochemical Society, Chicago
    Attached File's URL
  72. Surface Metal Cleaning of GaN Surface Based on Redox Potential of Cleaning Solution, K. Nagao, K. Nakamura, A. Teramoto, Y. Shirai, F. Imaizumi, T. Suwa, S. Sugawa, and T. Ohmi, 227th ECS Meeting, 2015/05/24, Without Invitation, English, The Electrochemical Society, Chicago
    Attached File's URL
  73. Crystallinity Improvement of Ferroelectric BiFeO3 Thin Film by Oxygen Radical Treatment, F. Imaizumi, T. Goto, A. Teramoto, S. Sugawa, and T. Ohmi, 227th ECS Meeting, 2015/05/24, Without Invitation, English, The Electrochemical Society, Chicago
    Attached File's URL
  74. Low Temperature Atomically Flattening of Si Surface of Shallow Trench Isolation Pattern, T. Goto, R. Kuroda, T. Suwa, A. Teramoto, N. Akagawa, D. Kimoto, S. Sugawa, T. Ohmi, Y. Kamata, Y. Kumagai, and K. Shibusawa, 227th ECS Meeting, 2015/05/24, Without Invitation, English, The Electrochemical Society, Chicago
    Attached File's URL
  75. Effect of random telegraph noise reduction by atomically flat gate insulator film/Si interface, Rihito Kuroda, Toshiki Obara, Tetsuya Goto, Naoya Akagawa, Daiki Kimoto, Akinobu Teramoto, Shigetoshi Sugawa, The Institute of Image Information and Television Engineers, 2015/05/08, Without Invitation, Japanese, The Institute of Image Information and Television Engineers, Tokyo
    Attached File's URL
  76. Analysis of trap density causing random telegraph noise in MOSFETs, Toshiki Obara, Akinobu Teramoto, Rihito Kuroda, Akihiro Yonezawa, Tetsuya Goto, Tomoyuki Suwa, Shigetoshi Sugawa, Tadahiro Ohmi , IEICE Technical Committee on Silicon Device and Materials, 2014/10/17, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  77. Study on compositional transition layers at Si3N4/Si interface formed by radical nitridation, Tomoyuki Suwa, Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi, IEICE Technical Committee on Silicon Device and Materials, 2014/10/17, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  78. Introduction of Atomically Flattening of Silicon Surface in Shallow Trench Isolation Process Technology, Tetsuya Goto, Rihito Kuroda, Naoya Akagawa, Tomoyuki Suwa, Akinobu Teramoto, Xiang Li, Toshiki Obara, Daiki Kimoto, Shigetoshi Sugawa, Tadahiro Ohmi, Yuki Kumagai, Yutaka Kamata, Katsuhiko Shibusawa, IEICE Technical Committee on Silicon Device and Materials, 2014/10/16, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  79. Atomically Flattening of Si Surface of SOI and Isolation-patterned Wafers, T. Goto, R. Kuroda, N. Akagawa, T. Suwa, A. Teramoto, X. Li, S. Sugawa, T. Ohmi, Y. Kumagai, Y. Kamata, and K. Sibusawa, International Conference on Solid State Devices and Materials, 2014/09/08, Without Invitation, Japanese, The Japan Society of Applied Physics, Tsukuba
    Attached File's URL
  80. Demonstrating Individual Leakage Path from Random Telegraph Signal of Stress Induced Leakage Current, A. Teramoto, T. Inatsuka, T. Obara, N. Akagawa, R. Kuroda, S. Sugawa, and T. Ohmi, IEEE International Reliability Physics Symposium, 2014/06/01, Without Invitation, English, IEEE, Waikoloa
    Attached File's URL
  81. Analyzing Correlation between Multiple Traps in RTN Characteristics, T. Obara, A. Teramoto, A. Yonezawa, R. Kuroda, S. Sugawa, and T. Ohmi, IEEE International Reliability Physics Symposium, 2014/06/01, Without Invitation, English, IEEE, Waikoloa
    Attached File's URL
  82. A Novel Analysis of Oxide Breakdown based on Dynamic Observation using Ultra-High Speed Video Capturing Up to 10,000,000 Frames Per Second, R. Kuroda, F. Shao, D. Kimoto, K. Furukawa, H. Sugo, T. Takeda, K. Miyauchi, Y. Tochigi, A. Teramoto, and S. Sugawa, IEEE International Reliability Physics Symposium, 2014/06/01, Without Invitation, English, IEEE, Waikoloa
    Attached File's URL
  83. Effect of Composition Ratio on Erbium Silicide Work Function on Different Morphology of Si(100) Surface Changed by Alkaline Etching, H. Tanaka, T. Suwa, A. Teramoto, T. Motoya, S. Sugawa, and T. Ohmi, 225th ECS Meeting, 2014/04/01, Without Invitation, English, The Electrochemical Society, Orland
    Attached File's URL
  84. Flattening Technique of (551) Silicon Surface Using Xe/H2 Plasma, T. Suwa, A. Teramoto, S. Sugawa, and T. Ohmi, 225th ECS Meeting, 2014/04/01, Without Invitation, English, The Electrochemical Society, Orland
    Attached File's URL
  85. High Selectivity in Dry Etching of Silicon Nitride over Si Using a Novel Hydrofluorocarbon Etch Gas in a Microwave Excited Plasma for FinFET, Y. Nakao, T. Matsuo, A. Teramoto, H. Utsumi, K. Hashimoto, R. Kuroda, Y. Shirai, S. Sugawa, and T. Ohmi, 225th ECS Meeting, 2014/04/01, Without Invitation, English, The Electrochemical Society, Orland
    Attached File's URL
  86. A statistical evaluation of effective time constants of random telegraph noise with various operation timings of in-pixel source follower transistors, A. Yonezawa, R. Kuroda, A. Teramoto, T. Obara, and S. Sugawa, SPIE-IS&T Electronic Imaging,, 2014/02/02, Without Invitation, English, The international society for optics and photonics, San Francisco
    Attached File's URL
  87. Schottky Barrier Height Between Erbium Silicide and Various Morphology of Si(100) Surface Changed By Alkaline Etching, H. Tanaka, A. Teramoto, S. Sugawa, and T. Ohmi, 224th ECS Meeting, 2013/10/27, Without Invitation, English, The Electrochemical Society, San Francisco
    Attached File's URL
  88. High Performance Normally-Off GaN Mosfets On Si Substrates, H. Kambayshi, N. Ikeda, T. Nomura, H. Ueda, Y. Nirozumi, K. Harada, K. Hasebe, A. Teramoto, S. Sugawa, and T. Ohmi, 224th ECS Meeting, 2013/10/27, Without Invitation, English, The Electrochemical Society, San Francisco
    Attached File's URL
  89. Study of Time Constant Analysis in Random Telegraph Noise at the Subthreshold Voltage Region, Akihiro Yonezawa, Akinobu Teramoto, Toshiki Obara, Rihito Kuroda, Shigetoshi Sugawa, Tadahiro Ohmi , IEICE Technical Committee on Silicon Device and Materials, 2013/10/18, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  90. A device structure design of multi-gate MOSFETs based on carrier mobility characteristics of atomically flattened Si surface, Rihito Kuroda, Yukihisa Nakao, Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi , IEICE Technical Committee on Silicon Device and Materials, 2013/10/17, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  91. Wet cleaning process for GaN surface at room temperature, Y. Tsuji, T. Katsuyama, A. Teramoto, Y. Shirai, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2013/09/24, Without Invitation, English, The Japan Society of Apllied Physics, Fukuoka
    Attached File's URL
  92. Detection of oxidation-induced compressive stress in Si(100) substrate near the SiO2/Si interface with atomic-scale resolution, T. Suwa, K. Nagata, H. Nohira, K. Nakajima, A. Teramoto, A. Ogura, K. Kimura, T. Muro, T. Kinoshita, S. Sugawa, T. Hattori, and T. Ohmi, International Conference on Solid State Devices and Materials, 2013/09/24, Without Invitation, English, The Japan Society of Applied Physics, Fukuoka
    Attached File's URL
  93. Extraction of Time Constants Ratio over Nine Orders of Magnitude for Understanding Random Telegraph Noise in MOSFETs, T. Obara, A. Yonezawa, A. Teramoto, R. Kuroda, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2013/09/24, Without Invitation, English, The Japan Society of Applied Physics, Fukuoka
    Attached File's URL
  94. Carrier Mobility on (100), (110), and (551) Oriented Atomically Flattened Si Surfaces for Multi-gate MOSFETs Device Design, R. Kuroda, Y. Nakao, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2013/09/24, Without Invitation, English, The Japan Society of Applied Physics, Fukuoka
    Attached File's URL
  95. Impact of Injected Carrier Types to Stress Induced Leakage Current Using Substrate Hot Carrier Injection Stress, H. W. Park, A. Teramoto, T. Inatsuka, R. Kuroda, S. Sugawa, and T. Ohmi, Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices, 2013/06/26, Without Invitation, English, The Institute of Electronics, Information and Communication Engineers The Institute of Electronics and Information Engineers of Korea, Seoul
    Attached File's URL
  96. Stress induced leakage current generated by hot-hole injection, A. Teramoto, H. W. Park, T. Inatsuka, R. Kuroda, S. Sugawa, and T. Ohmi, CEZAMAT, 18th Conference of "Insulating Films on Semiconductors", 2013/06/25, Without Invitation, English, Cracow
    Attached File's URL
  97. Angle-Resolved Photoelectron Spectroscopy Study on Interfacial Transition Layer and Oxidation-Induced Residual Stress in Si(100) Substarte Near the Interface, T. Suwa, A. Teramoto, K. Nagata, A. Ogura, T. Muro, T. Kinoshita, T. Ohmi, and T. Hattori, CEZAMAT, 18th Conference of "Insulating Films on Semiconductors", 2013/06/25, Without Invitation, English, Cracow
    Attached File's URL
  98. 1/f noise of accumulation mode p- and n-MOSFETs, P. Gaubert, A. Teramoto, S. Sugawa, and T. Ohmi, 22nd International Conference on Noise and Fluctuations, 2013/06/24, Without Invitation, English, IEEE, Montpellier
    Attached File's URL
  99. High-Speed and Highly Accurate Evaluation of Electrical Characteristics in MOSFETs, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on IC Design and Technology, 2013/05/29, With Invitation, English, IEEE, Pavia
    Attached File's URL
  100. XPS analysis of the terminated-bonding states at GaN surface after chemical and plasma treatments, Y. Tsuji, T. Watanabe, K. Nakamura, I. Makabe, K. Nakata, T. Katsuyama, A. Teramoto, Y. Shirai, S. Sugawa, and T. Ohmi, The 40th International Symposium on Compound Semiconductors, 2013/05/19, Without Invitation, English, Kobe
    Attached File's URL
  101. Effect of Composition Rate on Erbium Silicide Work Function on Different Silicon Surface Orientation, H. Tanaka, A. Teramoto, T. Motoya, S. Sugawa, and T. Ohmi, 223rd ECS Meeting, 2013/05/15, Without Invitation, English, The Electrochemical Society, Toronto
    Attached File's URL
  102. The study of time constant analysis in random telegraph noise at the sub-threshold voltage region, A. Yonezawa, A. Teramoto, T. Obara, R. Kuroda, S. Sugawa, and T. Ohmi, IEEE International Reliability Physics Symposium, 2013/04/14, Without Invitation, English, IEEE, Monterey
    Attached File's URL
  103. Demonstrating Distribution of SILC Values at Individual Leakage Spots , T. Inatsuka, R. Kuroda, A. Teramoto, Y. Kumagai, S. Sugawa, and T. Ohmi, IEEE International Reliability Physics Symposium, 2013/04/14, Without Invitation, English, IEEE, Monterey
    Attached File's URL
  104. High Integrity SiO2/Al2O3 Gate Stack for Normally-off GaN MOSFET, H. Kambayashi, T. Nomura, H. Ueda, K. Harada, Y. Morozumi, K. Hasebe, A. Teramoto, S. Sugawa, and T. Ohmi, MRS Spring Meeting, 2013/04/01, Without Invitation, English, Material research society, San Francisco
    Attached File's URL
  105. Detection of crystalline like structures in SiO2 thin films formed using oxygen molecules/radicals, K. Nagata, T. Yamaguchi, A. Ogura, T. Koganezawa, I. Hirosawa, T. Suwa, A. Teramoto, T. Hattori, and T. Ohmi, The 6th International Symposium on Advanced Science and Technology of Silicon Materials, 2012/11/19, Without Invitation, Japanese, Japan Society for the Promotion of Science, Kona
    Attached File's URL
  106. Accumulation-mode SOI CMOS Performance on Very Flat Si(551) Syrface, Akinobu Teramoto, BIT's 2nd Annual World Congress of Nanosciene and Nanotechnology, 2012/10/28, With Invitation, English, BIT, Qindao
    Attached File's URL
  107. Low Temperature PECVD of High Quality Silicon Nitride for Gate Spacer, Yukihisa Nakao, Akinobu Teramoto, Rihito Kuroda, Tomoyuki Suwa, Hiroaki Tanaka, Shigetoshi Sugawa, Tadahiro Ohmi , IEICE Technical Committee on Silicon Device and Materials, 2012/10/26, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  108. Noise Performance of Accumulation MOSFETs, P. Gaubert, A. Teramoto, S. Sugawa, and T. Ohmi, IEICE Technical Committee on Silicon Device and Materials, 2012/10/26, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  109. Evaluation of crystalline phase in SiO2 thin film using grazing incidence X-ray diffraction, Kohki Nagata, Takuya Yamaguchi, Atsushi Ogura, Tomoyuki Koganezawa, Ichiro Hirosawa, Tomoyuki Suwa, Akinobu Teramoto, Takeo Hattori, Tadahiro Ohmi , IEICE Technical Committee on Silicon Device and Materials, 2012/10/25, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  110. Chemical structures of compositional transition layer at SiO2/Si(100) interface, Tomoyuki Suwa, Akinobu Teramoto, Takayuki Muro, Toyohiko Kinoshita, Shigetoshi Sugawa, Takeo Hattori, Tadahiro Ohmi, IEICE Technical Committee on Silicon Device and Materials, 2012/10/25, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  111. Effect of Erbium Silicide Crystallinity for Low Barrier Contact Between Erbium Silicide and n-type Silicon, H. Tanaka, A. Teramoto, S. Sugawa, and T. Ohmi, 222nd ECS Meeting, 2012/10/10, Without Invitation, English, The Electrochemical Society, Honolulu
    Attached File's URL
  112. Comprehensive Study on Chemical Structures of Compositional Transition Layer at SiO2/Si(100) Interface, T. Suwa, A. Teramoto, T. Muro, T. Kinoshita, S. Sugawa, T. Hattori, and T. Ohmi, 222nd ECS Meeting, 2012/10/09, Without Invitation, English, The Electrochemical Society, Honolulu
    Attached File's URL
  113. Dependence of chemical structures of transition layer at SiO2/Si(100) interface on oxidation temperature, annealing in forming gas, and oxidizing species, T. Suwa, A. Teramoto, T. Muro, T. Kinoshita, S. Sugawa, T. Hattori, and T. Ohmi, International Conference on Solid State Devices and Materials, 2012/09/25, Without Invitation, English, The Japan Society of Applied Physics, Kyoto
    Attached File's URL
  114. High Quality SiO2/Al2O3 Gate Stack for GaN MOSFET, H. Kambayashi, T. Nomura, H. Ueda, K. Harada, Y. Morozumi, K. Hasebe, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2012/09/25, Without Invitation, English, The Japan Society of Applied Physics, Kyoto
    Attached File's URL
  115. Low frequency noise assessment of accumulation Si p-MOSFETs, P. Gaubert, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2012/09/25, Without Invitation, English, The Japan Society of Applied Physics, Kyoto
    Attached File's URL
  116. The role of the temperature on the scattering mechanisms limiting the electron mobility in metal-oxide-semiconductor field-effect-transistors fabricated on (110) silicon-oriented wafers, P. Gaubert, A. Teramoto, S. Sugawa, and T. Ohmi, The European Solid-State Device Research Conference, 2012/09/17, Without Invitation, English, CEZAMAT, Bordeaux
    Attached File's URL
  117. 100nm-gate-length Normally-off Accumulation-Mode FD-SOI MOSFETs for Low Noise Analog/RF Circuits, H. Utsumi, R. Kasahara, Y. Nakao, R. Kuroda, A. Teramoto, S. Sugawa, and T. Ohmi, Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices, 2012/06/27, Without Invitation, English, The Institute of Electronics, Information and Communication Engineers The Institute of Electronics and Information Engineers of Korea, Naha
    Attached File's URL
  118. A Novel Chemically, Thermally and Electrically Robust Cu Interconnect Structure with an Organic Non-porous Ultralow-k Dielectric Fluorocarbon (k=2.2), X. Gu, A. Teramoto, R. Kuroda, Y. Tomita, T. Nemoto, S. Kuroki, S. Sugawa, and T. Ohmi, Symposium on VLSI Technology, 2012/06/13, Without Invitation, English, IEEE The Japan Society of Applied Physics, Honolulu
    Attached File's URL
  119. Low Work Function between Erbium Silicide and n-type Silicon Control by Cap Film Stress, H. Tanaka, A. Teramoto, S. Sugawa, and T. Ohmi, 221st ECS Meeting, 2012/05/06, Without Invitation, English, The Electrochemical Society, Seattle
    Attached File's URL
  120. Changes in SiO2/Si(100) Interface Structure Induced by Forming Gas Annealing, T. Suwa, Y. Kumagai, A. Teramoto, T. Muro, T. Kinoshita, S. Sugawa, T. Hattori, and T. Ohmi, 221st ECS Meeting, 2012/05/06, Without Invitation, English, The Electrochemical Society, Seattle
    Attached File's URL
  121. Electrical Properties of Silicon Nitride Using High Density and Low Plasma Damage PECVD Formed at 400[ordinal indicator, masculine]C, Y. Nakao, R. Kuroda, H. Tanaka, A. Teramoto, S. Sugawa, and T. Ohmi, 221st ECS Meeting, 2012/05/06, Without Invitation, English, The Electrochemical Society, Seattle
    Attached File's URL
  122. Statistical analysis of Random Telegraph Noise reduction effect by separating channel from the interface, A. Yonezawa, A. Teramoto, R. Kuroda, H. Suzuki, S. Sugawa, and T. Ohmi, IEEE International Reliability Physics Symposium, 2012/04/15, Without Invitation, English, IEEE, Anaheim
    Attached File's URL
  123. A test circuit for extremely low gate leakage current measurement of 10 aA for 80,000 MOSFETs in 80 s, Y. Kumagai, T. Inatsuka, R. Kuroda, A. Teramoto, T. Suwa, S. Sugawa, and T. Ohmi, IEEE International Conference on Microelectronic Test Structures, 2012/03/19, Without Invitation, English, IEEE, Anaheim
    Attached File's URL
  124. A statistical evaluation of low frequency noise of in-pixel source follower-equivalent transistors with various channel types and body bias, R. Kuroda, A. Yonezawa, A. Teramoto, T. L. Li, Y. Tochigi, and S. Sugawa, SPIE, Sensors, Cameras, and Systems for Industrial and Scientific Applications XIV, 2012/02/19, Without Invitation, English, The international society for optics and photonics, Burlingame
    Attached File's URL
  125. Development of Direct-polish Process of CMP and Post-CMP Clean for Next Generation Advanced Cu Interconnects, X. Gu, Y. Tomita, T. Nemoto, A. Teramoto, R. D. Mateo, T. Sakai, R. Kuroda, S. Sugawa, and T. Ohmi, International Conference on Planarization/CMP Technology, 2011/11/09, Without Invitation, English, CMPUGM JJCNS, Seoul
    Attached File's URL
  126. Clear Difference between the Chemical Structure of SiO2/Si Interfaces Formed Using Oxygen Radicals and Oxygen Molecules, Tomoyuki Suwa, Yuki Kumagai, Akinobu Teramoto, Toyohiko Kinoshita, Takayuki Muro, Takeo Hattori, Tadahiro Ohmi , IEICE Technical Committee on Silicon Device and Materials, 2011/10/21, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  127. On the relation between interface flattening effect and insulator breakdown characteristic of radical reaction based insulator formation technology, Rihito Kuroda, Akinobu Teramoto, Xiang Li, Tomoyuki Suwa, Shigetoshi Sugawa, Tadahiro Ohmi, IEICE Technical Committee on Silicon Device and Materials, 2011/10/20, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  128. Statistical Evaluations of Generation and Recovery Characteristics of Anomalous Stress Induced Leakage Current, Takuya Inatsuka, Yuki Kumagai, Rihito Kuroda, Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi , IEICE Technical Committee on Silicon Device and Materials, 2011/10/20, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  129. Reduction of Random Telegraph Noise with Broad Channel MOSFET, Hiroyoshi Suzuki, Rihito Kuroda, Akinobu Teramoto, Akihiro Yonezawa, Hiroaki Matsuoka, Taiki Nakazawa, Kenichi Abe, Shigetoshi Sugawa, Tadahiro Ohmi, IEICE Technical Committee on Silicon Device and Materials, 2011/10/20, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  130. Gate SiO2 Film Integrity on Ultra-Pure Argon Anneal (100) Silicon Surface, A. Teramoto, X. Li, R. Kuroda, T. Suwa, S. Sugawa, and T. Ohmi, 220th ECS Meeting, 2011/10/09, Without Invitation, English, The Electrochemical Society, Boston
    Attached File's URL
  131. Different Properties of Erbium Silicides on Si(100) and Si(551) Orientation Surfaces, H. Tanaka, A. Teramoto, R. Kuroda, Y. Nakao, T. Suwa, S. Sugawa, and T. Ohmi, 220th ECS Meeting, 2011/10/09, Without Invitation, English, The Electrochemical Society, Boston
    Attached File's URL
  132. High Power Normally-Off GaN MOSFET on Si Substrate, H. Kambayashi, Y. Satoh, T. Kokawa, N. Ikeda, T. Nomura, S. Kato, A. Teramoto, S. Sugawa, and T. Ohmi, 220th ECS Meeting, 2011/10/09, With Invitation, English, The Electrochemical Society, Boston
    Attached File's URL
  133. Impact of Random Telegraph Noise Reduction with Buried Channel MOSFET, H. Suzuki, R. Kuroda, A. Teramoto, A. Yonezawa, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2011/09/28, Without Invitation, English, The Japan Society of Applied Physics, Nagoya
    Attached File's URL
  134. Clear Difference between Chemical Structure of SiO2/Si Interface Formed Using Oxygen Radicals and That Formed Using Oxygen Molecules, T. Suwa, Y. Kumagai, A. Teramoto, T. Muro, T. Kinoshita, S. Sugawa, T. Hattori, and T. Ohmi, International Conference on Solid State Devices and Materials, 2011/09/28, Without Invitation, English, The Japan Society of Applied Physics, Nagoya
    Attached File's URL
  135. High Quality and Low Thermal Budget Silicon Nitride Deposition Using PECVD for Gate Spacer, Silicide Block and Contact Etch Stopper, Y. Nakao, R. Kuroda, H. Tanaka, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2011/09/28, Without Invitation, English, The Japan Society of Applied Physics, Nagoya
    Attached File's URL
  136. On the Si Surface Flattening Effect and Gate Insulator Breakdown Characteristic of Radical Reaction Based Ins u lator Formation Technology, R. Kuroda, A. Teramoto, X. Li, T. Suwa, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2011/09/28, Without Invitation, English, The Japan Society of Applied Physics, Nagoya
    Attached File's URL
  137. High Integrity SiO2 Gate Insulator Formed by Microwave-Excited PECVD for AlGaN/GaN Hybrid MOS-HFET on Si Substrate, H. Kambayashi, T. Nomura, S. Kato, H. Ueda, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2011/09/28, Without Invitation, English, The Japan Society of Applied Physics, Nagoya
    Attached File's URL
  138. Recovery Characteristic of Anomalous Stress Induced Leakage Current of 5.6nm Oxide Films, T. Inatsuka, Y. Kumagai, R. Kuroda, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2011/09/28, Without Invitation, English, 応用物理学会, 名古屋
    Attached File's URL
  139. Evidence of the universality of the hole mobility in accumulation MOS transistors, P. Gaubert, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2011/09/28, Without Invitation, English, The Japan Society of Applied Physics, Nagoya
    Attached File's URL
  140. Process Optimization for Improved Compatibility with Organic Non-porous Low-k Dielectric Fluorocarbon on advanced Cu Interconnects, X. Gu, Y. Tomita, T. Nemoto, K. Miyatani, A. Saito, Y. Kobayashi, A. Teramoto, R. Kuroda, S.-I. Kuroki, T. Nozawa, T. Matsuoka, S. Sugawa, and T. Ohmi, Advanced Metallization Conference, 2011/09/12, Without Invitation, English, The Japan Society of Applied Physics, Tokyo
    Attached File's URL
  141. Clear Difference between the Chemical Structure of SiO2/Si Interfaces Formed Using Oxygen Radicals and Oxygen Molecules, T. Suwa, A. Teramoto, T. Ohmi, and T. Hattori, Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices, 2011/06/29, Without Invitation, English, The Institute of Electronics, Information and Communication Engineers The Institute of Electronics and Information Engineers, Daejeon
    Attached File's URL
  142. Structural analysis of atomically flat SiO2/Si interface using CTR scattering around the 110 forbidden reflection, K. Nagata, M. Hattori, D. Kosemura, M. Takei, A. Ogura, T. Koganezawa, I. Hirosawa, T. Suwa, A. Teramoto, T. Hattori, and T. Ohmi, E-MRS ICAM IUMRS 2011 Spring Meeting , 2011/05/09, Without Invitation, English, International Union of Materials Research Society, Nice
    Attached File's URL
  143. Cu Damascene Interconnects with an Organic Low-k Fluorocarbon Dielectric Deposited by Microwave Excited Plasma Enhanced CVD, X. Gu, T. Nemoto, Y. Tomita, A. Shirotori, R. Duyos-Mateo, K. Miyatani, A. Saito, Y. Kobayashi, A. Teramoto, S.-I. Kuroki, T. Nozawa, T. Matsuoka, S. Sugawa, and T. Ohmi, IEEE International Interconnect Technology Conference, 2011/05/09, Without Invitation, English, IEEE, Dresden
    Attached File's URL
  144. Pr3Si6N11/Si3N4 Stacked High-k Gate Dielectrics with High Quality Ultrathin Si3N4 Interfacial Layers, H. Wakamatsu, A. Teramoto, and T. Ohmi, 219th ECS Meeting, 2011/05/01, Without Invitation, English, The Electrochemical Society, Montreal
    Attached File's URL
  145. Clear Difference between the Chemical Structure of SiO2/Si Interface Formed Using Oxygen Radicals and that Formed Using Oxygen Molecules, T. Suwa, Y. Kumagai, A. Teramoto, T. Muro, T. Kinoshita, T. Hattori, and T. Ohmi, 219th ECS Meeting, 2011/05/01, Without Invitation, English, The Electrochemical Society, Montreal
    Attached File's URL
  146. Understanding of Traps Causing Random Telegraph Noise Based on Experimentally Extracted Time Constants and Amplitude, K. Abe, A. Teramoto, S. Sugawa, and T. Ohmi, IEEE International Reliability Physics Symposium, 2011/04/10, Without Invitation, English, IEEE, Monterey
    Attached File's URL
  147. Observation of Single Atomic Steps on an Ultra-Flat Si (100) Surface by a Differential Interference Contrast Microscope, Y.-G. Kim, S.-i. Kobayashi, R. Wen, K. Yasuda, T. Suwa, R. Kuroda, X. Li, A. Teramoto, T. Ohmi, and K. Itaya, he 2011 WPI-AIMR Annual Workshop, 2011/02/21, Without Invitation, English, Tohoku University, Sendai
    Attached File's URL
  148. High reliable SiO2 Films on Atomically Flat Silicon Surface Formed by Low Temperature Pure Ar Annealing, X. Li, R. Kuroda, T. Suwa, A. Teramoto, S. Sugawa, and T. Ohmi, International Workshop on Dielectric Thin Film For Future Electron devices, 2011/01/20, Without Invitation, English, The Japan Society of Applied Physics, Tokyo
    Attached File's URL
  149. Ultra-low Series Resistance W/ErSi2/n+-Si and W/Pd2Si/p+-Si S/D Electrodes for Advanced CMOS Platform, R. Kuroda, H. Tanaka, Y. Nakao, A. Teramoto, N. Miyamoto, S. Sugawa, and T. Ohmi, International Electron Device Meeting, 2010/12/06, Without Invitation, English, IEEE, San Francisco
    Attached File's URL
  150. Statistical Evaluation of Random Telegraph Signal in MOFET, Akinobu Teramoto, Ken-ichi Abe, Shigetoshi Sugawa, and Tadahiro Ohmi, IEICE Technical Committee on Silicon Device and Materials, 2010/11/11, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  151. Statistical Evaluation for Trap Energy Level of RTS Characteristics, TERAMOTO Akinobu, 2010/10/22, With Invitation, Japanese, The Japan Society of Applied Physics, Tokyo
    Attached File's URL
  152. Strain evaluation in Si at atomically flat SiO2/Si interface, Maki Hattori, Daisuke Kosemura, Munehisa Takei, Kohki Nagata, Hiroaki Akamatsu, Motohiro Tomita, Yuuki Mizukami, Yuuki Hashiguchi, Takuya Yamaguchi, Atsushi Ogura, Tomoyuki Suwa, Akinobu Teramoto, Takeo Hattori, Tadahiro Ohmi, Tomoyuki Koganezawa , IEICE Technical Committee on Silicon Device and Materials, 2010/10/22, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  153. Crystallographic orientation dependence of compositional transition and valence band offset at SiO2/Si interface formed using oxygen radicals, Tomoyuki Suwa, Yuki Kumagai, Akinobu Teramoto, Tadahiro Ohmi, Takeo Hattori, Toyohiko Kinoshita, Takayuki Muro , IEICE Technical Committee on Silicon Device and Materials, 2010/10/22, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  154. Integration of Novel Non-porous Low-k Dielectric Fluorocarbon into Advanced Cu Interconnects, Xun Gu, Takenao Nemoto, Yugo Tomita, Akinobu Teramoto, Shin-Ichiro Kuroki, Shigetoshi Sugawa, Tadahiro Ohmi, IEICE Technical Committee on Silicon Device and Materials, 2010/10/22, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  155. Low Resistance Source/Drain Contacts with Low Schottky Barrier for High Performance Transistors, Hiroaki Tanaka, Rihito Kuroda, Yukihisa Nakao, Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi , IEICE Technical Committee on Silicon Device and Materials, 2010/10/21, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  156. Tribological Effects of Brush Scrubbing in Post-CMP Cleaning on the Electrical　Characteristics in the Novel Non-porous Low-k Dielectric on Cu Interconnects, X. Gu, T. Nemoto, Y. Tomita, A. Teramoto, S. Sugawa, and T. Ohmi, Advanced Metallization Conference, 2010/10/19, Without Invitation, English, The Japan Society of Applied Physics, Tokyo
    Attached File's URL
  157. Electrical Characteristics of Novel Non-porous Low-k Dielectric Fluorocarbon on Cu Interconnects for 22nm Generation and Beyond, X. Gu, T. Nemoto, Y. Tomita, K. Miyatani, A. Saito, Y. Kobayashi, A. Teramoto, S.-I. Kuroki, T. Nozawa, T. Matsuoka, S. Sugawa, and T. Ohmi, Advanced Metallization Conference, 2010/10/19, Without Invitation, English, The Japan Society of Applied Physics, Tokyo
    Attached File's URL
  158. Evaluation of Narrow Gap Filling Ability in Shallow Trench Isolation by Organosiloxane Sol-Gel Precursor, K. Watanuki, A. Inokuchi, A. Banba, N. Manabe, H. Suzuki, T. Koike, T. Adachi, T. Goto, A. Teramoto, Y. Shirai, S. Sugawa, and T. Ohmi, 218th ECS Meeting, 2010/10/10, Without Invitation, English, The Electrochemical Society, Las Vegas
    Attached File's URL
  159. Techniques for high accurate and fast measurement of RTN and fabrication process conditions having a strong influence on RTN characteristics, K. Abe, A. Teramoto, S. Sugawa, and T. Ohmi, The Institute of Image Information and Television Engineers, 2010/09/27, Without Invitation, Japanese, The Institute of Image Information and Television Engineers, Tokyo
    Attached File's URL
  160. Large Scale Test Circuits for Systematic Evaluation of Variability and Noise of MOSFETs’ Electrical Characteristics, Y. Kumagai, K. Abe, T. Fujisawa, S. Watabe, R. Kuroda, N. Miyamoto, T. Suwa, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2010/09/22, Without Invitation, English, The Japan Society of Applied Physics, Tokyo
    Attached File's URL
  161. Drastic reduction of the low frequency noise in Si(100) p-MOSFETs , P. Gaubert, A. Teramoto, R. Kuroda, Y. Nakao, H. Tanaka, and T. Ohmi, International Conference on Solid State Devices and Materials, 2010/09/22, Without Invitation, English, The Japan Society of Applied Physics, Tokyo
    Attached File's URL
  162. Impact of the Channel Direction Dependent Low Field Hole Mobility on Si(100), R. Kuroda, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2010/09/22, Without Invitation, English, The Japan Society of Applied Physics, Tokyo
    Attached File's URL
  163. Strain field under SiO2/Si interface revealed by multiple X-ray diffraction phenomenon, W. Yashiro, Y. Yoda, T. Aratani, A. Teramoto, T. Hattori, and K. Miki, The Eleventh International Conference on Surface X-ray and Neutron Scattering, 2010/07/13, Without Invitation, English, DESY, Evanston
    Attached File's URL
  164. Statistical evaluation for trap energy level of RTS characteristics, A. Teramoto, T. Fujisawa, K. Abe, S. Sugawa, and T. Ohmi, Symposium on VLSI Technology, 2010/06/15, Without Invitation, English, IEEE The Japan Society of Applied Physics, Honolulu
    Attached File's URL
  165. Statistical evaluation of dynamic junction leakage current fluctuation using a simple arrayed capacitors circuit, K. Abe, T. Fujisawa, H. Suzuki, S. Watabe, R. Kuroda, S. Sugawa, A. Teramoto, and T. Ohmi, IEEE International Reliability Physics Symposium, 2010/05/02, Without Invitation, English, IEEE, Anaheim
    Attached File's URL
  166. Impact of Work Function Optimized S/D Silicide Contact for High Current Drivability CMOS, Y. Nakao, R. Kuroda, H. Tanaka, T. Isogai, A. Teramoto, S. Sugawa, and T. Ohmi, 217th ECS Meeting, 2010/04/26, Without Invitation, English, The Electrochemical Society, Vancouver
    Attached File's URL
  167. Atomically Flattening Technology at 850 ºC for Si(100) Surface, X. Li, A. Teramoto, T. Suwa, R. Kuroda, S. Sugawa, and T. Ohmi, 217th ECS Meeting, 2010/04/25, Without Invitation, English, The Electrochemical Society, Vancouver
    Attached File's URL
  168. A Test Structure for Statistical Evaluation of pn Junction Leakage Current Based on CMOS Image SensorTechnology, K. Abe, T. Fujisawa, H. Suzuki, S. Watabe, R. Kuroda, S. Sugawa, A. Teramoto, and T. Ohmi, IEEE International Conference on Microelectronic Test Structures, Hiroshima, 2010/03/22, Without Invitation, English, IEEE, Hiroshima
    Attached File's URL
  169. Qualification of Dynamic Pressure Distribution on Wafer by Pressure Sensing Sheet during Polishing, X. Gu, T. Nemoto, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Planarization/CMP Technology, 2009/11/19, Without Invitation, English, SEMI, Fukuoka
    Attached File's URL
  170. The Study of Electrical and Structual Properties of SiO2 Film Containing Metal oxide using Organosiloxane-based Silica Precursor, K. Watanuki, A. Inokuchi, A. Bamba, H. Suzuki, T. Koike, T. Adachi, A. Teramoto, Y. Shirai, S. Sugawa, and T. Ohmi, AVS 56th International Symposium & Exhibition, 2009/11/08, Without Invitation, English, AVS, San Jose
    Attached File's URL
  171. Study on compositional transition layers at SiO2/Si interface formed by radical oxidation, T. Suwa, A. Teramoto, T. Ohmi, T. Hattori, Y. KatoT. Kinoshita, T. Muro,, IEICE Technical Committee on Silicon Device and Materials, 2009/10/22, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  172. Statistical Analysis of Random Telegraph Signal Using a Large-Scale Array TEG with a Long Time Measurement, T. Fujisawa, K. Abe, S. Watabe, N. Miyamoto, A. Teramoto, S. Sugawa, T. Ohmi, IEICE Technical Committee on Silicon Device and Materials, 2009/10/22, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  173. Low Contact Resistance with Low Silicide/p+-Silicon Schottky Barrier for High Performance p-channel MOSFETs , H. Tanaka, T. Isogai, T. Goto, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2009/10/07, Without Invitation, English, The Japan Society of Applied Physics, Sendai
    Attached File's URL
  174. Impact of Very Low Series Resistance due to Raised Metal S/D Structure with Very Low Contact Resistance Silicide for sub-100-nm nMOSFET, R. Kuroda, T. Isogai, H. Tanaka, Y. Nakao, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2009/10/07, Without Invitation, English, The Japan Society of Applied Physics, Sendai
    Attached File's URL
  175. Suppression of Vth Variability for n-MOSFET in Dual Oxide Formation Process, Y. Kamata, K. Shibusawa, K. Abe, S. Sugawa, A. Teramoto, and T. Ohmi, International Conference on Solid State Devices and Materials, 2009/10/07, Without Invitation, English, The Japan Society of Applied Physics, Sendai
    Attached File's URL
  176. Statistical Analysis of Time Constant Ratio of Random Telegraph Signal with Very Large-Scale Array TEG, T. Fujisawa, K. Abe, S. Watabe, N. Miyamoto, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2009/10/07, Without Invitation, English, The Japan Society of Applied Physics, Sendai
    Attached File's URL
  177. Light-emitting Diode Based on ZnO by Plasma Enhanced MOCVD Employing Microwave Exited Plasma , H. Asahara, D. Takamizu, A. Inokuchi, M. Hirayama, A. Teramoto, and T. Ohmi, International Conference on Solid State Devices and Materials, 2009/10/07, Without Invitation, English, The Japan Society of Applied Physics, Sendai
    Attached File's URL
  178. Impact of Channel Doping Concentration on Random Telegraph Signal Noise, K. Abe, A. Teramoto, S. Watabe, T. Fujisawa, S. Sugawa, Y. Kamata, K. Shibusawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2009/10/07, Without Invitation, English, The Japan Society of Applied Physics, Sendai
    Attached File's URL
  179. Very High Performance CMOS on Si(551) Surface Using Radical Oxidation Silicon Flattening Technology and Accumulation-Mode SOI Device Structure, W. Cheng, A. Teramoto, and T. Ohmi, 216th ECS Meeting, 2009/10/04, Without Invitation, English, The Electrochemical Society, Vienna
    Attached File's URL
  180. Damage free very low electron temperature plasma process for low Flicker noise in p-MOS fabricated on (100) and (110) silicon-oriented wafers, P. Gaubert, A. Teramoto, T. Ohmi, The 39th European Solid-State Device Research Conference, 2009/09/14, Without Invitation, English, IEEE, Athens
    Attached File's URL
  181. Obvious suppression of performance degradation induced by thermal effect in SOI power LDMOSFETs using accumulation mode device structure, W. Cheng, A. Teramoto, and T. Ohmi, 13th European Conference on Power Electronics and Applications, 2009/09/08, Without Invitation, Japanese, IEEE, Barcelona
    Attached File's URL
  182. Experimental demonstration and analysis of high performance and low 1/f noise Tri-gate MOSFETs by optimizing device structure, W. Cheng, A. Teramoto, T. Ohmi, The 16th International Conference Insulating Films on Semiconductors, 2009/06/29, Without Invitation, English, Cambridge
    Attached File's URL
  183. MOS Transistors fabricated on Si(551) surface based on radical reaction processes, A. Teramoto, W. Cheng, C. F. Tye, S. Sugawa, and T. Ohmi, Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices, 2009/06/24, With Invitation, Japanese, The Institute of Electronics and Information Engineers The Institute of Electronics, Information and Communication Engineers, Busan
    Attached File's URL
  184. A Statistical Analysis of Distributions of RTS Characteristics by Wide-Range Sampling Frequencies, K. Abe, T. Fujisawa, A. Teramoto, S. Watabe, S. Sugawa, and T. Ohmi, sia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices, 2009/06/24, Without Invitation, English, The Institute of Electronics and Information Engineers The Institute of Electronics, Information and Communication Engineers, Busan
    Attached File's URL
  185. Study on Compositional Transition Layers at Gate Dielectrics/Si Interface by using Angle-resolved X-ray Photoelectron, T. Suwa, T. Aratani, M. Higuchi, S. Sugawa, E. Ikenaga, J. Ushio, H. Nohira, A. Teramoto, T. Ohmi, and T. Hattori, Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices, 2009/06/24, Without Invitation, English, The Institute of Electronics and Information Engineers The Institute of Electronics, Information and Communication Engineers, Busan
    Attached File's URL
  186. Suppression of 1/f Noise in Accumulation Mode FD-SOI MOSFETs on Si(100) and (110) Surfaces, W. Cheng, C. Tye, P. Gaubert, A. Teramoto, S. Sugawa, and T. Ohmi, 20th International Conference on Noise and Fluctuations, 2009/06/14, Without Invitation, English, IEEE, Pisa
    Attached File's URL
  187. Thermal Decomposition Characteristics of Metal-organic Materials of Zinc Oxide for Evaluation as MOCVD Precursor, K. Watanuki, H. Asahara, A. Inokuchi, T. Kadota, C. Hasegawa, H. Kanato, A. Teramoto, Y. Shirai, and T. Ohmi, 215th ECS Meeting, 2009/05/24, Without Invitation, English, The Electrochemical Society, San Francisco
    Attached File's URL
  188. UV-Raman Spectroscopy Study on SiO2/Si Interface, M. Hattori, T. Yoshida, D. Kosemura, A. Ogura, T. Suwa, A. Teramoto, T. Hattori, and T. Ohmi, 215th ECS Meeting, 2009/05/24, Without Invitation, English, The Electrochemical Society, San Francisco
    Attached File's URL
  189. Reduction of Scratch on Brush Scrubbing in Post CMP Cleaning by Analyzing Contact Kinetics on Ultra Low-k Dielectric, X. Gu, T. Nemoto, A. Teramoto, T. Ito, and T. Ohmi, 215th ECS Meeting, 2009/05/24, Without Invitation, English, The Electrochemical Society, San Francisco
    Attached File's URL
  190. Atomically Flat Interface for the Reduction of the Low Frequency Noise on Si(100) nMOS Transistors, P. Gaubert, R. Kuroda, S. Endo, Y. Kuboyama, T. Kitagaki, H. Nada, H. Tamura, A. Teramoto, and T. Ohmi, 215th ECS Meeting, 2009/05/24, Without Invitation, English, The Electrochemical Society, San Francisco
    Attached File's URL
  191. Deposition of Noncrystalline SiGe by Magnetron Sputtering on SiO2 Substrate, A. Hiroe, T. Goto, A. Teramoto, T. Ohmi, IEICE, 2009/05/07, Without Invitation, Japanese, IEICE, Toyohashi
    Attached File's URL
  192. Asymmetry of RTS characteristics along source-drain direction and statistical analysis of process-induced RTS, K. Abe, Y. Kumagai, S. Sugawa, S. Watabe, T. Fujisawa, A. Teramoto, and T. Ohmi, IEEE International Reliability Physics Symposium, 2009/04/26, Without Invitation, English, IEEE, Montreal
    Attached File's URL
  193. Optimizing Pad Groove Design and Polishing Kinematics for Reduced Shear Force, Low Force Fluctuation and Optimum Removal Rate Attributes of Copper CMP, Y. Sampurno, A. Philipossian, S. Theng, T. Nemoto, X. Gu, Y. Zhuang, A. Teramoto, and T. Ohmi, MRS Spring Meeting, 2009/04/13, Without Invitation, English, Material Research Society, San Francisco
    Attached File's URL
  194. Effect of Pad Groove Design and Polisher Kinematics in Reducing Average and Variance of Shear Force and Increasing Removal Rate in Copper CMP, Y. Sampurno, A. Philipossian, S. Theng, T. Nemoto, X. Gu, Y. Zhuang, A. Teramoto, and T. Ohmi, MRS Spring Meeting, 2009/04/13, Without Invitation, English, Material Research Society, San Francisco
    Attached File's URL
  195. Novel End-point Detection Method by Monitoring Shear Force Oscillation Frequency for Barrier Metal Polishing in Advanced LSI, X. Gu, T. Nemoto, A. Philipossian, J. Cheng, Y. A. Sampurno, Y. Zhuang, A. Teramoto, T. Ito, and T. Ohmi, MRS SPRING MEETING, 2009/04/13, Without Invitation, English, Material Research Society, San Francisco
    Attached File's URL
  196. A Test Structure for Statistical Evaluation of Characteristics Variability in a Very Large Number of MOSFETs, S. Watabe, S. Sugawa, K. Abe, T. Fujisawa, N. Miyamoto, A. Teramoto, and T. Ohmi, IEEE International Conference on Microelectronic Test Structures, 2009/03/30, Without Invitation, English, IEEE, Oxnard
    Attached File's URL
  197. Advanced Method for Measuring Ultra-Low Contact Resistivity Between Silicide and Silicon Based on Cross Bridge Kelvin Resistor, T. Isogai, H. Tanaka, A. Teramoto, T. Goto, S. Sugawa, and T. Ohmi, IEEE International Conference on Microelectronic Test Structures, 2009/03/30, Without Invitation, English, IEEE, Oxnard
    Attached File's URL
  198. Accurate Time Constant of Random Telegraph Signal Extracted by a Sufficient Long Time Measurement in Very Large-Scale Array TEG, T. Fujisawa, K. Abe, S. Watabe, N. Miyamoto, A. Teramoto, S. Sugawa, and T. Ohmi, IEEE International Conference on Microelectronic Test Structures, 2009/03/30, Without Invitation, English, IEEE, Oxnard
    Attached File's URL
  199. Micro Crystalline Si1-xGex Deposited by Magnetron Sputtering, A. Hiroe, T. Goto, A. Teramoto, and T. Ohmi, 214th ECS Meeting, 2008/10/12, Without Invitation, English, The Electrochemical Society, Honolulu
    Attached File's URL
  200. Three-Step Room Temperature Cleaning of Bare Silicon Surface for Radical Based Semiconductor Manufacturing, R. Hasebe, A. Teramoto, R. Kuroda, T. Suwa, S. Sugawa, and T. Ohmi, 214th ECS Meeting, 2008/10/12, Without Invitation, English, The Electrochemical Society, Honolulu
    Attached File's URL
  201. Hole Mobility in Si(110) p-MOS Transistors, P. Gaubert, A. Teramoto, T. Ohmi, 214th ECS Meeting, 2008/10/12, Without Invitation, English, The Electrochemical Society, Honolulu
    Attached File's URL
  202. Improved High Temperature Characteristics in Accumulation-mode Fully Depleted SOI MOSFETs on Si(100) and (110) Surfaces, W. Cheng, A. Teramoto, and T. Ohmi, 214th ECS Meeting, 2008/10/12, Without Invitation, English, The Electrochemical Society, Honolulu
    Attached File's URL
  203. Statistical evaluation of characteristics variation and RTS noise of MOSFETs, T. Fujisawa, S. Sugawa, S. Watabe, K. Abe, A. Teramoto, T. Ohmi, IEICE, 2008/10/09, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  204. The data analysis and measurement technique of the atomic force microscopy for the atomically flat silicon surface, M. Konda, A. Teramoto, T. Suwa, R. Kuroda, T. Ohmi, IEICE, 2008/10/09, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  205. Evaluation of Post Cu-CMP Cleaning Chemicals for Non-Porous Ultra Low-k Dielectric Fluorocarbon Film, X. Gu, T. Nemoto, A. Teramoto, T. Itoh, T. Ohmi, IEICE, 2008/10/09, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  206. Investigation of Novel End-Point-Detection for Ta/Cu CMP, Xun Gu, Takenao Nemoto, Ara Philipossian・Yasa Adi Sampurno, Jiang Cheng, Yun Zhuang, Akinobu Teramoto, Takashi Ito, Tadahiro Ohmi, IEICE, 2008/10/09, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  207. Study on Compositional Transition Layers at Gate Dielectrics/Si Interface by using Angle-resolved X-ray Photoelectron Spectroscopy, T. Suwa, T. Aratani, S. Sugawa, E. Ikenaga, J. Ushio, H. Nohira, A. Teramoto, T. Ohmi, T. Hattori, IEICE, 2008/10/09, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  208. Correlation between Stress Induced Leakage Current and Random Telegraph Signal noise, Y. Kumagai, A. Teramoto, T. Fujisawa, S. Watabe, T. Suwa, N. Miyamoto, S. Sugawa, T. Ohmi, IEICE, 2008/10/08, Without Invitation, Japanese, Sendai
    Attached File's URL
  209. CMOSFET Featuring Atomically Flat Gate Insulator Film/Silicon Interface on (100) Orientation Surface, R. Kuroda, A. Teramoto, T. Suwa, Y. Nakao, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2008/09/23, Without Invitation, English, The Japan Society of Applied Physics, Tsukuba
    Attached File's URL
  210. A Study on Very High Performance Novel Balanced FD-SOI CMOSFETs on Si(110) Using Accumulation Mode Device Structure for RF Analog Circuits, W. Cheng, A. Teramoto, C.-F. Tye, R. Kuroda, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2008/09/23, Without Invitation, English, The Japan Society of Applied Physics, Tsukuba
    Attached File's URL
  211. Impact of Tungsten Capping Layer on Yttrium Silicide for Low Resistance Source/Drain Contacts, T. Isogai, H. Tanaka, T. Goto, A. Teramoto, S. Sugawa and T. Ohmi, International Conference on Solid State Devices and Materials, 2008/09/23, Without Invitation, English, The Japan Society of Applied Physics, Tsukuba
    Attached File's URL
  212. Effects of Ion-Bombardment-Assist and High Temperature on Growth of Zinc Oxide Films by Microwave Excited High Density Plasma Enhanced MOCVD, H. Asahara, At. Inokuchi, K. Watanuki1, M. Hirayama, A. Teramoto, and T. Ohmi, International Conference on Solid State Devices and Materials, 2008/09/23, Without Invitation, English, The Japan Society of Applied Physics, Tsukuba
    Attached File's URL
  213. μc-Si1-xGex Deposition on SiO2 by RF Magnetron Sputtering, A. Hiroe, T. Goto, A. Teramoto, and T. Ohmi, International Conference on Solid State Devices and Materials, 2008/09/23, Without Invitation, English, The Japan Society of Applied Physics, Tsukuba
    Attached File's URL
  214. Anomalous RTS Extractions from a Very Large Number of n-MOSFETs using TEG with 0.47 Hz - 3.0 MHz Sampling Frequency, K. Abe, T. Fujisawa, A. Teramoto, S. Watabe, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2008/09/23, Without Invitation, English, The Japan Society of Applied Physics, Tsukuba
    Attached File's URL
  215. Effect of various cleaning solutions and brush scrubber kinematics on the frictional attributes of post copper CMP cleaning process, Y. Zhuang, T. Sun, Y. Sampurno, X. Gu, T. Nemoto, F. Sudatgho, S. N. Theng, A. Philipossian, A. Teramoto, and T. Ohmi, Tthe 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, 2008/09/21, Without Invitation, English, IMEC, Bruges
    Attached File's URL
  216. 3-step room temperature wet cleaning process for silicon substrate, R. Hasebe, A. Teramoto, R. Kuroda, T. Suwa, S. Sugawa, and T. Ohmi, The 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, 2008/09/21, Without Invitation, English, IMEC, Bruges
    Attached File's URL
  217. Damage-free post-CMP cleaning solution for Low-K fluorocarbon on advanced interconnects, X. Gu, A. Teramoto, T. Nemoto, R. Hasebe, T. Ito, and T. Ohmi, The 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, 2008/09/21, Without Invitation, English, IMEC, Bruges
  218. Atomically flat gate insulator/silicon (100) interface formation introducing high mobility, ultra-low noise, and small characteristics variation CMOSFET, R. Kuroda, A. Teramoto, T. Suwa, R. Hasebe, X. Li, M. Konda, S. Sugawa, and T. Ohmi, 38th European Solid-State Device Research Conference, 2008/09/15, Without Invitation, English, IEEE, Edinburgh
    Attached File's URL
  219. Impact of Performance and Reliability Boosters in Novel FD-SOI CMOS Devices on Si(110) Surface for Analog Applications, W. Cheng, A. Teramoto, R. Kuroda, C.-F. Tye, S. Watabe, S. Sugawa, and T. Ohmi, 29th International Conference on the Physics of Semiconductors, 2008/07/27, Without Invitation, English, The International Unions of Pure and Applied Physics, Rio de Janeiro
    Attached File's URL
  220. The data analysis technique of the atomic force microscopy for the atomically flat silicon surface, M. Konda, A. Teramoto, T. Suwa, R. Kuroda, and T. Ohmi, Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices, 2008/07/02, Without Invitation, English, The Institute of Electronics, Information and Communication Engineers The Institute of Electronics and Information Engineers, Sapporo
    Attached File's URL
  221. A Material of Semiconductor Package with Low Dielectric Constant, Low Dielectric Loss and Flat Surface for High Frequency and Low Power Propagation, H. Imai, M. Sugimura, M. Kawasaki, A. Teramoto, S. Sugawa, and T. Ohmi, Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices, 2008/07/02, Without Invitation, English, The Institute of Electronics, Information and Communication Engineers The Institute of Electronics and Information Engineers, Sapporo
    Attached File's URL
  222. Stress Induced Leakage Current and Random Telegraph Signal, A. Teramoto, Y. Kumagai, K. Abe, T. Fujisawa, S. Watabe, T. Suwa, N. Miyamoto, S. Sugawa, and T. Ohmi, 15th Workshop on Dielectrics in Microelectronics, 2008/06/20, Without Invitation, English, Innovations for High Performance Microelectronics, Berlin
    Attached File's URL
  223. Different mechanism to explain the 1/f noise in n-and p-SOI-MOS transistors fabricated on (110) and (100) silicon oriented wafers, P. Gaubert, A. Teramoto, W. Cheng, T. Hamada, and T. Ohmi, 5th Workshop on Dielectrics in Microelectronics, 2008/06/20, Without Invitation, English, Innovations for High Performance Microelectronics, Berlin
    Attached File's URL
  224. A new approach to realize high performance RF power FETs on Si(110) surface, W. Cheng, A. Teramoto, and T. Ohmi, IEEE Power Electronics Specialists Conference, 2008/06/15, Without Invitation, English, IEEE, Rohdes
    Attached File's URL
  225. New insulation material with flat-surface, low coefficient of thermal expansion, low-dielectric-loss for next generation semiconductor packages, M. Sugimura, H. Imai, M. Kawasaki, K. Kamata, K. Fujii, Y. Fujito, S. Yonehara, A. Teramoto, S. Sugawa, and T. Ohmi, Electronic Components and Technology Conference, 2008/05/27, Without Invitation, English, IEEE, Lake Buena Vista
    Attached File's URL
  226. Impact of New Approach to Improve RF Power FETs Performance on Si(110) Surface, W. Cheng, A. Teramoto, and T. Ohmi, 213th ECS Meeting, 2008/05/18, Without Invitation, English, The Electrochemical Society, Phoenix
    Attached File's URL
  227. Statistical evaluation for anomalous SILC of tunnel oxide using integrated array TEG, Y. Kumagai, A. Teramoto, S. Sugawa, T. Suwa, and T. Ohmi, IEEE International Reliability Physics Symposium, 2008/04/27, Without Invitation, English, IEEE, Phoenix
    Attached File's URL
  228. International Semiconductor Technology Conference, T. Nemoto, G. Xun, H. Imai, A. Teramoto, T. Ito, S. Sugawa, and T. Ohmi, MRS Spring Meeting, 2008/03/24, Without Invitation, English, Material Research Society, San Francisco
    Attached File's URL
  229. Characterization of MOSFETs intrinsic performance using in-wafer advanced Kelvin-contact device structure for high performance CMOS LSIs, R. Kuroda, A. Teramoto, T. Komuro, C. Weitao, S. Watabe, T. Ching Foa, S. Sugawa, and T. Ohmi, IEEE International Conference on Microelectronic Test Structures, 2008/03/24, Without Invitation, English, IEEE, Edinburgh
    Attached File's URL
  230. High Performance Bottom Gate μc-Si TFT Fabricated by Microwave Plasma CVD, A. Hiroe, A. Teramoto, and T. Ohmi, MRS Symposium, 2008/03/24, Without Invitation, English, Material Research Society, San Francisco
    Attached File's URL
  231. The Cleaning Method Which is Able to Keep the Smoothness of Si (100), X. Li, X. Gu, A. Teramoto, R. Kuroda, R. Hasebe, T. Suwa, N. Yu, S. Sugawa, T. Ito and T. Ohmi, International Semiconductor Technology Conference 2008, 2008/03/15, Without Invitation, English, The Institute of Scientific and Technical Communicators, Shanghai
    Attached File's URL
  232. Atomically Flat Gate Insulator/Silicon (100) Interface Formation Technology for High Performance LSI, A. Teramoto, R. Kuroda, T. Suwa and T. Ohmi, WPI & IFCAM Joint Workshop -Challenge of Interdisciplinary Materials Science to Technological Innovation of the 21st Century, 2008/02, Without Invitation, English, Tohoku University, Sendai
    Attached File's URL
  233. High performance Bottom Gate μc-Si TFT Fabricated by Low Damage, High Density Plasma Source, A. Hiroe, M. Hirayama, Y. Shirai, A. Teramoto and T.Ohmi, The 14th International Display Workshops, 2007/12/05, Without Invitation, English, The Institute of Image Information and Television Engineers The Society for Information Display, Sapporo
    Attached File's URL
  234. Development of a high efficiency PFC abatement system utilizing plasma and Ca(OH)2/CaO under a decompression atmosphere, K. Suzuki, Y. Ishihara, K. Sakoda, Y. Shirai, M. Hirayama, A. Teramoto, T. Ohmi, and T. Watanabe, International Symposium on Semiconductor Manufacturing, 2007/10/15, Without Invitation, English, IEEE, Santa Clara
    Attached File's URL
  235. Development of a Xenon recycling and supply system for plasma process, M. Yamawaki, T. Urakami, Y. Ishihara, Y. Shirai, A. Teramoto, and T. Ohmi, International Symposium on Semiconductor Manufacturing, 2007/10/15, Without Invitation, English, IEEE, Santa Clara
    Attached File's URL
  236. Performance Boost Using a New Device Structure Design for SOI MOSFETs Beyond 25nm Node, W. Cheng, A. Teramoto, and T. Ohmiu, 212th ECS Meeting, 2007/10/07, Without Invitation, English, The Electrochemical Society, Washington D.C.
    Attached File's URL
  237. High Mobility Bottom Gate Microcrystalline Si TFT Fabricated by Microwave Plasma CVD, A. Hiroe, A. Teramoto, T. Ohmi, IEICE, 2007/10/04, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  238. Statistical Evaluation of Characteristics Variability caused by Plasma Processes, S. Watabe, S. Sugawa, K. Abe, T. Fujisawa, N. Miyamoto, A. Teramoto, T. Ohmi, IEICE, 2007/10/04, Without Invitation, Japanese, Sendai
    Attached File's URL
  239. Nitrogen Profile Study for SiON Gate Dielectrics of Advanced DRAM, Shigemi Murakawa, Masashi Takeuchi, Minoru Honda, Shu-ichi Ishizuka, Toshio Nakanishi, Yoshihiro Hirota, Takuya Sugawara, Yoshitsugu Tanaka, Yasushi Akasaka, Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi, IEICE, 2007/10/04, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  240. The Evaluation of New Amorphous Hydrocarbon Film aCHx, for Low-k Copper Barrier Film, H. Ishikawa, T. Nozawa, T. Matsuoka, A. Teramoto, M. Hirayama, T. Ito, T, Ohmi, IEICE, 2007/10/04, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  241. Atomic order flatting technology of silicon surface, Tomoyuki Suwa, Rihito Kuroda, Akinobu Teramoto, Tadahiro Ohmi, IEICE, 2007/10/04, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  242. Statistical Evaluation of Random Telegraph Signal Using a Very Large-scale Array TEG, Kennichi Abe, Shigetoshi Sugawa, Rihito Kuroda, Shunnichi Watabe, Akinobu Teramoto, Tadahiro Ohmi, IEICE, 2007/10/04, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  243. Modeling and Implementation of Subthreshold Characteristics of Accumulation-Mode MOSFETs for Various SOI Layer Thickness and Impurity Concentrations, R. Kuroda, A. Teramoto, W. Cheng, S. Sugawa, and T. Ohmi, IEEE International SOI Conference, 2007/10/01, Without Invitation, English, IEEE, Indian Wells
    Attached File's URL
  244. Performance Comparison of Ultra-thin FD-SOI Inversion-, Intrinsic-and Accumulation- Mode MOSFETs, R. Kuroda, A. Teramoto, S. Sugawa and T. Ohmi, International Conference on Solid State Devices and Materials, 2007/09/18, Without Invitation, English, The Japan Society of Applied Physics, Tsukuba
    Attached File's URL
  245. he Evaluation of New Amorphous Hydrocarbon Film aCHx, for Copper Barrier Dielectric Film in Low-k Copper Metallization, H. Ishikawa, T. Nozawa, T. Matsuoka, A. Teramoto, M. Hirayama, T. Ito and T. Ohmi, International Conference on Solid State Devices and Materials, 2007/09/18, Without Invitation, English, The Japan Society of Applied Physics, Tsukuba
    Attached File's URL
  246. Low Dielectric Constant Non- Porous Fluorocarbon Films for Inter-Layer Dielectric, A. Itoh, A. Inokuchi, S. Yasuda, A. Teramoto, T. Goto, M. Hirayama and T. Ohmi, International Conference on Solid State Devices and Materials, 2007/09/18, Without Invitation, English, The Japan Society of Applied Physics, Tsukuba
    Attached File's URL
  247. Low Contract Resistance with Low Schottky Barrier for N-Type Silicon Using Yttrium Silicide, T. Isogai, H. Tanaka, T. Goto, A. Teramoto, S. Sugawa and T. Ohmi, International Conference on Solid State Devices and Materials, 2007/09/18, Without Invitation, English, The Japan Society of Applied Physics, Tsukuba
    Attached File's URL
  248. Characterization of Zinc Oxide Films Grown by a Newly Developed Plasma Enhanced MOCVD Employing Microwave Excited High Destiny Plasma, H. Asahara, A. Inokuchi, K.Watanuki, M. Hirayama, A. Teramoto and T. Ohmi, International Conference on Solid State Devices and Materials, 2007/09/18, Without Invitation, English, The Japan Society of Applied Physics, Tsukuba
    Attached File's URL
  249. Statistical Analysis of RTS Noise and Low Frequency Noise in 1M MOSFETs Using an Advanced TEG, K. Abe, S. Sugawa, S. Watabe, N. Miyamoto, A. Teramoto, M. Toita, Y. Kamata, K. Shibusawa, and T. Ohmi, 9th International Conference on Noise and Fluctuations, 2007/09/09, Without Invitation, English, IEEE, Tokyo
    Attached File's URL
  250. Impact of the channel direction on the 1/f noise in SOI -MOSFETs fabricated on (100) and (110) silicon oriented wafers, P. Gaubert, W. Cheng, A. Teramoto and T. Ohmi, 19th International Conference on NOISE AND FLUCTUATIONS-ICNF2007, 2007/09/09, Without Invitation, English, IEEE, Tokyo
    Attached File's URL
  251. 13.56 and 100 MHz Coupled Mode Rf-Sputtering for Ferroelectric Sr2(Ta1-x,Nbx)2O7 (STN) Film Applied to One-Transistor-Type Ferroelectric Random Access Memory, I. Takahashi, T. Shinohara, A. Teramoto, M. Hirayama, S. Sugawa, and T. Ohmi, 11th European Meeting on Ferroelectricity, 2007/09/03, Without Invitation, English, Bled
    Attached File's URL
  252. Microwave-Excited Plasma Enhanced Metal-Organic Chemical Vapor Deposition with Ion-Bombardment-Assistance for Forming Ferroelectric Sr2(Ta1-x,Nbx)2O7 (STN) Thin Film, I. Takahashi, M. Hirayama, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Electroceramics , 2007/07, Without Invitation, English, Arusha
    Attached File's URL
  253. Random Telegraph Signal Statistical Analysis using a Very Large-scale Array TEG with 1M MOSFETs, K. Abe, S. Sugawa, S. Watabe, N. Miyamoto, A. Teramoto, Y. Kamata, K. Shibusawa, M. Toita, and T. Ohmi, IEEE Symposium on VLSI Technology, 2007/06/12, Without Invitation, English, The Japan Society of Applied Physics IEEE, Kyoto
    Attached File's URL
  254. Study on subnitride and valence band offset at Si3N4 / Si interface formed using nitrogen radicals, Akinobu Teramoto, Takashi Aratani, Masaaki Higuchi, Eiji Ikenaga, Hiroshi Nohira, Shigetoshi Sugawa, Tadahiro Ohmi, Takeo Hattori, 2007/06/08, Without Invitation, Japanese, IEICE, Higashi Hiroshima
    Attached File's URL
  255. Statistical Evaluation of Localized Low Gate Current through Tunnel Dielectric using Integrated Array TEG, Yuki Kumagai, A.kinobu Teramoto, Shigetoshi Sugawa, Tomoyuki Suwa, Tadahiro Ohmi, IEICE, 2007/06/07, Without Invitation, Japanese, IEICE, Higashihiroshima
    Attached File's URL
  256. Analysis of Source Follower Random Telegraph Signal Using nMOS and pMOS Array TEG, K. Abe, S. Sugawa, R. Kuroda, S. Watabe, N. Miyamoto, A. Teramoto, T. Ohmi, Y. Kamata, and K. Shibusawa, International Image Sensor Workshop, 2007/06/07, Without Invitation, English, IEEE Electron Devices Society Institute of Television Engineers of Japan (ITEJ) Jet Propulsion Laboratory Siimpel Corporation Walter Kosonocky Award, Ogunquit
    Attached File's URL
  257. Fabrication of Pt/Sr2(Ta1-x,Nbx)2O7/SiO2/Si Field-Effect Transistor for One-Transistor-Type Ferroelectric Random Access Memory, I. Takahashi, K. Azumi, Y. Shirai, M. Hirayama, A. Teramoto, S. Sugawa, and T. Ohmi, 6th WSEAS International Conference on MICROELECTRONICS, NANOELECTRONICS, OPTOELECTRONICS, 2007/05/27, Without Invitation, English, World Scientific and Engineering Academy and Society, Istanbul
    Attached File's URL
  258. Hot Carrier Instability Mechanism in Accumulation-Mode Normally-off SOI nMOSFETs and Their Reliability Advantage, R. Kuroda, A. Teramoto, W. Cheng, S. Sugawa and T. Ohmi, 211th Meeting of The Electrochemical Society, 2007/05/06, Without Invitation, English, The Electrochemical Society, Chicago
    Attached File's URL
  259. Impact of Improved Mobilities and Suppressed 1/f Noise in Fully Depleted SOI MOSFETs Fabricated on Si(110) Surface, W. Cheng, A. Teramoto, C. Tye, P. Gaubert, M. Hirayama, S. Sugawa and T. Ohmi, 211th Meeting of The Electrochemical Society, 2007/05/06, Without Invitation, English, The Electrochemical Society, Chicago
    Attached File's URL
  260. NBTI Mechanism Based on Hole-Injection for Accurate Lifetime Prediction, A. Teramoto, R. Kuroda, and T. Ohmi, 211th Meeting of The Electrochemical Society, 2007/05/06, With Invitation, English, The Electrochemical Society, Chicago
    Attached File's URL
  261. Formation of Ferroelectric Sr2(Ta1-x,Nbx)2O7 Film (STN) on SiON formed by microwave-excited plasma and (Ba1-x,Srx)TiO3(BST) by rf sputtering applied to One-Transistor-Type Ferroelectric Memory Device, I.Takahashi, T. Suwa, K. Azumi, T. Isogai, Y. Shirai, M. Hirayama, A. Teramoto, S. Sugawa, and T. Ohmi, The 19th International Symposium of Integrated Ferroelectrics, 2007/05, Without Invitation, English, Bordeaux
    Attached File's URL
  262. High Performance and highly reliable novel CMOS devices using accumulation mode multi-gate and fully depleted SOI MOSFETs, W. Cheng, A. Teramoto, R. Kuroda, M. Hirayama, and T. Ohmi, The 15th Biennial Conference on Insulating Films on Semiconductors, 2007/03/24, Without Invitation, English, Athens
    Attached File's URL
  263. Development of Microwave-Excited Plasma Enhanced Metal-Organic Chemical Vapor deposition System and Formation of Ferroelectric Sr2(Ta1-x,Nbx)2O7 Film, Ichirou Takahashi, Kiyoshi Funawa, Keita Azumi, Satoru Yamashita, Yasuyuki Shirai, Masaki Hirayama, Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi, IEICE, 2007/03/15, Without Invitation, Japanese, IEICE, Tokyo
    Attached File's URL
  264. Preperation and Electrical Properties of Ultrathin Stacked Si3N4/High-k Dielectric Pr3Si6N11 Films grown in Radical Reaction Based MOCVD Systems, H. Wakamatsu, I. Takahashi, A. Teramoto, and T. Ohmi, The Joint International Conference of 4th International Symposium on　System　Construction　of　Global-Network-Oriented Ioformation Electronics and Student-Organizing International Mini-Conference on Ioformation Electronics System, 2007/01, Without Invitation, English, Tohoku University, Sendai
    Attached File's URL
  265. High Quality Gate Insulator Film Formation on SiC at Low Temperature, Koutaro Tnaka, Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi, IEICE, 2006/12/14, Without Invitation, Japanese, IEICE, Kyoto
    Attached File's URL
  266. Electric and interface characteristics of Si3N4 films formed by directly radical NH on Si (110) and Si (100) surfaces, M. Higuchi, T. Suwa, T. Aratani, T. Hamada, A. Teramoto, T. Hattori, S. Sugawa, T. Ohmi, S. Shinagawa, H. Nohira, and E. Ikenaga, 7th IEEE Semiconductor Interface Specialists Conference, 2006/12/07, Without Invitation, English, IEEE, San Diego
    Attached File's URL
  267. Revolutional Progress of Silicon Technologies Exhibiting Very High Speed Performance Over 50 GHz Clock Rate, T. Ohmi, A. Teramoto, R. Kuroda, and N. Miyamoto, The 6th Taiwan-Japan Microelectronics International Symposium, 2006/11/01, With Invitation, English, National Chiao Tung University, Hsinchu
    Attached File's URL
  268. Radical Oxidation on Ultra Pure Silicon Surface, K. Kawase, M. Higuchi, T. Suwa, H. Umeda, M. Inoue, A. Teramoto, T. Hattori, S. Sugawa, and T. Ohmi, 210th ECS Meeting, 2006/10/29, Without Invitation, English, The Electrochemical Society, Mexico
    Attached File's URL
  269. Impact of improved mobility and low flicker noise MOS transistors using accumulation mode fully depleted silicon-on-insulator devices, W. Cheng, A. Teramoto, P. Gaubert, M. Hirayama, and T. Ohmi, International Conference on Solid-State and Integrated Circuit Technology, 2006/10/23, Without Invitation, English, IEEE, Shanghai
    Attached File's URL
  270. Consecutive uniform etching process in a single chamber using the microwave-excited plasma etcher with RLSA, Kazuyuki Ikenaga, Tetsuya Goto, Akinobu Teramoto, Masaki Hirayama, Toshihisa Nozawa, Tadahiro Ohmi, IEICE, 2006/10/05, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  271. Very Low Bit Error Rate in Flash Memory Using Tunnel Dielectrics Formed by Kr/O_2/NO Plasma Oxynitridation, Tomoyuki Suwa, Yuki Kumagai, Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi, IEICE, 2006/10/05, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  272. Electrical Characteristics and Interface Structure of Ultra-thin Si_3N_4 films on Si (100) and Si (110), T. Aratani, M. Higuchi, T. Hamada, A. Teramoto, T. Hattori, S. Sugawa, T. Ohmi, S. Shinagawa, H. Nohira, E. Ikenaga, IEICE, 2006/10/05, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  273. A Study on Statistical Evaluation Method for the Variation of MOSFETs, K. Abe, S. Watabe, S. Sugawa, A. Teramoto, T. Ohmi, IEICE, 2006/10/05, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  274. A New Statistical Evaluation Method for the Variation of MOSFETs, S. Watabe, S. Sugawa, A. Teramoto, and T. Ohmi, International Conference on Solid State Devices and Materials, 2006/09/12, Without Invitation, English, The Japan Society of Applied Physics, Yokohama
    Attached File's URL
  275. Technology of Ferroelectric Thin Film Formation with Large Coercive Field for Future Scaling Down of Ferroelectric Gate FET Memory Device, I. Takahashi, T. Isogai, K. Azumi, M. Hirayama, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2006/09/12, Without Invitation, English, The Japan Society of Applied Physics, Yokohama
    Attached File's URL
  276. Formation of Ferroelectric Sr2(Ta1-x,Nbx)2O7 Thin Film on Amorphous SiO2 by Microwave-Excited Plasma Enhanced Metalorganic Chemical Vapor Deposition, I. Takahashi, K. Funaiwa, S. K. Azumi, Yamashita, Y. Shirai, M. Hirayama, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2006/09/12, Without Invitation, English, The Japan Society of Applied Physics, Yokohama
    Attached File's URL
  277. Very Low Bit Error Rate in Flash Memory using Tunnel Dielectrics formed by Kr/O2/NO Plasma Oxynitridation, T. Suwa, H. Takahashi, Y. Kumagai, G. Fujita, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2006/09/12, Without Invitation, English, The Japan Society of Applied Physics, Yokohama
    Attached File's URL
  278. Low Leakage Current and Low Resistivity p+n Diodes on Si(110) Fabricated by Ga+/B+ Combination I/I and Low Temperature Annealing, H. Imai, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2006/09/12, Without Invitation, English, The Japan Society of Applied Physics, Yokohama
    Attached File's URL
  279. Electric characteristics of Si3N4 films formed by directly radical nitridation on Si (110) and Si (100) surfaces, M. Higuchi, T. Aratani, T. Hamada, A. Teramoto, T. Hattori, S. Sugawa, T. Ohmi, S. Shinagawa, H. Nohira, E. Ikenaga, and K. Kobayashi, International Conference on Solid State Devices and Materials, 2006/09/12, Without Invitation, English, The Japan Society of Applied Physics, Yokohama
    Attached File's URL
  280. Formation of Metal-Ferroelectric-Insulator-Si Structure Device with Large Memory Window by Supplying Ion Bombardment Energy in Rf-Sputtering Plasma, I. Takahashi, T. Isogai, K. Azumi, A. Teramoto, S. Sugawa, and T. Ohmi, 15th International Symposium on the Applications of Ferroelectrics, 2006/07/30, Without Invitation, English, IEEE, Sunset Beach
    Attached File's URL
  281. Accurate Extraction of Conduction Parameters in MOSFETs on Si(110) surface, P. Gaubert, A. Teramoto, T. Hamada, T. Suwa, and T. Ohmi, 8th International Conference on the Physics of Semiconductors,, 2006/07/24, Without Invitation, English, IEEE, Shanghai
    Attached File's URL
  282. The Dependence of Remaining Carbon in the Electrical Property of the Gate Insulator Film on SiC at Low Temperature Insulator Formation, K. Tanaka, H. Tanaka, A. Teramoto, S. Sugawa, and T. Ohmi, Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices, 2006/07, Without Invitation, English, IEICE The Institute of Electronics and Information Engineers (IEIE) of Korea, Sendai
    Attached File's URL
  283. The dependence of the intermediate nitridation states density at Si3N4/Si interface on surface Si atoms density, M. Higuchi, S. Shinagawa, A. Teramoto, H. Nohira, T. Hattori, E. Ikenaga, S. Sugawa, and T. Ohmi, Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices, 2006/07, Without Invitation, English, IEICE The Institute of Electronics and Information Engineers (IEIE) of Korea, Sendai
    Attached File's URL
  284. High Quality Gate Insulator Film Formation on SiC using by Microwave-Excited High-Density Plasma, K. Tanaka, H. Tanaka, A. Teramoto, S. Sugawa, and T. Ohmi, 14th Workshop on Dielectrics in Microelectronics, 2006/06/26, Without Invitation, English, CNR Institute for Microelectronics and Microsystems, Catania
    Attached File's URL
  285. Accurate Circuit Performance Prediction Model and Lifetime Prediction Method of NBT Stressed Devices for Highly Reliable ULSI Circuits, R. Kuroda, K. Watanabe, A. Teramoto, M. Mifuji, T. Yamaha, S. Sugawa, and T. Ohmi, IEEE International Conference on Integrated Circuit Design and Technology, 2006/05/24, With Invitation, English, IEEE, Padova
    Attached File's URL
  286. Accurate circuit performance prediction model and lifetime prediction method of nbt stressed devices for highly reliable ulsi circuits, R. Kuroda, K. Watanabe, A. Teramoto, M. Mifuji, T. Yamaha, S. Sugawa, and T. Ohmi, International Electron Devices Meeting, 2005/12/05, Without Invitation, English, IEEE, Washington D. C.
    Attached File's URL
  287. Statistical evaluation of very low gate leakage current for bit error evaluation in Flash Memory, T. Suwa, S. Sugawa, H. Takahashi, A. Teramoto, and T. Ohmi, he 16th Symposium of The Materials Research Society of Japan, 2005/12, Without Invitation, English, Material Research Society of Japan, Tokyo
    Attached File's URL
  288. Development of NBTI Lifetime Prediction Method and Evaluation Method using Hole Injection Technique, Akinobu Teramoto, Kazufumi Watanabe, Rihito Kuroda, Michihiko Mifuji, Takahisa Yamaha, Shigetoshi Sugawa, Tadahiro Ohmi, IEICE, 2005/11/25, Without Invitation, Japanese, IEICE, Osaka
    Attached File's URL
  289. Suppression of Surface Micro-Roughness of Silicon Wafer by Addition of Alcohol into Ultra Pure Water for Rinsing Process, M. Yamamoto, K. Nii, H. Morinaga, A. Teramoto, and T. Ohmi, The 208th ECS Meeting, 2005/10/16, Without Invitation, English, The Electrochemical Society, Los Angeles
    Attached File's URL
  290. New NBTI Lifetime Prediction Method for Ultra Thin SiO2 Films, K. Watanabe, R. Kuroda, A. Teramoto, S. Sugawa, and T. Ohmi, The 208th ECS Meeting, 2005/10/16, Without Invitation, English, The Electrochemical Society, Los Angeles
    Attached File's URL
  291. The effect of oxygen concentration in cleaning process, N. Mizutani, H. Morinaga, A. Teramoto, and T. Ohmi, The 208th ECS Meeting, 2005/10/16, Without Invitation, English, The Electrochemical Society, Los Angeles
    Attached File's URL
  292. High resolution X-ray photoelectron spectroscopy study on Si3N4/Si interface structures and its correlation with hysteresis in C-V curves, M. Higuchi, A. Teramoto, M. Komura, S. Shinagawa, E. Ikenaga, H. Nohira, K. Kobayashi, T. Hattori, S. Sugawa, and T. Ohmi, The 208th ECS Meeting, 2005/10/16, Without Invitation, English, The Electrochemical Society, Los Angeles
    Attached File's URL
  293. High resolution X-ray photoelectron spectroscopy study on Si_3N_4/Si interface structures and its correlation electrical properties by NH^* direct nitridation process, M. Higuchi, M. Komura, A. Teramoto, S. Shinagawa, E. Ikenaga, K. Kobayashi, H. Nohira, S. Sugawa, T. Hattori, T. Ohmi, IEICE, 2005/10/06, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  294. EOT Measurement by LC Resonance Method for Ultra Thin Gate Dielectrics, Rihito, Kuroda, Akinobu Teramoto, Masanori Komura, Kazufumi Watanabe, Shigetoshi Sugawa, Tadahiro Ohmi, IEICE, 2005/10/06, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  295. Fabrication of ultra clean silicon surface, K. Kawase, H. Umeda, M. Inoue, T. Suwa, M. Higuchi, A. Teramoto, S. Sugawa, T. Ohmi, IEICE, 2005/10/06, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  296. Suppression of the low frequency noise level in (100) and (110) oriented silicon p-MOSFETs induced by an alkali-free cleaning process, P. Gaubert, A. Teramoto, T. Hamada, M. Yamamoto, and T. Ohmi, IEICE Technical Committee on Silicon Device and Materials, 2005/10/06, Without Invitation, English, IEICE, Sendai
    Attached File's URL
  297. Impact of interface micro-roughness on low frequency noise in (110) and (100) pMOSFETs, P. Gaubert, A. Teramoto, T. Hamada, M. Yamamoto, K. Nii, H. Akahori, K. Kotani, and T. Ohmi, 8th International Conference on Noise and Fluctuations,, 2005/09/19, Without Invitation, English, IEEE, Salamanca
    Attached File's URL
  298. Study of the Metal-Ferroelectric-Insulator-Si Structure Device Formation by Controlling Properties of High Frequency and Microwave Excited Plasma, I. Takahashi, H. Sakurai, T. Isogai, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2005/09/12, Without Invitation, English, The Japan Society of Applied Physics, Kobe
    Attached File's URL
  299. Damage-Free Microwave-Excited Plasma Contact Hole Etching without Carrier Deactivation at the Interface between Silicide and Heavily-Doped Si, T. Goto, M. Terasaki, H. Asahara, H. Nakazawa, A. Inokuchi, J. Yamanaka, A. Teramoto, M. Hirayama, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2005/09/12, Without Invitation, English, The Japan Society of Applied Physics, Kobe
    Attached File's URL
  300. Impact of The Improved High Performance Si(110) Oriented MOSFETs by Using Accumulation-Mode Fully Depleted SOI Devices, W. Cheng, A. Teramoto, M. Hirayama, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2005/09/12, Without Invitation, English, The Japan Society of Applied Physics, Kobe
    Attached File's URL
  301. Geometry and Bias Dependency of Low-Frequency Random Telegraph Signal and 1/F Noise Levels in MOSFETs, M. Toita, L. K. J. Vandamme, S. Sugawa, A. Teramoto, and T. Ohmi, 20th Annual Meeting of Japanese Association for Science, Art and Technology of Fluctuations, 2005/09, Without Invitation, English, Tokyo
    Attached File's URL
  302. Reduction of 1/f noise in Si(110) nad (110) surface MOSFET using a new clearning technology, P. Gaubert, A. Teramoto, K. Kotani, and T. Ohmi, 20th Annual Meeting of Japanese Association for Science, Art and Technology of Fluctuations, 2005/09, Without Invitation, English, Tokyo
    Attached File's URL
  303. Impact of High Performance Accumulation-Mode Fully Depleted SOI MOSFETs, W. Cheng, A. Teramoto, M. Hirayama, S. Sugawa, and T. Ohmi, Asia-Pacific Workshop on fundamentals and Applications of Advanced Semiconductor Devices, 2005/06, Without Invitation, English, The Institute of Electronics, Information and Communication Engineers (IEICE-ES) The Institute of Electronics and Information Engineers (IEIE), Seoul
    Attached File's URL
  304. EOT measurement for ultra-thin gate dielectrics using LC resonance circuit, A. Teramoto, M. Komura, R. Kuroda, K. Watanabe, S. Sugawa, and T. Ohmi, nternational Conference on Microelectronic Test Structures, 2005/04/04, Without Invitation, English, IEEE, Leuven
    Attached File's URL
  305. High Current Drivability MOSFET Fabricated on Si(110) Surface, A. Teramoto and T. Ohmi, MRS Spring Meeting, 2005/03/28, With Invitation, English, Material Research Society, San Francisco
    Attached File's URL
  306. Quantum Chemical Study on Chemical Reactivity of Silicon Surface, K. Chiba, H. Tsuboi, M. Koyama, M. Kubo, K. Nii, A. Teramoto, T. Ohmi, A Miyamoto　, IEICE, 2004/10/15, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  307. ontrol of Native Oxide Growth on Silicon Surface, Hiroshi Akahori, Keiichi Nii, Kazumi Tsukamoto, Akinobu Teramoto, Tadahiro Ohmi, IEICE, 2004/10/15, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  308. Control of nitrogen depth profile and chemical bonding state in radical nitrided silicon oxide film, K. Kawase, H. Umeda, M. Inoue, T. Suwa, M. Higuchi, M. Komura, A. Teramoto, T. Ohmi, IEICE, 2004/10/14, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  309. Improvement of Ferroelectric STN Thin Film Properties by Oxygen Radical Treatment, T. Isogai, I. Takahashi, H. Sakurai, T. Goto, M. Hirayama, A. Teramoto, S. Sugawa, T. Ohmi, IEICE, 2004/10/14, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  310. Suppression of Surface Micro-Rouhness on Si(110), K. Nii, M. Yamamoto, A. Teramoto, and T. Ohmi, 206th ECS Meeting, 2004/10/03, Without Invitation, English, The Electrochemical Society, Honolulu
    Attached File's URL
  311. The Thermal Degradation Prevention of Fluorocarbon Material for Interlayer Dielectric Film, A. Hidaka, S. Yamashita, M. Kitano, A. Teramoto, Y. Shirai, and T. Ohmi, 206th ECS Meeting, 2004/10/03, Without Invitation, English, The Electrochemical Society, Honolulu
    Attached File's URL
  312. High Quality Plasma Processing using Microwave Excited Plasma System with Xenon Gas, Y. Shirai, A. Teramoto, M. Hirayama, T. Ohmi, H. Hasegawa, Y. Ishihara, T. Satoh, and M. Yamawaki, International Symposium on Semiconductor Manufacturing, 2004/09/27, Without Invitation, English, IEEE, Tokyo
    Attached File's URL
  313. A Large-Signal MOSFET Model Based on Transient Carrier Response for RF Circuits, K. Watanabe, K. Kotani, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2004/09/14, Without Invitation, English, The Japan Society of Applied Physics, Tokyo
    Attached File's URL
  314. MFIS-structure Memory Device with High Quality Ferroelectric Sr2 (Ta1-xNbx)2 O7 Formed by Physical Vapor Deposition and Oxygen Radical Treatment by Oxygen Assisted Layer by Layer(ROALL) deposition, H. Sakurai, I. Takahashi, T. Isogai, K. Funaiwa, T. Tsunoda, T. Goto, M. Hirayama, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2004/09/14, Without Invitation, English, The Japan Society of Applied Physics, Tokyo
    Attached File's URL
  315. Control of nitrogen profile in radical nitridation of SiO2 films, K. Kawase, H. Umeda, M. Inoue, S. Tsujikawa, Y. Akamatsu, A. Teramoto, and T. Ohmi, International Conference on Solid State Devices and Materials, 2004/09/14, Without Invitation, English, The Japan Society of Applied Physics, TOきょ
    Attached File's URL
  316. Accurate Temperature Drift model of MOSFETs Mobility for Analog Circuits, K. Watanabe, T. Hamada, K. Kotani, A. Teramoto, S. Sugawa, and T. Ohmi, Simulation of Semiconductor Processes and Devices, 2004/09/02, Without Invitation, English, IEEE, Munich
    Attached File's URL
  317. XPS study of radical nitrided silicon oxide film, K. Kawase, H. Umeda, M. Inoue, S Tsujikawa, Y. Akamatsu, A. Teramoto, T. Ohmi, IEICE SDM, 2004/06/22, Without Invitation, Japanese, IEICE, Tokyo
    Attached File's URL
  318. Sub-Micron MOSFETs Technology Characterization by Low-Frequency Noise, M. Toita, S. Sugawa, A. Teramoto, and T. Ohmi, 3rd European Microelectronics and Packaging Symposium, 2004/06/16, Without Invitation, English, International Microelectronics and Packaging Society, Prague
    Attached File's URL
  319. High Performance Low Noise CMOS Fabricated on Flattened (110) oriented Si Substrate, T. Hamada, A. Teramoto, H. Akahori, K. Nii, T. Suwa, M. Hirayama, and T. Ohmi, Asia-Pacific Workshop on Fundamentals and Application of Advanced Semiconductor Devices, 2004/06, Without Invitation, English, The Institute of Electronics, Information and Communication Engineers The Institute of Electronics and Information Engineers, Nagasaki
    Attached File's URL
  320. Atomic Order Flattening and Hydrogen Termination of Si(110) Surface , H. Akahori K. Nii A. Teramoto T. Ohmi , 205th ECS Meeting, 2004/05/10, Without Invitation, English, The Electrochemical Society, San Antonio
    Attached File's URL
  321. 1/f noise degradation caused by Fowler-Nordheim tunneling stress in MOSFETs, M. Toita, S. Sugawa, A. Teramoto, T. Akaboshi, H. Imai, and T. Ohmi, IEEE International Reliability Physics Symposium, 2004/03/30, Without Invitation, English, IEEE, Dallas
    Attached File's URL
  322. Low Noise Balanced-CMOS Technology Formed on Si(110) Surface, Akinobu Teramoto, Tatsufumi Hamada, Hiroshi Akahori, Keiichi Nii, Koji Kotani, Tadahiro Ohmi, IEICE SDM, 2004/01/16, With Invitation, Japanese, IEICE, Tokyo
    Attached File's URL
  323. Low Noise Balanced-CMOS on Si(110) Surface for Analog/Digital Mixed Signal Circuits, A. Teramoto, T. Hamada, H. Akahori, K. Nii, T. Suwa, K. Kotani, M. Hirayama, S. Sugawa,T. Ohmi, International Electron Device Metting, 2003/12/08, Without Invitation, IEEE, Washington D.C.
    Attached File's URL
  324. Electrical Characteristics of MOSFET on Flattened (110) oriented Si substrate, Tatsfumi Hamada, Hiroshi Akahori, Keiichi Nii, Tomoyuki Suwa, Masaki Hirayama, Akinobu Teramoto, Tadahiro Ohmi, IEICE SDM, 2003/10/21, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  325. Flattening of Silicon(11O) surface, Hiroshi Akahori, Keiichi Nii, Akinobu Teramoto, Masaki Hirayama, Tadahiro Ohmi, IEICE SDM, 2003/10/21, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  326. A Hydrogen Termination Process on Silicon Surface as investigated by Computational Chemistry, H. Iga, K. Chiba, S. Uchida, Y. Sasaki, R. Endou, K. Sugawara, A. Chida, J. Matsuda, N. Isoda, K. Sasada, T. Yokosuka, A. Endou, M. Kubo, A. Imamura, K. Nii, A. Teramoto, T. Ohmi, A. Miyamoto, IEICE SDM, 2003/10/21, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  327. High Performance Poly-Si TFT with Thin Gate Oxide Film Grown by Oxygen Radical, K. Ishii, F. Imaizumi, T. Hayashi, A. Teramoto, M. Hirayama, S. Sugawa, T. Ohmi, IEICE SDM, 2003/10/20, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  328. Very High Reliability of Ultrathin Silicon Nitride Gate Dielectric Film for sub-1OOnm Generation, M. Komura, M. Higuchi, W. Cheng, I Ohshima, A. Teramoto, M. Hirayama, S. Sugawa, T.Ohmi, IEICE SDM, 2003/10/20, With Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  329. High Quality Silicon Nitride Film Formed by Microwave-Excited Plasma Enhanced Chemical Vapor Deposition with Dual Gas Shower Head, H. Tanaka, C. Zhong, Y. Hayakawa, M. Hirayama, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2003/09/16, Without Invitation, Japanese, The Japan Society of Applied Physics, Tokyo
    Attached File's URL
  330. A Low Dielectric Constant Sr2(Ta1-x,Nbx)2O7 Thin Film Controlling the Crystal Orientation on IrO2 Substrate for One Transistor Type Ferroelectric Memory Device, I. Takahashi, H. Sakurai, A. Yamada, T. Goto, M. Hirayama, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2003/09/16, Without Invitation, English, The Japan Society of Applied Physics, Tokyo
    Attached File's URL
  331. Very High Reliability of Ultrathin Silicon Nitride Gate Dielectric Film for Sub-100nm Generation, M. Komura, M. Higuchi, W. Cheng, I. Ohshima, A. Teramoto, M. Hirayama, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2003/09/16, Without Invitation, English, The Japan Society of Applied Physics, Tokyo
    Attached File's URL
  332. High Performance Poly-Si Device with Thin Gate Oxide Film Grown by Plasma Oxidation Technology, F. Imaizumi, T. Hayashi, K. Ishii, A. Teramoto, M. Hirayama, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2003/09/16, Without Invitation, English, The Japan Society of Applied Physics, Tokyo
    Attached File's URL
  333. High-Speed Damage-Free Contact Hole Etching using Dual Shower Head Microwave-Excited High-Density Plasma Equipment, T. Goto, H. Yamauchi, T. Kato, A. Teramoto, M. Hirayama, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2003/09/16, Without Invitation, English, The Japan Society of Applied Physics, Tokyo
    Attached File's URL
  334. Atomic Order Flattening of Hydrogen-Terminated Si(110) substrate For Next Generation ULSI Devices, H. Akahori, K. Nii, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2003/09/16, Without Invitation, English, The Japan Society of Applied Physics, Tokyo
    Attached File's URL
  335. Very High Integrity Thin Film Formations at Very Low Temperatures, T. Ohmi, A. Teramoto, H. Tanaka, and M. Hirayama, MRS Spring Meeting, 2003/04/24, With Invitation, English, Material Research Society, San Francisco
    Attached File's URL
  336. Influence of the noble gas atom contained in the plasma oxides and nitrides on the electrical properties, M. Higuchi, T. Suwa, I OhshimaW. Cheng, A. Teramoto, M. Hirayama, S. Sugawa, T. Ohmi, IEICE SDM, 2002/10/28, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  337. Reduction Effect of Flicker Noise by Atomic Scale Flattening Silicon Surface, K. Tanaka, K. Watanabe, H. Ishino, S. Sugawa, A. Teramoto, M. Hirayama, T. Ohmi, IEICE SDM, 2002/10/28, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  338. Oxygen Radical Annealing Applied to Ferroelectric Thin Films, I. Takahashi, H. Sakurai, A. Yamada, K. Funaiwa, K. Hirai, S. Urabe, T. Goto, M. Hirayama, A. Teramoto, S. Sugawa, and T. Ohmi, Fourth International Symposium on Control of Semiconductor Interfaces, 2002/10, Without Invitation, English, Japan Society for the Promotion of Science, Karuizawa
    Attached File's URL
  339. Highly Reliable Silicon Nitride Gate Dielectrics Grown at Low Temperature by Microwave-Excited High-Density Plasma, I. Ohshima, W. Cheng, M. Hirayama, A. Teramoto, H. Shimada, Y. Ono, S. Sugawa, and T. Ohmi, Fourth International Symposium on Control of Semiconductor Interfaces, 2002/10, Without Invitation, English, Japan Society for the Promotion of Science, Karuizawa
    Attached File's URL
  340. A Ferroelectric Sr2(Ta1-x, Nbx)2O7　with a Low Dielectric Constant by Plasma PVD and Oxygen Radical , I. Takahashi, H. Sakurai, A. Yamada, K. Funaiwa, K. Hirai, S. Urabe, T. Goto, M. Hirayama, A. Teramoto, S. Sugawa, and T. Ohmi, International Conference on Solid State Devices and Materials, 2002/09/17, Without Invitation, English, The Japan Society of Applied Physics, Nagoya
    Attached File's URL
  341. A Technology of Reducing Flicker Noise for ULSI Applications, K. Tanaka, K. Watanabe, H. Ishino, S. Sugawa, A. Teramoto, M. Hirayama, and T. Ohmi, International Conference on Solid State Devices and Materials, 2002/09/17, Without Invitation, English, The Japan Society of Applied Physics, Nagoya
    Attached File's URL
  342. Improving Reliability of Ultra Thin Silicon Nitride Gate Dielectric Film Directly Grown at Low Temperature by Microwave-Excited High-Density Plasma, W. Cheng, I. Ohshima, H. Shimada, Y. Ono, M. Hirayama, A. Teramoto, S. Sugawa, T. Ohmi, IEICE SDM, 2002/06/20, Without Invitation, Japanese, IEICE, Higashihiroshima
    Attached File's URL
  343. Influence of Organic Contamination on Electrical Property of Gate Oxides, M. Inoue, T. Takahashi, A. Teramoto, Y. Horie, T. Kaneoka, Y. Ohno, E. Hara, J. Kobayashi, IEICE SDM, 2001/10/09, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  344. Saturation Phenomenon of Stress-Induced Gate Leakage Current, S. Ueno, T. Kuroi, A. Teramoto, H. Umeda, T. Eimori, and Y. Inoue, International Conference on Solid State Devices and Materials, 2001/09/26, Without Invitation, English, The Japan Society of Applied Physics, Tokyo
    Attached File's URL
  345. Oxide thickness dependence of nitridation effects on TDDB characteristics, M. K. Mazumder, A. Teramoto, J. Komori, and Y. Mashiko, International Conference on Microelectronic Test Structures, 2001/03/19, Without Invitation, English, IEEE, Kobe
    Attached File's URL
  346. 80 nm CMOSFET technology using double offset-implanted source/drain extension and low temperature SiN process, H. Sayama, Y. Nishida, H. Oda, J. Tsuchimoto, H. Umeda, A. Teramoto, K. Eikyu, Y. Inoue, and M. Inuishi, International Electron Devices Meeting, 2000/12/10, Without Invitation, English, IEEE, San Francisco
    Attached File's URL
  347. Breakdown Mechanism of Thin Gate Oxide Films, A. Teramoto, M. Inoue, H. Umeda, Y. Ohno, A. Nishimoto, IEICE SDM, 2000/10/19, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  348. Extraction of the physical oxide thickness using the electrical characteristics of MOS capacitors, K. Eikyu, H. Takashino, M. Kidera, A. Teramoto, H. Umeda, K. Ishikawa, N. Kotani, and M. Inuishi, International Conference on Simulation of Semiconductor Processes and Devices, 2000/09/06, Without Invitation, English, IEEE, Seattle
    Attached File's URL
  349. Electric Characteristics of Gate Dielectrics formed by using an RTA, H. Umeda, A. Teramoto, Y. Ohno, A. Shigetomi, IEICE SDM, 1999/09/28, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  350. Electric-Field Dependence of Gate Oxide Life Time, M. Inoue, A. Teramoto, H. Umeda, Y. Ohno, A. Shigetomi, IEICE SDM, 1999/09/28, Without Invitation, Japanese, IEICE, Sendai
    Attached File's URL
  351. Study of oxide breakdown under very low electric field, A. Teramoto, H. Umeda, K. Azamawari, K. Kobayashi, K. Shiga, J. Komori, Y. Ohno, and H. Miyoshi, IEEE International Reliability Physics Symposium, 1999/03/23, Without Invitation, English, IEEE, San Diego
    Attached File's URL
  352. Characterization of Extrinsic Oxide Breakdown on Thin Dielectric Oxide, K. Shiga, J. Komori, M. Katsumata, A. Teramoto, Y. Mashiko, IEICE SDM, 1998/11/20, Without Invitation, Japanese, IEICE
    Attached File's URL
  353. Gate Oxide Formation at Low Temperature using UV-O_2 Oxidation, A. Teramoto, Y. Ohno, H. Miyoshi, IEICE SDM, 1998/07/28, Without Invitation, Japanese, IEICE, Tokyo
    Attached File's URL
  354. A new test structure for evaluation of extrinsic oxide breakdown, K. Shiga, J. Komori, M. Katsumata, A. Teramoto, and M. Sekine, International Conference on Microelectronic Test Structures, 1998/03/20, Without Invitation, English, IEEE, Kanazawa
    Attached File's URL
  355. Degradation of the characteristics of p+ poly MOS capacitors with NO nitrided gate oxide due to post nitrogen annealing, M. K. Mazumder, A. Teramoto, K. Kobayashi, M. Sekine, S. Kawazu, and H. Koyama, IEEE International Integrated Reliability Workshop , 1997/10/13, Without Invitation, English, IEEE, Lake Tahoe
    Attached File's URL
  356. Highly Reliable SiO2 films Formed by UV-O2 Oxidation, A. Teramoto, K. Konayashi, Y. Ohmo, and M. Hirayama, International Conference on Solid State Devices and Materials, 1997/09/16, Without Invitation, English, The Japan Society of Applied Physics, Hamamatsu
    Attached File's URL
  357. High Performance 0.2 mm Dual Gate CMOS by Suppression of Transient-Enhanced-Diffusion Using Rapid Thermal Annealing Technolohies, Y. Nishida, H. sayama, S. Shimizu, T. Kuroi, A. Furukawa, A. Teramoto, T. Uchida, Y. Inoue, and T. Nishimura, International Conference on Solid State Devices and Materials, 1997/09/16, Without Invitation, English, The Japan Society of Applied Physics, Hamamatsu
    Attached File's URL
  358. Temperature dependence of TDDB characteristics of thin SiO2 film for flash memory, M. Katsumata, A. Teramoto, K. Kobayashi, M. K. Mazumder, R. Sekine, and H. Koyama, 6th International Symposium on Physical and Failure Analysis of Integrated Circuits, 1997/07/22, Without Invitation, English, IEEE, Singapore
    Attached File's URL
  359. Channel Profile Control Based On Transient-enhanced-diffusion Suppression By RTA For 0.18 mm Single Gate CMOS, A. Furukawa, A. Teramoto, S. Shimizu, Y. Abe, and Y. Tokuda, Symposium on VLSI Technology,, 1997/06/12, Without Invitation, English, IEEE The Japan Society of Applied Physics, Kyoto
    Attached File's URL
  360. Dopant redistribution during gate oxidation including transient enhanced diffusion in oxidizing ambient, T. Uchida, K. Eikyu, M. Fujinaga, A. Teramoto, and H. Miyoshi, International Electron Devices Meeting, 1996/12/08, Without Invitation, English, IEEE, San Francisco
    Attached File's URL
  361. High reliability of nanometer-range N2O-nitrided oxides due to suppressing hole injection, K. Kobayashi, A. Teramoto, T. Nakamura, H. Watanabe, H. Kurokawa, Y. Matsui, and M. Hirayama, International Electron Devices Meeting, 1996/12/08, Without Invitation, English, IEEE, San Francisco
    Attached File's URL
  362. Effect of N2O or NO annealing of wet oxide at different times on TDDB characteristics, M. K. Mazumder, A. Teramoto, K. Kobayashi, M. Katsumata, Y. Mashiko, M. Sekine, H. Koyama, and A. Yasuoka, IEEE International Integrated Reliability Workshop, 1996/10/20, Without Invitation, English, IEEE, Lake Tahoe
    Attached File's URL
  363. Sub-quarter-micron dual gate CMOSFETs with ultra-thin gate oxide of 2 nm, T. Kuroi, S. Shimizu, S. Ogino, A. Teramoto, M. Shirahata, Y. Okumura, M. Inuishi, and H. Miyoshi, Symposium on VLSI Technology, 1996/06/13, Without Invitation, English, IEEE The Japan Society of Applied Physics, Honolulu
    Attached File's URL
  364. Excess currents induced by hot-hole injection and F-N stress in thin SiO2 films, A. Teramoto, K. Kobayashi, Y. Matsui, M. Hirayama, and A. Yasuoka, IEEE International Reliability Physics Symposium, 1996/04/30, Without Invitation, English, IEEE, Dallas
    Attached File's URL
  365. Clarification of Nitridation Effect on Oxinitridation Methods, T. Kuroi, S. Shirahata, Y. Okumura, S. Shimizu, A. Teramoto, M. Anma, M. Inuishi, and T. Hirao, International Conference on Solid State Devices and Materials, 1995/08/21, Without Invitation, English, The Japan Society of Applied Physics, Osaka
    Attached File's URL
  366. Electron traps and excess current induced by hot-hole injection into thin SiO2 films, K. Kobayashi, A. Teramoto, and M. Hirayama, International Reliability Physics Symposium , 1995/04/04, Without Invitation, English, IEEE, Las Vegas
    Attached File's URL
  367. Area and thickness dependence of the TDDB characteristics of silicon dioxides, A. Teramoto, K. Kobayashi, M. Hirayama, IEICE SDM, 1994/07/25, Without Invitation, Japanese, IEICE
    Attached File's URL
  368. Pre-oxide-Controlled Oxidation for Very Thin Gate Oxide, K. Makihara, A. Teramoto, K. Nakamura, M. Morita, and T. Ohmi, International Conference on Solid State Devices and Materials, 1992/08/26, Without Invitation, English, The Japan Society of Applied Physics, Tsukuba
    Attached File's URL
  369. High Reliability of Ultraclean Oxide Films, M. Morita, K. Nakamura, A. Teramoto, K. Makihara, and T. Ohmi, 183th Electrochemical Society Meeting, 1992/05, Without Invitation, English, The Electrochemical Society, Honolulu
    Attached File's URL
  370. Effect of Silicon Wafer In Situ Cleaning on the Chemical Structure of Ultrathin Silicon Oxide Film, N. Terada, H. Ogawa, K. Moriki, A. Teramoto, K. Makihara, M. Morita, T. Ohmi, and T. Hattori, International Conference on Solid State Devices and Materials, 1991/08/27, Without Invitation, English, The Japan Society of Applied Physics, Yokohama
    Attached File's URL
  371. Effects of Si Wafer Surface Micro-Roughness on Electrical Properties of Very-Thin Gate Oxide Films, M. Morita, A. Teramoto, K. Makihara, T. Ohmi, Y. Nakazato, A. Uchiyama, and T. Abe, 179th Electrochemical Society Meeting, 1991/05, Without Invitation, English, The Electrochemical Society, Washington D.C.
    Attached File's URL
  372. Native Oxide Growth on Silicon Surface in Wet Ambient, M. Morita, T. Ohmi, E. Hasegawa, and A. Teramoto, International Conference of Solid State Device and Materials, 1990/08/22, Without Invitation, English, The Japan Society of Applied Physics, Sendai
    Attached File's URL
  373. Particle Generation from Gate Valves and its Behavior, M. Morita, T. Ohmi, E. Hasegawa, A. Teramoto, and S. Kawajiri, American Association for Aerosol Research, 1990/06, Without Invitation, English, American Association for Aerosol Research, Philadelphia
    Attached File's URL
  374. Measurement of gas concentration distribution in vacuum chamber using high SN ratio absorption imaging, Keigo Takahashi, Yhang Ricardo Sipauba Carvalho da Silva, Naoki Numao, Rihito Kuroda, Yasuyuki Fujihara, Maasa Murata, Hidekazu Ishii, Tatsuo Morimoto, Tomoyuki Suwa, Akinobu Teramoto, Shigetoshi Sugawa, The Institute of Image Information and Television Engineers, 2019/06/18, Without Invitation, Japanese, The Institute of Image Information and Television Engineers, Tokyo
    Related URL
  375. Gas concentration distribution measurement in semiconductor process chamber using a high SNR CMOS absorption image sensor, K. Takahashi, Yhang Ricardo Sipauba Cavalho da Silva, R. Kuroda, Y. Fujiwara, M. Murata, H. Ishii, T. Morimoto, T. SUwa, A. Teramoto, S. Sugawa, IEICE　SDM, 2019/10/24, Without Invitation, Japanese, IEICE, Sendai
  376. Resistance Measurement Platform for Statistical Evaluation of Emerging Memory Materials with High Accuracy, Takeru Maeda, Yuya Omura, Rihito Kuroda, Akinobu Teramoto, Tomoyuki Suwa, Shigetoshi Sugawa, IEICE　SDM, 2019/10/24, Without Invitation, Japanese, IEICE, Sendai
    Related URL
  377. Influence of Silicon Wafer Surface Roughness on Semiconductor Device Characteristics, K. Mori, S. Samata, N. Mitsugi, A. Teramoto, R. Kuroda, T. Suwa, K. Hashimoto, and S. Sugawa, International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ELECTRON DEVICES: SCIENCE AND TECHNOLOGY, 2019/11/18, Without Invitation, English, The Japan Society of Applied Physics, Tokyo
  378. Dielectric breakdown of MgO in MRAM, A. Teramoto, J. Tsuchimoto, H. Park, M. Hayashi, K. Tsunekawa, T. Suwa, R. Kuroda, and S. Sugawa, Special MRAM poster session IEDM, 2019/12/11, Without Invitation, English, IEEE, San Francisco
  379. Plasma Resistance of Sintered Yttrium Oxyfluoride (YOF) with Various Y, O, and F Composition Ratios, T. Goto, Y. Shiba, A. Teramoto, Y. Kishi, and S. Sugawa, AVS 66th International Symposium, 2010/02/01, Without Invitation, English, AVS, Columbus，OH, USA
    Related URL
  380. Operation Principle and Structure of normally-off Floating Gate GaN HEMT with Injection Gate, Kenshi Nagumo, Daiki Kimoto, Tomoyuki Suwa, Akinobu Teramoto, Riichiro Shirota, Shinichiro Tskatani, Rihito Kuroda, Shigetoshi Sugawa, IEICE Technical Committee on Electron Devices, 2020/01/31, Without Invitation, Japanese, IEICE, Tokyo, We report a GaN HEMT (High Electron Mobility Transistor) with floating gate, that has an additional injection gate for charge injection as a structure to achieve normally-off. The introduction of the injection gate not only avoids damage to the gate insulation film at the period of charge injection, which was a problem of conventional HEMT devices with floating gate, but also suppresses threshold voltage-variation by the charge injection. We show the usefulness of this structure by circuit modeling of this new structure and structural design by numerical calculation.
    Related URL
  381. Large-Scale Evaluation of MIM Devices Using High-Precision Current Measurement Array Test Circuit, Hayato Suzuki, Hyeonwoo Park, Akinobu Teramoto, Rihito Kuroda, Tomoyuki Suwa, Shigetoshi Sugawa, The 67th JSAP Spring Meeting, 2020/02/28, Without Invitation, Japanese, The Japan Society of Applied Physics, Tokyo
    Related URL

Awards

  1. 2014/09/17, Outstanding Paper Award, The Japan Society of Applied Physics, Chemical Structure of Interfacial Transition Layer Formed on Si(100) and Its Dependence on Oxidation Temperature, Annealing in Forming Gas, and Difference in Oxidizing Species
    Related URL

Patented

  1. US9875899, Semiconductor transistor
  2. US10043654, Method for rinsing compound semiconductor, solution for rinsing compound semiconductor containing gallium as constituent element, method for fabricating compound semiconductor device, method for fabricating gallium nitride substrate, and gallium nitride substrate
  3. US9543191, Wiring structure having interlayer insulating film and wiring line without a barrier layer between
  4. US9299844, Accumulation-mode MOSFET and driving method thereof
  5. US9230799, Method for fabricating semiconductor device and the semiconductor device
  6. US9157681, Surface treatment method for atomically flattening a silicon wafer and heat treatment apparatus
  7. US9153658, Semiconductor device and method of manufacturing the same
  8. US8,999,788, Manufacturing method of GaN-based semiconductor device and semiconductor device
  9. US8906796, Method of producing semiconductor transistor
  10. US8841545, Solar cell wherein solar photovolatic thin film is directly formed on base
  11. US8716114, Semiconductor device manufacturing method and semiconductor device
  12. US8664909, Inverter unit, integrated circuit chip, and vehicle drive apparatus
  13. US8648393, Transistor and semiconductor device
  14. US8643106, Semiconductor device
  15. US8633395, Multilayer wiring board
  16. US8575023, Contact formation method, semiconductor device manufacturing method, and semiconductor device
  17. US8497214, Semiconductor device manufacturing method
  18. US8492879, Semiconductor substrate and semiconductor device
  19. US8468719, Silicon carbide substrate, semiconductor device, wiring substrate, and silicon carbide manufacturing method
  20. US8405343, Inverter unit, integrated circuit chip, and vehicle drive apparatus
  21. US8399862, Ion implanting apparatus and ion implanting method
  22. US8362567, Semiconductor device
  23. US8314449, MIS transistor and CMOS transistor
  24. US8328928, Metal nanoink and process for producing the metal nanoink, and die bonding method and die bonding apparatus using the metal nanoink
  25. US8217270, Multilayer circuit board and electronic device
  26. US8198195, Plasma processing method and plasma processing apparatus
  27. US8183670, Semiconductor device and method of manufacturing the same
  28. US8138527, Transistor and semiconductor device
  29. JPUS8134376, Method of measuring electronic device and measuring apparatus
  30. US8093918, Electronic device identifying method and electronic device comprising identification means
  31. US8067809, Semiconductor storage device including a gate insulating film with a favorable nitrogen concentration profile and method for manufacturing the same
  32. UA8895410, Method of manufacturing semiconductor device and semiconductor manufacturing apparatus
  33. US8030182, Semiconductor device manufacturing method and semiconductor manufacturing apparatus
  34. US7994063, Method for manufacturing semiconductor device and method for cleaning semiconductor substrate
  35. US7968470, Plasma nitriding method, method for manufacturing semiconductor device and plasma processing apparatus
  36. US7975901, Bonding apparatus and wire bonding method
  37. US7965097, Test circuit, wafer, measuring apparatus, measuring method, device manufacturing method and display apparatus
  38. US7960937, Inverter unit, integrated circuit chip, and vehicle drive apparatus
  39. US7928518, P-channel power MIS field effect transistor and switching circuit
  40. US7928018, Plasma processing method and method for manufacturing an electronic device
  41. US7902595, Power IC device and method of manufacturing same
  42. US7898033, Semiconductor device
  43. US7893537, Semiconductor device
  44. US7887385, Organic EL light emitting element, manufacturing method thereof, and display device
  45. US7863925, Test circuit, wafer, measuring apparatus, and measuring method
  46. US7863713, Semiconductor device
  47. US7848828, Method and apparatus for managing manufacturing equipment, method for manufacturing device thereby
  48. US7820558, Semiconductor device and method of producing the semiconductor device
  49. US7812595, Electronic device identifying method
  50. US7800202, Semiconductor device
  51. US7774081, Manufacturing system, manufacturing method, managing apparatus, managing method and computer readable medium
  52. US7704893, Semiconductor device, method for manufacturing semiconductor device and gas for plasma CVD
  53. US7691725, Method for manufacturing semiconductor device
  54. US7663195, P-channel power MIS field effect transistor and switching circuit
  55. US7521324, Semiconductor device and method for manufacturing the same
  56. US7449719, Semiconductor device and method of manufacturing the same
  57. US7411274, Silicon semiconductor substrate and its manufacturing method
  58. US7179746, Method of surface treatment for manufacturing semiconductor device
  59. US6756647, Semiconductor device including nitride layer
  60. US 6753233, Method of manufacturing semiconductor device, and semiconductor device having memory cell
  61. US6720601, Semiconductor device comprising a gate conductive layer with a stress mitigating film thereon
  62. US6683004, Method of manufacturing a semiconductor device, and semiconductor device manufactured thereby
  63. US6649969, Nonvolatile semiconductor device
  64. US6638803, Semiconductor device and method for manufacturing the same
  65. US6521509, Semiconductor device and method of manufacturing the same
  66. US6472700, Semiconductor device with isolation insulator, interlayer insulation film, and a sidewall coating film
  67. US6221771, Method of forming tungsten silicide film, method of fabricating semiconductor devices and semiconductor manufactured thereby

Social Activities

History as Committee Members

  1. Program committee, 2020/11/01, 2021/11/30, International Workshop on Dielectric Thin Films for Future Electron Devices: Science and Technology
  2. Program Committee, 2018/11/00, 2019/11/00, The Japan Society of Applied Physics
  3. Program committee, 2018/11/00, 2019/11/30

Other Social Contributions

  1. Semiconductor Technology Symposium, Establishment of Setouchi Semiconductor Consortium, Tohoku University Suppoted by METI, MEXT, Miyagi, and Iwate, 2022/11/28, 2022/11/28, Tokyo, TV or radio appearance, Meeting or assembly, General